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SEMI E23-1104 © SEMI 1991, 2004 8 RELATED INFORMATION 1 EXAMPLE OF A CASSETTE TRAN SFER TRANSACTION USING THE PARALLEL I/O INTERFACE NOTICE: This example of a ca ssette transfer tr ansaction using the parallel I/O interf…

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SEMI E23-1104 © SEMI 1991, 2004 7
Table 6 Pin Assignment for Wire-Connected Parallel
I/O Interface 15 Pins Connector
Pin No. Signal Pin No. Signal
1 CS1 L_REQ 9 CS1 L_REQ*
2 CS1 U_REQ 10 CS1 U_REQ*
3 CS1 READY 11 CS1 READY*
4 12
5 CS1 TR_REQ 13 CS1 TR_REQ*
6 COMPT 14 COMPT*
7 BUSY 15 BUSY*
8
*Vcc side (power source) for the current-driven type circuit. Common
side for the voltage-driven type circuit.
6.2 Photo-Coupled Interface
6.2.1 Photo-Coupled Device and Bit Assignment — To
date, there is no applicable documentor standard for
photo-coupled devices. This defines the usage of a
photo-coupled device of 8 bit-input/8 bit-output two-
way communications type. The bit assignment is shown
in Figure 6.
Figure 6
Bit Assignment of Photo-Coupled Device for the
Photo-Coupled Parallel I/O Interface
7 Installation Space
7.1 Wire-Connected Interface — Not specified.
7.2 Photo-Coupled I/O Interface — The photo-coupled
I/O interface must be located within the hatched area
indicated in Figure 7.
Figure 7
Installation Space of Photo-Coupled I/O inter-
face
Figure 8
Maximum Size of Photo-Coupled I/O Interface
SEMI E23-1104 © SEMI 1991, 2004 8
RELATED INFORMATION 1
EXAMPLE OF A CASSETTE TRANSFER TRANSACTION USING THE
PARALLEL I/O INTERFACE
NOTICE: This example of a cassette transfer transaction using the parallel I/O interface is not an official part of this document
and is not intended to modify or supercede the official standard. Determination of the suitability of the material is solely the
responsibility of the user.
Figure R1-1
Example of a Cassette Transfer Transaction Using the Parallel I/O Interface
R1-1 NOTES
R1-1.1 LD = load, ULD = unload.
R1-1.2 The load/unload request (Smm, Fnn) may be eliminated if the material transfer request (Smm, Fnn) issued
after the materials have been prepared on the specified port for unloading or specified port has been readied for
loading.
R1-1.3 Multiple PIO handshakings may be required if material transfer request message (Smm, Fnn) has multiple
MID’s and PIN’s for multiple material transfers. MID: Material ID, PIN: Port number.
R1-1.4 The dotted line means optional message.
R1-1.5 In the future, the appropriate specific SECS-II message may be assigned for above Smm, Fnn message,
respectively.
SEMI E23-1104 © SEMI 1991, 2004 9
RELATED INFORMATION 2
APPLICATION EXAMPLES OF INTERFACING
NOTICE: This application example of interfacing is not an official part of this document and is not intended to modify or
supercede the official standard. Determination of the suitability of the material is solely the responsibility of the user.
R2-1
R2-1.1 Figure R2-1 shows some application examples for the wire-connected parallel I/O interface. One set of
connectors is provided for the CS’s that commonly input the BUSY and COMPT signals.
Figure R2-1
Application Example of the Wire-Connected Parallel I/O Interface