semi合集-English.pdf - 第393页

SEMI E52-0703 © SEMI 1995, 2003 29 MIXED GAS NAME SYMBOL CODE 4.5% PHOSPHINE/NITROGEN 4.5% PH3/N2 0528 20% SILANE/HELIUM 20% SiH4/He 0529 20% PHOSPHINE/SILANE 20% PH3/SiH4 0530 1% PHOSPHINE/SILANE 1% PH3/SiH4 0531 10% HY…

100%1 / 7923
SEMI E52-0703 © SEMI 1995, 2003 28
Code Gas Name Symbol Formula Synonym Ref
247 Tellurium Hexafluoride TeF6 TeF
6
2
114 Titanium Tetrachloride TiCl4 TiCl
4
2
254 Titanium Tetraiodide TiI4 TiI
4
2
123 Uranium Hexafluoride UF6 UF
6
2
121 Tungsten Hexafluoride WF6 WF
6
2
6 Xenon Xe Xe 1
324 Xenon difluoride XeF2 XeF
2
F
2
Xe; Xenon fluoride 2
330 Zinc Zn Zn UN 1383 2
90 Intentionally Left Blank
92 Intentionally Left Blank
175 Intentionally Left Blank
9 Mixed Gas Table Sorted by Code
Table 4 Mixed Gases Sorted by Code
MIXED GAS NAME SYMBOL CODE
15%PHOSPHINE/NITROGEN 15%PH3/N2 0500
5%PHOSPHINE/NITROGEN 5%PH3/N2 0501
20%SILANE/NITROGEN 20%SiH4/N2 0502
40%ARGON/TUNGSTEN HEXAFLUORIDE 40%Ar/WF6 0503
10%ARSINE/HYDROGEN 10%AsH3/H2 0504
40%OXYGEN/HEXAFLUOROETHANE(FREON-116) 40%O2/C2F6 0505
2%TRICHLOROETHANE/NITROGEN 2%C2H3Cl3/N2 0506
20%CARBON DIOXIDE/HYDROGEN 20%CO2/H2 0507
30%CARBON DIOXIDE/AIR 30%CO2/Air 0508
10%GERMANE/HYDROGEN 10%GeH4/H2 0509
5%HYDROGEN SELENIDE/HYDROGEN 5%H2Se/H2 0510
10%HYDROGEN SELENIDE/HYDROGEN 10%H2Se/H2 0511
13%HYDROGEN CHLORIDE/1.32%XENON/NEON 13%HCI/1.32%Xe/Ne 0512
20%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 20%O2/CF4 0513
1%PHOSPHINE/NITROGEN 1%PH3/N2 0514
1.6%PHOSPHINE/21%SILANE/ARGON 1.6%PH3/21%SiH4/Ar 0515
10%PHOSPHINE/HYDROGEN 10%PH3/H2 0516
25%PHOSPHINE/SILANE 25%PH3/SiH4 0517
50%PHOSPHINE/NITROGEN 50%PH3/N2 0518
15%SILANE/NITROGEN 15%SiH4/N2 0519
21%SILANE/4%PHOSPHINE/ARGON 21%SiH4/4%PH3/Ar 0520
50%SILANE/HELIUM 50%SiH4/He 0521
20%TRICHLOROSILANE/HYDROGEN 20%SiHCI3/H2 0522
5%TETRAETHYLORTHOSILICATE(TEOS)/NITROGEN 5%Si(C2H5O)4/N2 0523
5%TRIETHYLANTIMONY(TESb)/HYDROGEN 5%(C2H5)3Sb/H2 0524
20%TRIMETHYLALUMINUM(TMAI)/HYDROGEN 20%(CH3)3AI/H2 0525
1%TRIMETHYLBORATE(TMB)/HYDROGEN 1%(CH3O)3B/H2 0526
10%PHOSPHINE/NITROGEN 10%PH3/N2 0527
SEMI E52-0703 © SEMI 1995, 2003 29
MIXED GAS NAME SYMBOL CODE
4.5%PHOSPHINE/NITROGEN 4.5%PH3/N2 0528
20%SILANE/HELIUM 20%SiH4/He 0529
20%PHOSPHINE/SILANE 20%PH3/SiH4 0530
1%PHOSPHINE/SILANE 1%PH3/SiH4 0531
10%HYDROGEN/NITROGEN 10%H2/N2 0532
1.5%PHOSPHINE/SILANE 1.5%PH3/SiH4 0533
3%PHOSPHINE/ARGON 3%PH3/Ar 0534
4%PHOSPHINE/NITROGEN 4%PH3/N2 0535
20%OXYGEN/HELIUM 20%O2/He 0536
1%PHOSPHINE/ARGON 1%PH3/Ar 0537
10%PHOSPHINE/ARGON 10%PH3/Ar 0538
2%PHOSPHINE/ARGON 2%PH3/Ar 0539
20%ARGON/SILANE 20%Ar/SiH4 0540
20%SILANE/ARGON 20%SiH4/Ar 0541
5%HYDROGEN/NITROGEN 5%H2/N2 0542
16%CARBON DIOXIDE/NITROGEN 16%CO2/N2 0543
2%SILANE/HYDROGEN 2%SiH4/H2 0544
