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SEMI P41-0304 E © SEMI 2004 13 Ma s k S ize In s pe c t i o n Ar e a C h i p S i ze I nsp ec t io n A r ea C hip R e f e ren ce Po in t Figure 8 Inspection Area

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ImageReferenceAddress
ImageInformation
ImageFormat
ImageMagnification
ImagePixelNumber_X
ImagePixelNumber_Y
ImagePixelSize (unit)
ImagePixelSize_X
ImagePixelSize_Y
ImageGrayLevel
ImageIllumination
ImageRotation
ImageMirror
ImageFlip
ImageConvertInformation
ImageContrast
ImageBrightness
ImageConversionParameter
ImageReference (origin)
ImageReferencePoint
ImageReferencePosition_X
ImageReferencePosition_Y
ImageTarget (origin)
ExpressionMark
ImageTargetPosition_X
ImageTargetPosition_Y
ImageReferencePosition(unit)
ImageTargetPosition (unit)
Figure 7
Structure of Image Data Section
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Mask S ize
Inspecti on Are a
Chip Size
Inspection Area Chip
Reference Point
Figure 8
Inspection Area
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Mask Origin Point
Tool Origin Point
Mask
Tool Offset X and Y
Stage or Holder
Skew
Scale
Coordinate System
Figure 9
Tool Coordinate