semi合集-English.pdf - 第2304页

SEMI E81-0600 © 1999, 2 000 41 comments. Com pone nt suppliers n eed to explain how their objects conf or m to th e CIM Framework behavi oral semantic s. 8.5 A s these factors indicate, asses s i n g the CIM Framew ork c…

Table 3 Interface Specification Example

/* Comments are set between slashes and asterisks */

Interface: FrameworkObject2

Inherited Interface: FrameworkObject1

Description: The example defines the interface for FrameworkObject2, which inherits from FrameworkObject1.

Exceptions:

/* The following portrays the syntax used to describe exceptions for this interface. ObjectType and instanceName specify an

object instance (supplementary information) returned with the exception. */

exception ExceptionName { ObjectType instanceName };

Published Events: NamedEvent

Provided Services:

/* The following defines the read/write methods for AttributeName1. */

ObjectType getAttributeName1 ();

void setAttributeName1 (in ObjectType parameterName);

/* The following defines a method for readonly AttributeName2 */

ObjectType getAttributeName2 ();

/* The following says operationName1 is a local operation returning an object of the class ObjectTypeReturned. */

ObjectTypeReturned operationName1 ();

/* The following says operationName2 is a local operation returning an object of the class ObjectTypeReturned with an

argument instanceName of the object type ObjectType. In addition, there is an operation-specific exception, E, that may be

raised by this operation. */

ObjectTypeReturned operationName2 (in ObjectType instanceName)

raises (E);

The type definitions follow the following format:

/* Type Declarations: */

/* The following specifies (types) the ObjectType for the named datatype. */

typedef ObjectType datatype ;

/* The following specifies a sequence (collection) of ObjectType for ObjectTypeSequence. */

typedef sequence<ObjectType> ObjectTypeSequence ;

• CIM Framework component packaging:

Component suppliers must explain how their

component is packaged relative to the

corresponding CIM Framework component(s).

Note, however, that suppliers may choose to

provide multiple CIM Framework components as

an integrated package. In this case the complete

package can be assessed relative to the

combination of services provided by the combined

set of CIM Framework components. Obviously, a

consumer must also assess the benefits of the

integrated component relative to the reduction in

the ability to substitute components within the

integrated package.

• CIM Framework objects and interfaces:

Component suppliers must describe how their

objects and methods support the CIM Framework

component interfaces. This includes describing the

object methods available in comparison to the

interfaces specified in the CIM Framework. Note

that this interface specification question

encompasses specific operations, the operations’

arguments, the exceptions returned, and the events

published.

• Object behavior: Component suppliers must

document object behavior so component

consumers can understand the purpose and

consequences of specific methods. The CIM

Framework specifies behavioral semantics for

components using a variety of representations such

as state models, information models showing

relationships, interaction models, and text-based

comments. Component suppliers need to explain

how their objects conform to the CIM Framework

behavioral semantics.

8.5 As these factors indicate, assessing the CIM

Framework conformance of supplied components takes

more than just verifying the existence of specific

objects and methods. The key issue is whether a

component supplier provides both the software and its

associated conformance information needed to enable

the use and integration of the component.

9 Related Documents

9.1 The following documents describe programs,

standards, and guidelines used in the development of

the CIM Framework specification.

9.1.1 SEMATECH Documents

Advanced Process Control Framework Initiative

(APCFI) 1.0,6/27/97 (SEMATECH - Technology

Transfer #97063300A-ENG):CIM Framework

Enhanced Machine Component Communications

Driver (MCCD) Final Report (SEMATECH -

Technology Transfer #97073323A-TR).

C++ Reference Implementation for the Computer

Integrated Manufacturing (CIM) Application

Framework: Release 2, 1/4/96 (SEMATECH -

Technology Transfer #95082944B-ENG).

Computer Integrated Manufacturing (CIM) Application

Framework Validation Project: Lessons Learned

During the Automation Software Systems Project

(SEMATECH - Technology Transfer #94102568A-

ENG).

Computer Integrated Manufacturing (CIM)

Development Manual 1.1 - Volumes 1 and 2

(SEMATECH - Technology Transfer #91120794B-

ENG).

Computer Integrated Manufacturing (CIM) Framework

Member Validation Project (FMVP): Phase II Final

Report (SEMATECH - Technology Transfer

#96013061A-TR).

Evolution of WorkStream for Preventive, Predictive

Maintenance (PM) at SEMATECH (SEMATECH -

Technology Transfer #95092966A-TR).