15%HYDROGEN/NITROGEN 15%H2/N2 0545
1%PHOSPHINE/HELIUM 1%PH3/He 0546
.01%DIBORANE/HYDROGEN .01%B2H6/H2 0547
.01%SILANE/HYDROGEN .01%SiH4/H2 0548
.5%DIBORANE/ARGON .5%B2H6/Ar 0549
.5%PHOSPHINE/NITROGEN .5%PH3/N2 0550
.5%SILANE/HYDROGEN .5%SiH4/H2 0551
.8%PHOSPHINE/NITROGEN .8%PH3/N2 0552
.8%PHOSPHINE/SILANE .8%PH3/SiH4 0553
.9%ARSINE/HYDROGEN .9%AsH3/H2 0554
1%ARSINE/NITROGEN 1%AsH3/N2 0555
1%ARSINE/SILANE 1%AsH3/SiH4 0556
1%DIBORANE/HYDROGEN 1%B2H6/H2 0557
1%DIBORANE/NITROGEN 1%B2H6/N2 0558
1%BORON TRICHLORIDE/HYDROGEN 1%BCI3/H2 0559
1%BORON TRICHLORIDE/NITROGEN 1%BCI3/N2 0560
1%HYDROGEN/NITROGEN 1%H2/N2 0561
1%OXYGEN/NITROGEN 1%O2/N2 0562
1%PHOSPHINE/HYDROGEN 1%PH3/H2 0563
1.5%ARSINE/HYDROGEN 1.5%AsH3/H2 0564
10%SILANE/ARGON 10%SiH4/Ar 0565
10%FLUORINE/HELIUM 10%F2/He 0566
5%WATER VAPOR/AIR 5%H2O/Air 0567
10%WATER VAPOR/NITROGEN 10%H2O/N2 0568
2%OZONE/OXYGEN 2%O3/O2 0569
10%NITROGEN TRIFLUORIDE/OXYGEN 10%NF3/O2 0570
10%OZONE/OXYGEN 10%O3/O2 0571
10%PHOSPHINE/SILANE 10%PH3/SiH4 0572
SEMI E52-0703 © SEMI 1995, 2003 30
MIXED GAS NAME SYMBOL CODE
10%SILANE/HELIUM 10%SiH4/He 0573
8%CARBON TETRAFLUORIDE(FREON-14)/OXYGEN 8%CF4/O2 0574
10%SILANE/HYDROGEN 10%SiH4/H2 0575
10%NITROGEN/ARGON 10%N2/Ar 0576
20%SILANE/HYDROGEN 20%SiH4/H2 0577
15%ARGON/PHOSPHINE 15%Ar/PH3 0578
15%ARSINE/HYDROGEN 15%AsH3/H2 0579
15%DIBORANE/NITROGEN 15%B2H6/N2 0580
15%PHOSPHINE/15%SILANE/NITROGEN 15%PH3/15%SiH4/N2 0581
15%PHOSPHINE/ARGON 15%PH3/Ar 0582
15%PHOSPHINE/HYDROGEN 15%PH3/H2 0583
15%PHOSPHINE/SILANE 15%PH3/SiH4 0584
17%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 17%O2/CF4 0585
2%ARSINE/NITROGEN 2%AsH3/N2 0586
2%DIBORANE/ARGON 2%B2H6/Ar 0587
2%HYDROGEN/NITROGEN 2%H2/N2 0588
2%SILANE/HELIUM 2%SiH4/He 0589
20%ARSINE/HYDROGEN 20%AsH3/H2 0590
20%DIBORANE/SILANE 20%B2H6/SiH4 0591
20%HYDROGEN/CARBON MONOXIDE 20%H2/CO 0592
20%PHOSPHINE/HYDROGEN 20%PH3/H2 0593
21%OXYGEN/NITROGEN 21%O2/N2 0594
3%DIBORANE/NITROGEN 3%B2H6/N2 0595
3%HYDROGEN/HELIUM 3%H2/He 0596
3%HYDROGEN/NITROGEN 3%H2/N2 0597
3%OXYGEN/HELIUM 3%O2/He 0598
3%OZONE/AIR 3%O3/Air 0599
3%PHOSPHINE/NITROGEN 3%PH3/N2 0600
3%PHOSPHINE/SILANE 3%PH3/SiH4 0601
3%SILANE/HELIUM 3%SiH4/He 0602
30%HELIUM/OXYGEN 30%He/O2 0603
30%OXYGEN/HELIUM 30%O2/He 0604
4%DIBORANE/NITROGEN 4%B2H6/N2 0605
4%HYDROGEN/HELIUM 4%H2/He 0606
4%HYDROGEN/NITROGEN 4%H2/N2 0607
4%NITROGEN/HYDROGEN 4%N2/H2 0608
4%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 4%O2/CF4 0609
4%PHOSPHINE/HELIUM 4%PH3/He 0610
4%PHOSPHINE/SILANE 4%PH3/SiH4 0611
40%HELIUM/SILANE 40%He/SiH4 0612
8%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 8%O2/CF4 0613
5%ARSINE/HYDROGEN 5%AsH3/H2 0614
5%DIBORANE/ARGON 5%B2H6/Ar 0615
5%BORON TRICHLORIDE/HYDROGEN 5%BCI3/H2 0616
5%PROPANE/HYDROGEN 5%C3H8/H2 0617