semi合集-English.pdf - 第4575页

SEMI D32-0303 © SEMI 2003 3 7.7.3.3 Consist of two sets of two-l ine strings a s shown in Figure 2. 7.7.4 The orde r of the alph anumeric cha r acters shall be as agreed upon between supplier and use r. NOTE 1: A typical…

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SEMI D32-0303 © SEMI 2003 2
5.2.2 character separation, vertical — the vertical
distance between the adjacent boundaries of any two
adjacent characters.
5.2.3 character spacing — the horizontal distance
between the character centerlines of two adjacent
characters.
5.3 Definitions of terms relating to the marking area
are as follows:
5.3.1 mark area — a rectangular area containing the
mark field(s) and the surrounding quiet zone.
5.3.2 mark field — an area within which all mark dots
occur.
5.3.3 quiet zone — an unpatterned, unmarked area that
surrounds a mark field.
5.3.4 TIR — total indicator reading, the difference
between the maximum and minimum distances of a line
from a reference line.
6 Ordering Information
6.1 Content information of mark, as agreed to between
purchaser and supplier
6.2 Number of message characters (up to a maximum
of 20, see Section 7.7.1), as agreed to between
purchaser and supplier.
7 Requirements
7.1 Orientation Corner — The OC location shall be
the lower left corner of the substrate with the pattern
surface up and the long edge at the bottom. Since the
necessary information is encoded in the identification
marks, it is not necessary to distinguish the shapes of
the other corners of the substrate. OC cut shape is not
specified at this time, but it is expected that in the future
a single shape will be established for the next
generation of substrates.
7.2 Shape, Size, and Location of Marking Symbols
7.2.1 The location of the mark field relative to the
orientation corner and the adjacent edges of the sub-
strate shall be as shown in Figure 1. The reference
point of the two-dimensional code symbol, together
with a parallelism requirement, locates the entire mark
field.
7.2.2 The mark field dimensions and the symbols
within the mark field shall be as shown in Figure 2.
7.2.3 Overall mark area dimensions shall be as shown
in Figure 3.
7.2.4 The values of the dimensions shall be as defined
in Tables 1 and 2.
7.3 Data Matrix Code Symbol Dimensions
7.3.1 Each rectangular Data Matrix code symbol shall
be composed of an array of 18 rows and 18 columns, as
shown schematically in Figure 4.
7.3.2 Cell spacing shall be 80 µ m, center to center.
7.3.3 The Data Matrix code symbol shall be
constructed such that it can be read in accordance with
ISO/IEC 16022.
7.4 Alphanumeric Symbol Dimensions
7.4.1 Use of the modified SEMI OCR Character Set as
defined in Table 3 is recommended.
7.4.2 Characters shall be marked in a dot matrix
format, contained within a character window 0.72 mm
high × 0.40 mm high.
7.4.3 Character window separation shall be 0.24 mm
horizontally and 0.16 mm vertically.
7.5 Reference Point for all symbols shall be the center
point of the cell common to the primary border row and
primary border column of the Data Matrix code
symbol.
7.6 Mark Field Dimensions shall be in accordance with
the dimensions D and F given in Table 2. Parallelism
(T) of the top of the mark field within dimension L,
relative to the nearest edge, shall be ≤ 1.0 mm TIR.
7.7 Message Characters
7.7.1 Up to 20 alphanumeric characters in the character
set listed in Table 3 shall be encoded in the two-
dimensional code symbol, and alphanumeric characters
with the same content shall be placed symmetrically
around the two-dimensional code symbol as shown in
Figure 2. The message content is not defined, but it
does not include any check sum characters. It may
include information provided by the glass substrate
supplier, and the remainder of the message characters,
if any, can be used to insert information agreed on
between supplier and purchaser. If the message
contains less than 20 characters, a dash (–) may be
inserted for the unused characters, at the supplier’s
discretion.
