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SEMI E84-0305 © SEMI 1999, 2005 41 No. Error Desc ription Stoc ker Reaction 7 The READY signal does not go OFF w ithin the specified amount of time after the C OMPT signal is output. 8 Anytime during the unload operati o…

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SEMI E84-0305 © SEMI 1999, 2005 40
A1-3.2.2 Recovery Sequences
A1-3.2.2.1 Should an error occur during transfer operations (refer to Tables 1 and 2), the recovery should begin by
returning the carrier to the stocker or OHS. Then, the error should be recovered. The four recovery scenarios are:
1. Load operation, carrier is returned to the stocker.
2. Load operation, carrier is returned to the OHS.
3. Unload operation, carrier is returned to the stocker.
4. Unload operation, carrier is returned to the OHS.
A1-3.2.3 Recovery Method
A1-3.2.3.1 OHS Side
In the case of sequence 2 (above), the load/unload sequence should be started over from the beginning.
In the case of sequence 3 (above), the corresponding transfer operation should be canceled.
In the case of sequences 1 and 4 (above) the corresponding transfer operation should be considered completed.
A1-3.2.3.2 Stocker Side
In the case of sequences 1 and 4 (above) the corresponding transfer operation should be considered completed.
In the case of sequences 2 and 3 (above), the load/unload sequence should be started over from the beginning.
Table A1-3 Load Operation Errors
No. Error Description Stocker Reaction
1
The L_REQ does not go OFF in the allotted amount of time during
an unload transaction.
2
Anytime during the transfer a load operation failure or stop
positioning failure is detected.
3
Anytime during the load operation the load presence status on the
loader doesn't match the actual conditions of the current operation.
4
The READY signal does not go ON within the specified amount of
time after the TR_REQ signal is output.
5 The READY signal goes OFF during the load operation.
6 The L_REQ signal remains ON after the load operation is completed.
7
The READY signal does not go OFF within the specified amount of
time after the COMPT signal is output.
8
Anytime during the load operation the optical transmission beam is
interrupted.
The load operation sequence is stopped and an
error is displayed.
Table A1-4 Unload Operation Errors
No. Error Description Stocker Reaction
1
The stocker (for an unload operation) outputs the VALID signal, but
the U_REQ signal remains OFF for a specified amount of time.
2
Anytime during the transfer an unload operation failure or stop
positioning failure is detected.
3
Anytime during the unload operation the load presence status on the
loader doesn't match the actual conditions of the current operation.
4
The READY signal does not go ON within the specified amount of
time after the TR_REQ signal is output.
5 The READY signal goes OFF during the unload operation.
6
The U_REQ signal remains ON after the unload operation is
completed.
The unload operation sequence is stopped and
an error is displayed.
SEMI E84-0305 © SEMI 1999, 2005 41
No. Error Description Stocker Reaction
7
The READY signal does not go OFF within the specified amount of
time after the COMPT signal is output.
8
Anytime during the unload operation the optical transmission beam
is interrupted.
A1-3.3 Stocker (Active Type) Error Examples
A1-3.3.1 Example of the Signal Status When an Error is Generated During Transfer Operations
A1-3.3.1.1 Stocker Side Error Generation
A1-3.3.1.1.1 Stocker Side Signals — When an error is generated, the BUSY signal must stay ON. This is to
prevent secondary accidents due to the other device operating on its own.
A1-3.3.1.1.2 OHS Side Signals — When an error is generated, each signal (except for the READY signal) should
remain in the status it was in at the time of the error. The READY signal should go OFF.
A1-3.3.1.2
OHS Side Error Generation
A1-3.3.1.2.1 OHS Side Signals — When an error is generated, each signal should remain in the status it was in at
the time of the error.
The READY signal should be OFF.
The ES signal should be OFF.
HO_AVBL should be OFF.
A1-3.3.1.2.2 Stocker Side Signals — When an error is generated, only the BUSY signal should go ON. All
remaining signals should go OFF.
