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SEMI P41-0304 E © SEMI 2004 4 Item Element or Attribute Mandatory or Optional Data type Description defect_type Attribute Mandatory String Defect ty pe. InspectionOperator Element Optional String Inspection Operator name…

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SEMI P41-0304
E
© SEMI 2004 3
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
unit Attribute Mandatory String Unit system.
InspectionArea Element Mandatory - Top element of inspection area. Refer to Figure
8.
unit Attribute Mandatory String Unit system.
InspectionArea_X Element Mandatory Float Inspection area X.
InspectionArea_Y Element Mandatory Float Inspection area Y.
InspectionAreaChip_X Element Mandatory Float Inspection area X of one die in die to die
inspection.
InspectionAreaChip_Y Element Mandatory Float Inspection area Y of one die in die to die
inspection.
ChipSize_X Element Mandatory Float Die size X in die to die inspection.
ChipSize_Y Element Mandatory Float Die size Y in die to die inspection.
InspectionChipNumber Element Mandatory - Element of die number.
InspectionChipNumber_X Element Mandatory Integer Inspected number of die in X at die to die
inspection.
InspectionChipNumber_Y Element Mandatory Integer Inspected number of die in Y at die to die
inspection.
Reference Repeatable
Element
Mandatory - Top element of reference point.
origin Attribute Mandatory String Origin point name of this reference position.
ReferencePointName Element Mandatory String Reference point name.
ReferencePosition Element Mandatory - Element of reference position.
unit Attribute Mandatory String Unit system.
ReferencePosition_X Element Mandatory Float X coordinate value of reference point.
ReferencePosition_Y Element Mandatory Float Y coordinate value of reference point.
ImageData Repeatable
Element
Mandatory - Image data of reference position. Subsequent
structures are in Table 7.
InspectionStartPosition Element Mandatory - Top element of inspection starting position.
origin Attribute Mandatory String Origin point name of this reference position.
unit Attribute Mandatory String Unit system.
InspectionStartPosition_X Element Mandatory Float X coordinate value of inspection start position.
InspectionStartPosition_Y Element Mandatory Float Y coordinate value of inspection start position.
Table 3 Description of Result Summary Section
Item
Element or
Attribute
Mandatory or
Optional
Data type Description
InspectionResult Element Mandatory - Top element of inspection results.
Summary Element Mandatory - Top element of summary information.
InspectionSummary Element Mandatory - Top element of defect inspection summary.
beginning_date Attribute Optional String Beginning time of defect inspection.
ending_date Attribute Optional String Ending time of defect inspection.
InspectionRecipe Element Mandatory - Element of inspection recipe.
recipe_name Attribute Optional String Inspection recipe name.
InspectionModeInformation Element Mandatory String Inspection mode.
InspectionDetectionSummary Element Mandatory - Top element of detected defect summary.
TotalDefect Element Mandatory Integer Number of detected defects in total.
ClassifyDefect Repeatable
Element
Mandatory Integer Number of defect types.
SEMI P41-0304
E
© SEMI 2004 4
Item
Element or
Attribute
Mandatory or
Optional
Data type Description
defect_type Attribute Mandatory String Defect type.
InspectionOperator Element Optional String Inspection Operator name.
ReticleJudgment Element Optional String Reticle disposition.
RepairSummary Repeatable
Element
Mandatory - Top element of repaired defect summary.
beginning_date Attribute Optional String Beginning time of defect repair.
ending_date Attribute Optional String Ending time of defect repair.
RepairTool Element Mandatory - Top element of repair tool information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number in mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
RepairMethod Element Mandatory String Method of defect repairing.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
NumberRepairProcessing Element Mandatory - Element of number of repair processed.
TotalRepairProcess Element Mandatory Integer Number of repaired defects in total.
CalssifyRepairProcess Repeatable
Element
Mandatory Integer Number of defect types.
defect_type Attribute Mandatory String Defect type.
RepairOperator Element Optional String Repair operator name.
RepairJudgment Element Optional String Judegement of repair process.
EvaluationSummary Repeatable
Element
Mandatory - Top element of evaluated defect summary.
beginning_date Attribute Optional String Beginning time of evaluation.
ending_date Attribute Optional String Ending time of evaluation.
EvaluationTool Element Mandatory - Top element of evaluation tool information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number in mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
EvaluationMethod Element Mandatory String Method of defect evaluation.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
NumberEvaluationProcessing Element Mandatory - Element of number of evaluation process.
TotalEvaluationProcess Element Mandatory Integer Number of evaluated defects in total.
CalssifyEvaluationProcess Repeatable
Element
Mandatory Integer Number of defect types.
defect_type Attribute Mandatory String Defect type.
EvaluationOperator Element Optional String Evaluation operator name.
EvaluationJudgment Element Optional String Judgment of evaluation process.
SEMI P41-0304
E
© SEMI 2004 5
Table 4 Description of Each Defect Section
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
Defect Repeatable
Element
Mandatory - Top element of each defect information.
defect_type Attribute Mandatory String Defect type.
date_stamp Attribute Optional String Date classified.
DefectInformation Element Mandatory - Top element of defect information.
origin Attribute Mandatory String Origin point name of this reference position.
DefectPosition Element Mandatory - Element of defect position.
unit Attribute Mandatory String Unit system.
DefectPosition_X Element Mandatory Float X coordinate value of defect position.
DefectPosition_Y Element Mandatory Float Y coordinate value of defect position.
DefectSize Element Mandatory - Element of defect size.
unit Attribute Mandatory String Unit system.
DefectSize_X Element Mandatory Float X size value of defect.
DefectSize_Y Element Mandatory Float Y size value of defect.
DefectJudgment Element Mandatory String Judgment of defect.
ImageData Repetable
Element
Mandatory - Image data of defect. Subsequent structures are
in Table 7.
DefectRepair Repetable
Element
Mandatory - Top element of defect repair.
date_stamp Attribute Optional String Repair processing date.
RepairRecipe Element Mandatory - Element of repair recipe.
recipe_name Attribute Optional String Repair recipe name.
RepairCondition Element Mandatory String Repair conditions.
RepairResult Element Mandatory String Repair results.
ImageData Repetable
Element
Mandatory - Image data of repaired defect. Subsequent
structures are in Table 7.
DefectEvaluate Repetable
Element
Mandatory - Top element of defect evaluation.
date_stamp Attribute Optional String Evaluation processing date.
EvaluateRecipe Element Mandatory - Element of evaluation recipe.
recipe_name Attribute Optional String Evaluation recipe name.
EvaluateCondition Element Mandatory String Evaluation condition.
EvaluateResult Element Mandatory String Evaluation result.
ImageData Repetable
Element
Mandatory - Image data of evaluated defect. Subsequent
structures are in Table 7.
Table 5 Description of Tool Coordinate Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
CoordinateSystem Element Mandatory String Coordinate system of tool.
ToolOriginPointInformation Element Mandatory - Element of origin point information.
ToolOriginPoint Element Mandatory String Tool origin point information.
ToolOriginPosition Element Mandatory - Element of origin position.
unit Attribute Mandatory String Unit system.
ToolOriginPosition_X Element Mandatory Float X coordinate value of tool origin position.