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SEMI G60-94 © SEMI 1994, 2002 1 SEMI G60-94 (Reapproved 0302) TEST ME THOD FOR THE MEASUREMENT OF ELECTROSTA TIC PROPERTIES OF SEM ICONDUCTOR LEA DFRAME INTERLEA FI NG MA TER IA LS The te st m ethod was tec hnically appr…

SEMI G59-94 © SEMI 1994, 2002 4

SCIC ng/cm

()

Sample

Concentration

−

Background

Concentration

÷ ×

Extraction

Volume(mL)

Total Interleaf(or Leadframe) Surface Area(cm

)

14 Report

The report, when used by a vender to certify a user’s

requirement, or by a user at incoming inspection, shall,

at least, contain the following information. Additional

information shall be agreed between user and supplier.

14.1 Vendor’s lot numbers for leadframes and interleaf

material, and date of shipment.

14.2 Sample conditioning conditions.

14.3 Test conditions.

15 Related Documents

15.1 SEMI Specifications

SEMI G52 — Standard Test Method for Measurement

of Ionic Contamination on Semiconductor Leadframes

(Proposed)

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden, without express writte

consent of SEMI.

SEMI G60-94 © SEMI 1994, 2002 1

SEMI G60-94 (Reapproved 0302)

TEST METHOD FOR THE MEASUREMENT OF ELECTROSTATIC

PROPERTIES OF SEMICONDUCTOR LEADFRAME INTERLEAFING

MATERIALS

The test method was technically approved by the Global Assembly and Packaging Committee and is the

direct responsibility of the Japanese Assembly and Packaging Committee. Current edition approved by the

Japanese Regional Standards Committee on November 26, 2001. Initially available at www.semi.org on

December 2001; to be published March 2002. Origianlly published in 1994.

1 Purpose

1.1 This test method describes a procedure to

determine the electrostatic properties of interleaf

materials in film or sheet form by measuring the

magnitude and polarity of an induced charge and the

time required for complete dissipation of the charge.

NOTE 1: The method is independent of volume or insulation

resistivities.

2 Scope

2.1 This test method is suitable for all interleaf

materials and may be used by vendors at outgoing

inspection, or customers at incoming inspection.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Referenced Standards

3.1 None

4 Terminology

4.1 electrostatic properties — For the purposes of this

document, electrostatic properties are defined as the

ability of a material, when grounded, to dissipate a

charge induced onto the surface of that material.

4.2 interleaf (for semiconductor leadframes) — A

paper or plastic film placed between layers of

semiconductor leadframe strips to prevent

transformation.

5 Summary of Method

The method involves charging the interleaf material to a

high voltage and observing the time required for the

charge to be dissipated using an electrometer.

6 Significance

6.1 This procedure evaluates the electrostatic build up

and dissipation properties of the interleaf materials

which may affect the reliability and efficiency of

devices.

7 Interferences

7.1 The interleaf material and the leadframes must only

be touched while wearing double-layer gloves with

polyethylene outer gloves in order to avoid

contamination which may change the electrostatic

properties.

7.2 The test is not valid if the interleafing material is

dusty.

8 Equipment

8.1 Aluminum panel measuring 127 mm × 76.2 mm ×

3.2 mm (5" × 3" × 1/8" ).

8.2 High voltage source, 0 to 15 KV, positive and

negative.

8.3 Electrometer with a full scale reading of 0.01, 0.1,

1.0, 10, and 100, or a recording oscilloscope with a

response of 1 microsecond per division, or equivalent.

8.4 Fabricated electrostatic test chamber with

electrostatic test unit, illustrated in Figure 1.

8.5 Single channel, pen type recorder with speeds of

12.7 mm, 25.4 mm, 50.8 mm, 101.6 mm, and 203.2 mm

(0.5" , 1.0" , 2.0" , 4.0" , and 8.0" ) per minute and per

second.

8.6 Four RG 114/U cables for connections between the

detector and the electrometer and between the

electrometer and the recorder. The nominal lengths of

the cables are:

8.6.1 127 mm (5" ) for the connections between the

detector and the output connector on the electrostatic

test chamber.

