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SEMI F73-1102 © SEMI 2002 9 APPENDIX 2 EXAMPLE OF DEFECTS NOTE: The material in this app endix is an official part of SEMI F73 and was approved by full letter ballot procedures. 1 5 6 7 10 11 12 13 9 8 2 B D C E F H G J …

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SEMI F73-1102 © SEMI 2002 8
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Figure A1-3
Sample A22-6/5/97 – Micro 3 - Pits D10 and E10, G13. Grain, Twin Boundaries, White Sample Preparation
Debris Not Counted.
SEMI F73-1102 © SEMI 2002 9
APPENDIX 2
EXAMPLE OF DEFECTS
NOTE: The material in this appendix is an official part of SEMI F73 and was approved by full letter ballot procedures.
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B DC E
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Figure A2-1
Diffuse Black Spots in Grids F4, H8, and Along Rows 11 Through 14 are Believed to be Surface
Contamination, Probably Hydrocarbon, and Should be Counted. This Type of Contamination Should be
Apparent in Surface Analysis (Auger or ESCA) if it is Not an Artifact of Sample Preparation. The “Mottled”
Appearance Should Not be Counted.
SEMI F73-1102 © SEMI 2002 10
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B DC E
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JI KL
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NOPQ SR TU
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Figure A2-2
Large Particle in Grids K, L, M, 7 and 8 is Assumed to be an Example of Debris from Sample Preparation
and Should Not be Counted. Lightly Etched Grain and Twin Boundaries in Grids G Through J, 6 Through
13 are Not Significant Defects and are Not Counted.