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SEMI E120.1-0705 © SEMI 2004, 2005 1 SEMI E120.1-0705 XML SCHEMA FOR THE COMMON EQUIPMENT M ODEL (CEM) This standard was techni cally approved by the global Information & Control Committee. This edition was approved …

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SEMI E120-0705 © SEMI 2003, 2005 22
R1-1.2.36 superclass — in a generalization relationship, the generalization of another class; the subclass. See:
generalization. Contrast: subclass.
R1-1.2.37 supertype — in a generalization relationship, the generalization of another type; the subtype. See:
generalization. Contrast: subtype.
R1-1.2.38 type — a stereotyped class that specifies a domain of objects together with the operations applicable to
the objects, without defining the physical implementation of those objects. A type may not contain any methods,
maintain its own thread of control, or be nested. However, it may have attributes and associations. Although an
object may have at most one implementation class, it may conform to multiple different types. See also:
implementation class. Contrast: interface.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E120.1-0705 © SEMI 2004, 2005 1
SEMI E120.1-0705
XML SCHEMA FOR THE COMMON EQUIPMENT MODEL (CEM)
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published in 2004.
Table of Contents
1 Purpose .......................................................................................................................................................................................... 2
2 Scope ............................................................................................................................................................................................. 2
3 Referenced Standards and Documents........................................................................................................................................... 2
3.1 SEMI Standards...................................................................................................................................................................... 2
3.2 OMG Standards...................................................................................................................................................................... 2
3.3 W3C Standards....................................................................................................................................................................... 2
4 Terminology .................................................................................................................................................................................. 3
4.1 Abbreviations and Acronyms.................................................................................................................................................. 3
4.2 Definitions and Acronyms ...................................................................................................................................................... 3
5 Conventions................................................................................................................................................................................... 3
5.3 Translating UML to XML....................................................................................................................................................... 3
5.7 Translation Table Column Header Description ..................................................................................................................... 3
5.8 Documenting The XML With Diagrams ................................................................................................................................. 4
6 CEM Class Mapping to XML........................................................................................................................................................ 6
6.2 Abstract Classes ..................................................................................................................................................................... 7
6.2.2 Nameable => NameableType.............................................................................................................................................. 7
6.2.3 EquipmentElement => EquipmentElementType.................................................................................................................. 7
6.2.4 ExecutionElement => ExecutionElementType .................................................................................................................... 8
6.2.5 Extension => ExtensionType............................................................................................................................................... 9
6.3 Concrete Classes .................................................................................................................................................................... 9
6.3.5 Equipment => EquipmentType ......................................................................................................................................... 10
6.3.6 Module => ModuleType.................................................................................................................................................... 12
6.3.7 Subsystem => SubsystemType........................................................................................................................................... 13
6.3.8 IODevice => IODeviceType ............................................................................................................................................. 14
6.3.9 MaterialLocation => MaterialLocationType.................................................................................................................... 15
6.3.10 SoftwareModule => SoftwareModuleType ..................................................................................................................... 15
6.4 Added XML Constructs......................................................................................................................................................... 16
6.4.2 XML simpleTypes .............................................................................................................................................................. 16
6.4.3 Added XML complexTypes ................................................................................................................................................ 16
6.4.4 Equipment Element............................................................................................................................................................ 17
7 XML Schema............................................................................................................................................................................... 17
8 Related Documents...................................................................................................................................................................... 17
List of Figures
Figure 1 XML Example Diagram................................................................................................................................................... 5
Figure 2 XML for Sample............................................................................................................................................................... 6
Figure 3 – NameableType............................................................................................................................................................... 7
Figure 4 - EquipmentElementType................................................................................................................................................. 8
Figure 5 – ExecutionElementType ................................................................................................................................................. 8
Figure 6 - ExtensionType ............................................................................................................................................................... 9
Figure 7 - Example Of The XML Structure For Shared Components ............................................................................................ 10
Figure 8 - EquipmentType.............................................................................................................................................................. 11
Figure 9 - ModuleType................................................................................................................................................................... 13
Figure 10 - SubsystemType ............................................................................................................................................................ 14
Figure 11 - IODeviceType.............................................................................................................................................................. 15
Figure 12 - MaterialLocationType.................................................................................................................................................. 15
Figure 13 - SoftwareModuleType................................................................................................................................................... 16
Figure 14 - Equipment Element...................................................................................................................................................... 17
SEMI E120.1-0705 © SEMI 2004, 2005 2
List of Tables
Table 1 - Example Translation Table..............................................................................................................................................4
Table 2 - XML Diagram Symbols ..................................................................................................................................................4
Table 3 - Translation Table For Nameable .....................................................................................................................................7
Table 4 - Translation Table For EquipmentElement.......................................................................................................................7
Table 5 - Translation Table For ExecutionElement........................................................................................................................8
Table 6 - Translation Table For Extension......................................................................................................................................9
Table 7 - Translation Table For Equipment....................................................................................................................................10
Table 8 - Translation Table For Module Class ...............................................................................................................................12
Table 9 - Translation Table For Subsystem ....................................................................................................................................14
Table 10 - Translation Table For IODevice....................................................................................................................................14
Table 11 - Translation Table For MaterialLocation........................................................................................................................15
Table 12 - Translation Table For SoftwareModule.........................................................................................................................15
Table 13 - simpleTypes In The CEM Schema................................................................................................................................16
Table 14 - complexTypes In The CEM Schema.............................................................................................................................16
1 Purpose
1.1 The purpose of this specification is to provide an XML schema that corresponds to the UML model for
equipment defined by SEMI E120. This schema is available to equipment communication standards that want to
use CEM-defined equipment structural information in XML formatted equipment communication.
2 Scope
2.1 The scope of this document is the faithful representation of the CEM model in an XML schema. It will not add
new domain information or concepts to the model. The only additions made are those needed to render a useful
XML schema.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
3.2 OMG Standards
Unified Modeling Language (UML) Specification
1
, Version 1.4, OMG Specification 01-09-67
3.3 W3C Standards
Extensible Markup Language (XML) 1.0 (Second Edition)
2
— W3C, 6 October 2000
Namespaces in XML
3
— W3C, 14 January 1999
XML Schema Part 0: Primer
4
— W3C, 2 May 2001
XML Schema Part 1: Structures
5
— W3C, 2 May 2001
XML Schema Part 2: Datatypes
6
— W3C, 2 May 2001
1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, U.S.A., Ph: 1-781-444 0404, Fax: 1-781-444 0320,
http://www.omg.org/technology/documents/modeling_spec_catalog.htm
2 World Wide Web Consortium (W3C), http://www.w3.org/TR/2000/REC-xml-20001006/
3 World Wide Web Consortium (W3C), http://www.w3.org/TR/1999/REC-xml-names-19990114/
4 World Wide Web Consortium (W3C), http://www/w3/org/TR/xmlschema-0/
5 World Wide Web Consortium (W3C), http://www/w3/org/TR/xmlschema-1/
6 World Wide Web Consortium (W3C), http://www/w3/org/TR/xmlschema-2/