8.6.2 863.6 mm (34" ) between the electrostatic test

chamber and the electrometer exclusive of the

connectors.

8.6.3 800.1 mm (31.5" ) between the electrometer and

the recorder (2 required).

SEMI G60-94 © SEMI 1994, 2002 2

8.7 Three position control switch for connecting the

test specimen to the high voltage source or the ground

or neutral potential.

8.8 The equipment shall be assembled as illustrated in

Figure 2.

9 Sampling

9.1 Sample size shall be agreed between user and

supplier.

NOTE 2: The minimum sample size shall be three (3) per lot.

Each specimen shall measure 127 mm × 76.2 mm (5" × 3" ).

9.2 Each specimen shall be free of defects such as

holes, cracks, and tears.

NOTE 3: If the specimen is coated, the coating shall be

continuous.

10 Sample Conditioning

10.1 Prior to testing, specimens shall be placed in the

electrostatic test chamber for 24 hours at the following

conditions.

Temperature: 23 ± 3° C

Relative Humidity: 50 ± 5%

11 Set-Up Procedure

11.1 Turn on all the equipment and allow to warm up

as noted in the operations manuals.

11.2 Electrometer

11.2.1 Set “MULTIPLIER” switch to provide a half

scale reading when the test voltage is applied.

11.2.2 Set the “OPERATE” switch at “ZERO

CHECK”.

11.2.3 Set meter to read positive charge.

11.3 Set the high voltage for 5KV positive output.

11.4 Mount the 127 mm × 76.2 mm × 3.2 mm (5" × 3"

× 1/8" ) aluminum panel between the electrodes in the

electrostatic test unit so that the detector head is directly

over the center of the panel. Tighten the four wing nuts

to secure the panel.

11.5 Set the recorder chart speed to 25.4 mm/min.

(1" /min.).

11.6 Set “OPERATION” switch to “OPERATE”.

11.7 Turn the three-position control switch to “HIGH

VOLTAGE”.

11.8 Verify that the reading on the recorder is identical

to the meter reading. Adjust the recorder as necessary.

11.9 Turn the three-position switch to “GROUND” to

remove the charge from the test panel.

11.10 When the electrometer meter reaches “ZERO”,

stop the recorder and set the “OPERATE” switch to

“ZERO CHECK”.

11.11 Repeat the calibration for a high voltage 5KV

negative output.

12 Measurements and Calculations

12.1 Mount the specimens vertically between the

electrodes and tighten the wing nuts to insure intimate

contact between specimen and the electrodes.

12.2 Set chart recorder to 12.7 mm/sec. (0.5" /sec.) and

turn on recorder.

12.3 Set electrometer meter switch to indicate

“POSITIVE” or “NEGATIVE” charge depending on

the high voltage to be applied.

12.4 Adjust the high voltage to 5KV positive or

negative as desired.

12.5 Set “OPERATION” switch to “OPERATE”.

12.6 Turn the three-position control switch to “HIGH

VOLTAGE”.

12.7 When the meter reaches a peak, indicating that the

specimen has received its maximum charge, turn the

three-position switch to “GROUND”.

12.8 When the meter needle reaches “ZERO” or after

10 seconds which ever comes first, stop the recorder

and move the “OPERATION” switch to “GROUND

CHECK”.

12.9 Charge each specimen three (3) times with both

positive and negative charges. Allow the specimens to

remain grounded for 10 minutes after each charging

cycle to remove any residual charge on the specimen.

NOTE 4: If the interleaf material is non-homogenous, both

surface shall be charged by reversing the faces of the

specimen in contact with the electrodes.

12.10 Calculate the decay time, in seconds, by

measuring the horizontal distance on the chart from the

point where the specimen was grounded until the point

where the needle reached “ZERO”.

13 Report

The report, when used by a vendor to certify a

customer’s requirements, or by a customer at incoming

inspection shall, at least, contain the following

information. Additional information shall be agreed

between user and supplier.

13.1 Interleaf material.