7.7.2 The Data Matrix code symbol shall be encoded
with error checking and correcting characters in
accordance with ECC 200 in accordance with ISO/IEC
16022.
7.7.3 Alphanumeric characters shall:
7.7.3.1 Be positioned such that their lower part faces
toward the nearest edge of the glass substrate.
7.7.3.2 Contain message characters identical to those
encoded in the Data Matrix code field.
SEMI D32-0303 © SEMI 2003 3
7.7.3.3 Consist of two sets of two-line strings as shown
in Figure 2.
7.7.4 The order of the alphanumeric characters shall be
as agreed upon between supplier and user.
NOTE 1: A typical sequence could be: The message begins
at the upper leftmost window, progresses horizontally to the
upper rightmost window, continues at the lower leftmost
window and ends at the lower rightmost window.
7.8 Quiet Zones
7.8.1 The space between the Data Matrix code symbol
and adjacent alphanumeric symbols shall be 0.48 mm.
7.8.2 A 0.50 mm wide quiet zone surrounds the entire
mark field.
Table 1 Mark Location Dimensions (see Figure 1)
Letter Symbol Name of Dimension Nominal Value, mm Tolerance, mm
A Edge to Mark Reference Point 15.0 ± 0.5
B Nearest Edge to Mark Reference Point 2.5 ± 0.5
E Edge to Quality Area 5.0
Reference
(See Note 1.)
– S – Reference Line parallel with substrate edge Reference (See Note 2.)
T
Top of Mark Field to Reference Line Parallelism across Mark Area
Width (L) (see Table 2 and Figure 3)
≤1.0 TIR
NOTE 1: This is a reference dimension.
NOTE 2: This line is a virtual reference line.
Table 2 Mark Field Dimensions (see Figures 2 and 3)
Letter Symbol Name of Dimension Nominal Value, mm
Tolerance, mm
(See Note 1.)
C
2
Data Matrix Field Width 1.44
D Mark Field Width 8.32
F Mark Field Height 1.60
G Bottom of Mark to Mark Reference Point 0.20
H Alphanumeric Character Window Height 0.72
I Alphanumeric Character Window Width 0.40
J Alphanumeric Character Window Horizontal Separation 0.24
K Alphanumeric Character Window Vertical Separation 0.16
L Mark Area Width 9.32
M Mark Area Height 2.60
Q
1
Data Matrix Quiet Zone, Horizontal 0.48
Q
2
Mark Area Quiet Zone, Width and Height 0.50
R
2
Data Matrix Field Height 1.44
NOTE 1: The laser marker can control these field dimensions to much tighter tolerances than it can control the field location. For that reason it
is not necessary to apply tolerances to these values and it is appropriate to define these dimensions with two decimal places.
Table 3 Modified SEMI OCR Character Set
A B C D E F G H I J K L M
N O P Q R S T U V W X Y Z
1 2 3 4 5 6 7 8 9 0 –
SEMI D32-0303 © SEMI 2003 4
A
24301
7
9
56 8
B
A
Data Matrix Field
Short Edge
Long (Nearest) Edge
Quality Area
E
E
Orientation
Corner
Mark Reference Point
BCDE
FGH I J
T-S-
-S-
A
24301
7
9
56 8
B
A
Data Matrix Field
Short Edge
Long (Nearest) Edge
Quality Area
E
E
Orientation
Corner
Mark Reference Point
A
24301
7
9
56 8
B
A
Data Matrix Field
Short Edge
Long (Nearest) Edge
Quality Area
E
E
Orientation
Corner
Mark Reference Point
BCDE
FGH I J
T-S-
-S-
Figure 1
Data Matrix Field Location
H
K
A/N Character Window
I
Mark Reference Point
Data Matrix Field
G
J
R
2
C
2
Q
1
F
D
Q
1
H
K
A/N Character Window
I
Mark Reference Point
Data Matrix Field
G
J
R
2
C
2
Q
1
F
D
Q
1
Figure 2
Mark Field Dimensions