semi合集-English.pdf - 第1350页
SEMI E30-1103 © SEMI 1992, 2003 24 4.2.2.5 Scenario Host Requests Report: COMMENT HOST EQUIPMENT COMMENT Host requests data variables contained in report RPTID S6,F19--> <--S6,F20 Equipment responds with a list of …
SEMI E30-1103 © SEMI 1992, 2003
23
4.2.1.2.5 Scenario
Collection Event Reporting Set-up:
COMMENT HOST EQUIPMENT COMMENT
[IF] Define Report is Multi-block
[THEN] send Multi-block inquire S2,F39-->
<-- S2,F40 Multi-block grant.
[ENDIF]
Send report definitions S2,F33--> DATAIDs, RPTIDs, and VIDs
received.
<-- S2,F34 DRACK
17
= 0 the reports are OK
[IF] Link Event/Report is Multi-block
[THEN] send Multi-block inquire S2,F39-->
<-- S2,F40 Multi-block grant.
[ENDIF]
Link reports to events S2,F35--> CEIDs and the corresponding
RPTIDs are received.
<-- S2,F36 LRACK = 0 the event linkages
are acceptable.
Enable specific collection S2,F37--> Enable/ disable codes (CEEDs)
events and the respective event
reporting CEIDs received.
<-- S2,F38 ERACK = 0 OK, will generate the
specified reports when the
appropriate collection events
happen
4.2.2 Variable Data Collection
4.2.2.1 Purpose — This capability allows the host to query for the equipment data variables and is useful during
initialization and synchronization.
4.2.2.2 Definitions
Report ID (RPTID) — A unique identifier of a specific report. See SEMI E5 for a full definition of this data item.
Variable Data (V) — A variable data item containing status, discrete, or constant data. See SEMI E5 for a full
definition of this data item.
4.2.2.3 Detailed Description — The host may request a report containing data variables from the equipment by
specifying the RPTID. It is assumed that the report has been previously defined (e.g., using the Define Report
S2,F33 transaction (see Section 4.2.1)). The values of any status variables (SV’s) and equipment constants (ECV’s)
contained within the report must be current. Discrete data values (DVVAL’s) are only guaranteed to be valid upon
the occurrence of a specific collection event. If DVVAL cannot be specified in equipment due to some restrictions
depend on hardware and/or software conditions, the zero length item is reported.
4.2.2.4 Requirements
— Variable data items (V’s) and associated units of measure must be provided by the equipment manufacturer.
17 Define Report Acknowledge Code, see SEMI E5 for full definition of this Data Item.
SEMI E30-1103 © SEMI 1992, 2003
24
4.2.2.5 Scenario
Host Requests Report:
COMMENT HOST EQUIPMENT COMMENT
Host requests data variables
contained in report RPTID S6,F19-->
<--S6,F20 Equipment responds with a list of
variable data for the given
RPTID.
4.2.3 Trace Data Collection
4.2.3.1 Purpose — Trace data collection provides a
method of sampling data on a periodic basis. The time-
based approach to data collection is useful in tracking
trends or repeated applications within a time window,
or monitoring of continuous data.
4.2.3.2 Definitions
Data Sample Period (DSPER) — The time delay
between samples. See SEMI E5 for a full definition of
this data item.
Reporting Group Size (REPGSZ) — The number of
samples included per trace report transmitted to the
host. See SEMI E5 for a full definition of this data item.
Status Variable (SV) — Status data item (included in
trace report). See SEMI E5 for a full definition of this
data item.
Status Variable ID (SVID) — A unique identifier of a
status variable. See SEMI E5 for a full definition of this
data item.
Total Samples (TOTSMP) — Number of samples to be
taken during a complete trace period. See SEMI E5 for
a full definition of this data item.
Trace Request ID (TRID) — An identifier associated
with a trace request definition. See SEMI E5 for a full
definition of this data item.
4.2.3.3 Detailed Description — The equipment shall
establish a trace report as instructed by the host
(S2,F23). For a trace report (S6,F1), the host shall
designate a name for the trace report (TRID), a time
interval for data sampling (DSPER), the total number of
samples to be taken (TOTSMP), the number of samples
per trace report (REPGSZ), and a listing of which data
will be sent with the report (SVID’s). The number of
trace reports sent to the host is determined by total
samples divided by reporting group size
(TOTSMP/REPGSZ).