Real-Time Dispatcher (RTD) Computer Integrated

Manufacturing (CIM) Framework Conformance and

Integration Studies (SEMATECH - Technology

Transfer #96023088A-ENG).

Results of the AutoSimulations and TI/WORKS

Integration Feasibility Study (SEMATECH -

Technology Transfer #95092981A-ENG).

SEMATECH Workbench for Integrated Modeling

(SWIM) Enhanced Prototype Functional Specification

5.0, 12/2/93 (SEMATECH - Technology Transfer

#93112072A-ENG).

Semiconductor Generic Manufacturing Model.

(SEMATECH - Technology Transfer #91090704A-

ENG).

Semiconductor Generic Manufacturing Requirements

Specification (SEMATECH - Technology Transfer

#91090703A-ENG).

Strategic Cell Controller (SCC) Program Repository

Contents Guide 1.1 SEMATECH Factory Integration

Technologies (FIT) Project (SEMATECH - Technology

Transfer #93091827B-XFR).

Strategic Computer Integrated Manufacturing (CIM)

Computing Environment Specifications. (SEMATECH

- Technology Transfer #92010916A-ENG)

Technical Summary of CIM Framework-Based

Integration of ASI Real-Time Dispatcher and IBM

Legacy Systems (SEMATECH - Technology Transfer

#96093180A-TR).

NOTICE: SEMI makes no warranties or representa-

tions as to the suitability of the specification set forth

herein for any particular application. The determination

of the suitability of the specification is solely the

responsibility of the user. Users are cautioned to refer

to manufacturer’s instructions, product labels, product

data sheets, and other relevant literature respecting any

materials mentioned herein. These specifications are

subject to change without notice.

The user’s attention is called to the possibility that

compliance with this specification may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this specification,

SEMI takes no position respecting the validity of any

patent rights or copyrights asserted in connection with

any item mentioned in this specification. Users of this

specification are expressly advised that determination

of any such patent rights or copyrights, and the risk of

infringement of such rights, are entirely their own

responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E82-0705

SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM)

This specification was technically approved by the global Information & Control Committee. This edition

was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was

available at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published September 1999;

previously published November 2004.

1 Purpose

1.1 This standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport

equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in

addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this standard

is to facilitate the integration of IBSEM equipment into an automated (e.g., semiconductor fabrication and flat panel

display) factory. This document accomplishes this by defining an operational model for IBSEM equipment as

viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment

operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional

activity that are within the scope of this standard: traffic management characteristics (queuing), parallel interface for

carrier transfer (SEMI E23), transport system controller architecture, and delivery of the transfer unit.

2 Scope

2.1 The scope of this standard is limited to the usage and description of interbay and intrabay AMHS transport

equipment (OHT, OHS, RGT, AGT, DWC) as perceived by a SEMI Equipment Communications Standard 2

(SECS-II) host that complies with the GEM model (as specified in §13). It defines the view of the equipment

through the SECS communication link. It does not define the internal operation of the equipment. It includes a

specific transfer command state model and transport system controller state model as the basis for all equipment of

this class.

2.2 This document assumes that the GEM fundamental requirements and selected additional capabilities (as

specified in §13) have been implemented on the IBSEM equipment. It expands the GEM standard requirements and

capabilities in the areas of state models (TSC, transfer command, vehicle and carrier state models), collection

events, alarm documentation, remote commands, data item variables, and material movement.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 Evaluation of SEMI E32 (MMM)

3.1.1 The concepts defined in SEMI E32 were analyzed and included where applicable to the IBSEM, but the GEM

model was used as the basis for IBSEM requirements definition.

3.2 Interbay and Intrabay AMHS Transport Equipment Types

3.2.1 This standard is targeted at the different types of 300 mm and interbay and intrabay AMHS transport

equipment. The term IBSEM equipment refers to all types of transport equipment. The equipment types have

fundamental mechanical differences:

3.2.1.1 Overhead Hoist Transport (OHT) — An overhead rail guided transport system positioned for vertical access

to SEMI E15.1 compliant ports.

3.2.1.2 Over Head Shuttle (OHS) — An overhead rail guided transport system (monorail) positioned for access to

stocker automated interbay input and output ports. The OHS vehicle may or may not contain a transfer agent.

3.2.1.3 Rail Guided Transport (RGT) — A ground-based rail guided transport system positioned for access to SEMI

E15.1 compliant ports.