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SEMI 30.1-0200 © SEMI 1998, 2000 18 Variab le Name Type Descripti on Level Class Forma t Comment current material immedia tely prior to the inspection/re view . the ISEM Tables. (S ee Section 11 .) Proces sEquipme ntLo c…

SEMI 30.1-0200 © SEMI 1998, 200017

Variable Name Type Description Level Class Format Comment

for the current

inspection/review.

InspectionRunID CV Run identification in the

current inspection/review.

ALL DVVAL A[1..16]

LotID CV Lot identification of the

current material

inspected/reviewed.

ALL DVVAL A[1..16]

M20Data CV The silicon substrate size,

fiducial type, and

orientation to use.

ALL DVVAL L,3

1. <SubstrateSize

2. <Fiducial>

3. <Orientation>

M21Data CV The data necessary to

establish an ISEM SEMI

M21 layout on a substrate.

ALL DVVAL L,2

1. L,3

1. <M21XSize>

2. <M21YSize>

3. <Tile>

2. L,n

1. L,3

1. <ElementID>

2. <CoordX>

3. <CoordY>

M21XSize CV The value of the SEMI M21

coordinate system in the X-

direction.

ALL DVVAL F4

M21YSize CV The value of the SEMI M21

coordinate system in the Y-

direction.

ALL DVVAL F4

Offset CV The distance of the actual or

found location of a site

relative to its defined or

expected location.

ALL DVVAL L[2] Refers to SiteDeltaX,

SiteDeltaY which are o

Format F4.

OperatorAction CV The action taken by the

operator on the equipment’s

operator I/O.

ALL DVVAL A[1..80]

OperatorComment CV Operator-generated

comment, not associated

with any reporting level.

ALL DVVAL A[1..80] (See also Run-

Comment, Substrate-

Comment, Area-

Comment,

RegionComment, Site-

Comment, and

AnomalyComment.)

OperatorID CV Identification of the

operator of the

inspection/review

equipment.

ALL DVVAL A[1..16] This information may

be added by the host in

the ISEM Tables. (See

Section 11.)

Orientation CV How the wafer is loaded on

the equipment.

ALL EC F4 “0” degrees indicates

that the wafer has the

primary fiducial

towards the operator.

ProcessBuild-

GroupID

CV Name of the current or last

process program executed.

ALL SV A[1..80] See Section 14.

ProcessEquipmentID CV Identification of the process

equipment used with the

ALL DVVAL A[1..16] This information may

be added by the host in

SEMI 30.1-0200 © SEMI 1998, 2000 18

Variable Name Type Description Level Class Format Comment

current material

immediately prior to the

inspection/review.

the ISEM Tables. (See

Section 11.)

ProcessEquipmentLo

cation

CV Location (code) of the

process equipment used

with the current material

immediately prior to the

inspection/review.

ALL DVVAL A[1..16] This information may

be added by the host in

the ISEM Tables. (See

Section 11.)

ProcessEquipmentP

PID

CV Identification of the process

program used with the

process equipment used on

the current material

immediately prior to the

inspection/review.

ALL DVVAL A[1..80] This information may

be added by the host in

the ISEM Tables. (See

Section 11.)

ProcessLevel CV Identification of the

processing level of the

current material.

ALL DVVAL A[1..16] This information may

be added by the host in

the ISEM Tables. (See

Section 11.)

ProcessRunID CV Run identification for the

process prior to current

inspection/review.

ALL DVVAL A[1..16] This information may

be added by the host in

the ISEM Tables. (See

Section 11.)

ProductID CV The product identification

of the current material

inspected/reviewed.

ALL DVVAL A[1..16] This information may

be added by the host in

the ISEM Tables. (See

Section 11.)

RegionComment CV Operator-generated

comment associated with

the region.

X DVVAL A[1..80]

RunAnomaly-Count ISV Total number of all

anomalies found on all

substrates in the last run.

R DVVAL U2

RunComment CV Operator-generated

comment associated with

the run.

ALL DVVAL A[1..80]

RunInspected-

AreasCount

ISV The total number of

inspected/reviewed areas on

all substrates in the last run.

RS DVVAL U2

RunInspection-

PPCount

ISV The total number of process

programs used for the

current or last run.

RS DVVAL U2

RunSubstrate-Count CV The total number of

substrates completed in the

current inspection run,

which remains valid until

the next START command.

ALL DVVAL U2

ScaleFactor CV A correction factor applied

to the translation of one

coordinate system to

another.

ALL DVVAL F4 In most cases, a scaling

of 1 (one) is expected.

SiteID CV Inspection/Review group

identification for the current

site inspection/review.

ALL DVVAL U2

SlotID CV Carrier slot number from

which the current substrate

was taken.

ALL DVVAL U2

SEMI 30.1-0200 © SEMI 1998, 200019

Variable Name Type Description Level Class Format Comment

SlotList CV The list of carrier slots with

substrates to be processed.

ALL DVVAL L,n

1. <SlotID>

SubstrateAnomalyC

ount

ISV The total number of

anomalies for the current

substrate.

S DVVAL U2 For the most recent

inspection.

Substrate-Comment CV Operator-generated

comment associated with

the substrate.

ALL DVVAL A[1..80]

SubstrateID CV Substrate identification for

the current

inspection/review.

ALL DVVAL A[1..16]

Substrate-

InspectedAreas-

Count

ISV The total number of

inspected areas on the

current substrate.

S DVVAL U2

SubstrateRegion-

Count

CV Total area count for the

current or last substrate

inspected.

ALL DVVAL U2

SubstrateSize CV The nominal diameter (in

mm) of the current or last

substrate

inspected/reviewed.

ALL DVVAL U2

SubstrateTotal-

AreaInspected

ISV Total square area

inspected/reviewed

(micron

) of the current

substrate.

S DVVAL F4

Theta CV The rotational difference in

radians between a primary

and secondary coordinate

system.

ALL DVVAL F4

Tile CV The layout of the pattern in

the substrate.

ALL DVVAL A[1..16] “NTILE” non-tiled,

“CTILE” column-tiled,

and “RTILE” row-tiled.

XLateData CV Variable for the equipment

to report offset of the found

or actual pattern-based

coordinate system relative

to the substrate-based

coordinate system on the

substrate being tested.

ALL DVVAL L,4

1. <DeltaX>

2. <DeltaY>

3. <Theta>

4. <ScaleFactor>

10 Alarm List

Since each model of equipment differs in configuration,

it is not practical to provide an exhaustive list of all

possible alarms. Instead, the ISEM is requiring the two

tables provided as described in SEMI E30 (document

section). Alarm List Table, which is intended to provide

for equipment configuration-specific alarms and Alarm

ID, Alarm Set/Cleared Event Table.

10.1 Alarm List Table

10.1.1 The alarm list table contains examples of

alarms that pertain to various configuration aspects of

equipment. These examples are intended to illustrate

that alarms pertain to situations in which there exists a

potential for exceeding physical safety limits associated

with people, equipment, and material being processed

as per the SEMI E30 definition of an alarm. (See SEMI

E30 for further reference.)

10.2 Alarm ID, Alarm Set/Cleared Event Table

10.2.1 The Alarm ID, Alarm Set/Cleared Event Table

documents the association of each ALID to a set and

cleared event as required by SEMI E30. (See SEMI E30

for further reference.)