A1-3.3.2 Recovery Sequences
A1-3.3.2.1 Should an error occur during transfer operations (refer to Tables 3 and 4), the recovery should begin by
returning the carrier to the stocker or OHS. Then, the error should be recovered. The four recovery scenarios are:
1. Load operation, carrier is returned to the OHS.
2. Load operation, carrier is returned to the stocker.
3. Unload operation, carrier is returned to the OHS.
4. Unload operation, carrier is returned to the stocker.
A1-3.3.3 Recovery Method
A1-3.3.3.1 Stocker Side
In the case of sequences 2 and 3 (above), the load/unload sequence should be started over from the beginning.
In the case of sequences 1 and 4 (above) the corresponding transfer operation should be considered completed.
A1-3.3.3.2 OHS Side
In the case of sequences 1 and 4 (above) the corresponding transfer operation should be considered completed.
In the case of sequences 2 and 3 (above), the load/unload sequence should be started over from the beginning.
A1-3.4 If the stocker is the active side of the interbay AMHS (i.e., OHS and stockers) it is conceivable that the
loader will interfere with the OHS passing by the stocker in failure scenarios. As a result of this possibility, it is
necessary for interbay AMHS equipment makers to establish an OHS “PASS OK” signal separate from the SEMI
E84 interlock. However, this note has no direct bearing on the contents of SEMI E84. Therefore, readers of SEMI
E84 should only treat this as a reference item.
Pass Interlock
SEMI E84-0305 © SEMI 1999, 2005 42
Interlock Signal
Signal Name P/A Description
PASS OK A->P
When this signal is HIGH
(ON), the vehicle may pass.
When this signal is LOW
(OFF), the vehicle may not
pass.
A1-4 Errors and Automated Recovery
A1-4.1 This section describes recommendations for implementation of errors and the associated recovery
procedures for Interbay OHS (Active Vehicle) and Intrabay OHT, definition of practical implementation of the
HO_AVBL and ES signals, and examples of various L_REQ and U_REQ sequences.
NOTE 6: This application note assumes an SEMI E84 implementation where one parallel I/O device per loadport is used.
A1-4.2 During the first few sequences of the SEMI E84 protocol before the carrier transfer begins if an error occurs
the active vehicle should send an error to the host but automatically recover without human intervention. The active
vehicle should automatically recover any SEMI E84 error up to the BUSY ON state.
A1-4.3
Definition of Automated Recovery — If an error occurs the active vehicle should send an Unsuccessful
Transfer Complete command to the HOST, then the HOST will send the active vehicle an alternate location. SEMI
E82 Intrabay SEM defines this recovery procedure in detail. Table A1-5 shows some specific scenarios where the
active vehicle should automatically recover.
Table A1-5 Example Automatic Recover Scenarios
No. Error Description Active Equipment Reaction
1
TA1 Timeout: The active equipment sends the CS_0, CS_1 signal but
does not receive the U_REQ or L_REQ signal.
2
TA2 Timeout: The Active equipment sends the TR_REQ signal but
does not receive the READY signal.
3
During the sequence HO_AVBL signal goes low before BUSY turns
on.
Unsuccessful Transfer Complete is sent to the
Host and automatically recovered on the Active
side (no human intervention).
A1-4.4 HO_AVBL Signal
A1-4.4.1 The HO_AVBL signal specifies if the Passive Equipment is available to accept a Load / Unload from the
Active Equipment. The HO_AVBL should also be used to identify situations where harm to the carrier or product
may exist. The HO_AVBL signals are loadport specific and should not apply to all of the loadports on the
equipment. Table A1-6 shows some specific scenarios for the HO_AVBL Signal.
Table A1-6 Example HO_AVBL Scenarios
No. Description of Passive Equipment HO_AVBL Signal Response
1 Presence Sensor is ON but Placement sensor is OFF.
#1
OFF
2 Presence Sensor is OFF but Placement sensor is ON.
#1
OFF
3 Passive Equipment is in Manual Access Mode. OFF
4 FOUP is docked or moved forward to FIMS interface. OFF
5 Carrier present on the Input Port (internal buffer equipment or stocker). OFF
6
Light Curtain Errors on SEMI E15.1 Option 1 Loadports (Reference ¶7.6.1
of SEMI E15.1).
OFF
7
Light Curtain Errors on SEMI E15.1 non-automated Option 3 Loadports
(Reference ¶7.6.3 of SEMI E15.1).
ON
8
Carrier Handling Robot Errors not at the Active Carrier’s destination
loadport.
ON