semi合集-English.pdf - 第1125页

SEMI E5-1104 © SEMI 1982, 2004 67 Stream,Function Name (Mnemonic) Direction S2,F5 Service Program Load Request (SPR) S,H<->E,reply Description A service program is requested. Structure <SPID> Exception None S…

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SEMI E5-1104 © SEMI 1982, 2004 66
Stream,Function Name (Mnemonic) Direction
S2,F1 Service Program Load Inquire (SPI) S,H<->E,reply
Description
Either the host or equipment wants to send the specified program.
Structure
L,2
1. <SPID>
2. <LENGTH>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F2 Service Program Load Grant (SPG) S,H<->E
Description
Provides permission to load
Structure
<GRANT>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F3 Service Program Send (SPS) M,H<->E, reply
Description
The data associated with the S2,F1 inquire is sent. If S2,F3 is multi-block, it must be preceded by the S2,F1/S2,F2 Inquire/Grant
transaction.
Structure
<SPD>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F4 Service Program Send Acknowledge (SPA) S,H<->E
Description
Acknowledge or error
Structure
<SPAACK>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 67
Stream,Function Name (Mnemonic) Direction
S2,F5 Service Program Load Request (SPR) S,H<->E,reply
Description
A service program is requested.
Structure
<SPID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F6 Service Program Load Data (SPD) M,H<->E
Description
A service program is sent.
Structure
<SPD>
Exception
A zero-length item means that the requested program cannot be returned.
Stream,Function Name (Mnemonic) Direction
S2,F7 Service Program Run Send (CSS) S,H->E,reply
Description
Start the requested program
Structure
<SPID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F8 Service Program Run Acknowledge (CSA) S,H<-E
Description
Acknowledge or error
Structure
<CSAACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F9 Service Program Results Request (SRR) S,H->E,reply
Description
Ask for results of service program
Structure
<SPID>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 68
Stream,Function Name (Mnemonic) Direction
S2,F10 Service Program Results Data (SRD) M,H<-E
Description
Get the results back
Structure
<SPR>
Exception
A zero-length item means SPR does not exist.
Stream,Function Name (Mnemonic) Direction
S2,F11 Service Program Directory Request (SDR) S,H<->E,reply
Description
There may be more than one service program.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F12 Service Program Directory Data (SDD) S,H<->E
Description
A list of service program names.
Structure
L,n
1. <SPID
1
>
.
.
n. <SPID
n
>
Exception
If n = 0, there are no service programs.