The equipment shall sample the specified data (SV’s) at
the interval designated by the host (DSPER) and shall
send a predefined trace report to the host for the
specified reporting group size (REPGSZ). The trace
report definition shall be automatically deleted from the
equipment after the last trace report has been sent.
The host may modify or re-initiate a trace function
currently in progress by specifying the same TRID in a
trace request definition, at which point the old trace
shall be terminated and the new trace shall be initiated,
or the host can instruct the equipment to terminate a
trace report prior to its completion by specifying
TOTSMP = 0 for that TRID, at which point the trace
report definition shall be deleted.
A detailed example is included as Application Note
A.4.
4.2.3.4 Requirements
— The equipment must have a local mechanism (e.g.,
internal clock) for triggering the periodic sampling
and transmission of trace reports to the host.
— A minimum of four (4) concurrent traces shall be
supported by the equipment. The same SVID may
be collected in multiple traces simultaneously.
— All SVID’s available at the equipment shall be
supported for trace data collection. The exception to
this is any SV that will not fit into a single block.
NOTE 5: SEMI E5 provides for SV’s to be of a list format.
Since this may in practice be a variable list, there is a
potential problem with such an SV supported by the Trace
Data Collection capability. This is a problem with the SEMI
E5 standard. Care should be exercised in the use of SV’s
using the list format.
SEMI E30-1103 © SEMI 1992, 2003
25
4.2.3.5 Scenario
Host Initiates Trace Report:
COMMENT HOST EQUIPMENT COMMENT
Trace Data initialization
requested S2,F23-->
<--S2,F24 Acknowledge, trace initiated
[DO] TOTSMP REPGSZ times
[DO] REPGSZ many times: collect
SVID
1
,...SVID
n
data, delay
time by DSPER.
[END_DO]
<--S6,F1 Send SV
1
,...SV
n
Acknowledge receipt S6,F2-->
[END_DO]
Optional:
Request trace termination prior to
completion (TOTSMP = 0) S2,F23-->
<--S2,F24 Acknowledge premature termination
4.2.4 Limits Monitoring — This capability relates to the
monitoring of selected equipment variables and has
three primary aspects:
— Defines a standard set of monitoring zones and
limits.
— Provides for reporting to the host when selected
equipment variables transition between monitoring
zones.
— Empowers the host to modify the values of the
variable limit attributes for these same selected
equipment variables.
4.2.4.1 Purpose — The limits monitoring capability
provides the host a means of monitoring equipment
conditions by a flexible, efficient, and asynchronous
method which is consistent across equipment. It
eliminates the need for constant polling of equipment
by the host for current status values. Further, this
capability allows the host to implement changes in the
monitoring range as needed. This capability has
application to both production operation and
diagnostic/testing scenarios, and it also has applicability
to statistical process control.
4.2.4.2 Definitions
LimitVariable — DVVAL containing the VID of a
specific equipment variable for which a zone transition
collection event has been generated.
EventLimit — DVVAL containing the LIMITID of the
limit crossed by LimitVariable.
TransitionType — DVVAL which defines the direction
of the zone transition which has occurred: 0 = transition
from lower to upper zone, 1 = transition from upper to
lower zone.
Limit — Used in this section to represent the set of
variable limit attributes that completely describe a
variable monitoring “barrier.” The attributes include
VID, Units, UPPERDB, LOWERDB, LIMITMAX, and
LIMITMIN. In some contexts it may be interpreted
more narrowly as the combination of UPPERDB and
LOWERDB.
LIMITID
n
— Refers to the identifier of a specific limit
(as defined by UPPERDB and LOWERDB) among the
set of limits for a monitored equipment variable.
LIMITIDs are consecutively numbered, beginning at
one through the number of limits possible (seven
minimum).
Monitoring Zone — A subset of the possible range of
values for a variable of interest to the host. A single
limit divides the range into two zones. Multiple limits
may be combined to divide the range even further.
Zone Transition — The movement of a variable value
from one monitoring zone to another. This transition is
a collection event and has a corresponding CEID.
Deadband — An overlap of two zones implemented to
prevent constant zone transitions by a variable sitting
on or near a limit (i.e., “chattering”).
UPPERDB — A variable limit attribute that defines the
upper boundary of the deadband of a limit.
18
The value
applies to a single limit (LIMITID) for a specified VID.
18 The format and units must be the same as the format of the
variable being monitored.