semi合集-English.pdf - 第5560页

SEMI P10-0705 © SEMI 1990, 2005 55 </xs:sequence> <xs:element name="CdVerticalLocation" type="XYType"/> </xs:sequence> </xs:sequence> <xs:attribute name="groupName&quot…

SEMI P10-0705 © SEMI 1990, 2005 54

<xs:sequence minOccurs="0">

<xs:element name="CdDeviationFromMean"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdStd" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdCorrelationId" type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartCdSet"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndCdSet"/>

</xs:complexType>

<xs:complexType name="CdXyDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdXGroup" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdYGroup" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdXySite" type="CdXySiteType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdXyTolerance" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdXyDeviation" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdXyReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartCdXyDefinition"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndCdXyDefinition"/>

</xs:complexType>

<xs:complexType name="CdXySiteType">

<xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="CdHorizontalId"

type="xs:string"/>

</xs:sequence>

<xs:element name="CdHorizontalLocation"

type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element name="CdVerticalId"

type="xs:string"/>

SEMI P10-0705 © SEMI 1990, 2005 55

</xs:sequence>

<xs:element name="CdVerticalLocation" type="XYType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartCdXySite"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndCdXySite"/>

</xs:complexType>

<xs:complexType name="CdIsoDenseDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdIsoGroup" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdDenseGroup" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdIsoDenseTolerance"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdIsoDenseReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartCdIsoDenseDefinition"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndCdIsoDenseDefinition"/>

</xs:complexType>

<xs:complexType name="OpcDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="OpcType" type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="OpcMinimumFeatureSize"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="OpcMinimumGap"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="OpcPatternSeparate"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="OpcPatternModifiable"

type="xs:boolean"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

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<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartOpcDefinition"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndOpcDefinition"/>

</xs:complexType>

<xs:complexType name="DefectDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectQualityId" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="VisualInspectionOk"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="VisualInspectionReqd"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="VisualInspCriteria"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="AutoInspectionReqd"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DieToDieInspection"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSize" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeCl" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeDk" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeClAdj" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeClAdjRep"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeDkAdj" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeDkAdjRep"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DefectSizeClIso" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">