semi合集-English.pdf - 第5974页
SEMI P42-0304 © SEMI 2004 7 <xsd:com plexType name="Formul ationInform ationType"> <xsd:sequence> <xsd:element name="Date" type="xsd:date Time"/> <xsd:element name="…
SEMI P42-0304 © SEMI 2004 6
Item Data type Unit the entry example
Reticle ID ID ---- Uniqueness ID
Reticle name string ----
Bar code string ---- ex. Code39
Size unsignedInt ---- 230,5,6 Reticle size
UnitType string mm/um/inch mm,inch
Reticle Type string ---- Cr,ArCr,Att.PSM,
EAPSM,….
Reticle Mark ID string ----
Reticle Mark Type string ---- STD
Reticle
design
Reticle
information
(1 – ∞)
Projection Magnification unsignedInt ---- 1,2,4,5………
Alignment Mark ID ID ---- Uniqueness ID
Group string ----
Wafer mark type string ---- P1,P2,…,F1,F2…
X Double ---- X-Mark X position X-
Mark
Y Double ---- X-Mark Y position
X Double ---- Y-Mark X position
Wafer mark
position
Y-
Mark
Y Double ---- Y-Mark Y position
UnitType string mm/um/inch
Alignment Mark
information
(0 – ∞)
Comment string ----
Alignment
Mark design
Mark use rule FileName string ----
Alignment Mark ID ID Uniqueness ID
Group string
Wafer mark type TYPE=P1,P2,…,F1,F2…
X Double ---- X-Mark X position X-Mark
Y Double ---- X-Mark Y position
X Double ---- Y-Mark X position
Wafer mark
position
Y-Mark
Y Double ---- Y-Mark Y position
UnitType string mm/um/inch
Alignment
USE Mark
Alignment Mark
information
(0 – ∞)
Comment string ----
7 XML Description (Schema)
XML description defined from Table 1 is as follows.
<?xml version="1.0" encoding="UTF-8"?>
<xsd:schema targetNamespace="file://XML\SEMI_Samples\SemiSEMI"
xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:rfd="file://XML\SEMI_Samples\SemiSEMI">
<!-- ================ Reticle frame design data infomation Table ====================== -->
<xsd:element name="rdm" type="rfd:rdmType"/>
<xsd:complexType name="rdmType">
<xsd:sequence>
<xsd:element name="FormulationInformation"
type="rfd:FormulationInformationType"/>
<xsd:element name="UseExposureMachine" type="rfd:UseExposureMachineType"/>
<xsd:element name="ShotMap" type="rfd:ShotMapType"/>
<xsd:element name="ReticleDesign" type="rfd:ReticleDesignType"/>
<xsd:element name="AlignmentMarkDesign" type="rfd:AlignmentMarkDesignType"/>
<xsd:element name="AlignmentUSEMark" type="rfd:AlignmentUSEMarkType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================== FormulationInformation ============================ -->
SEMI P42-0304 © SEMI 2004 7
<xsd:complexType name="FormulationInformationType">
<xsd:sequence>
<xsd:element name="Date" type="xsd:dateTime"/>
<xsd:element name="Person" type="xsd:string"/>
</xsd:sequence>
</xsd:complexType>
<!-- ======================= UseExposureMachine ============================ -->
<xsd:complexType name="UseExposureMachineType">
<xsd:sequence>
<xsd:element name="MachineTypeInformation" type="xsd:string"
maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ============================= ShotMap ================================= -->
<xsd:complexType name="ShotMapType">
<xsd:sequence>
<xsd:element name="WaferInformation" type="rfd:WaferInformationType"/>
<xsd:element name="ShotMapInformation" type="rfd:ShotMapInformationType"/>
<xsd:element name="ShotAreaInformation" type="rfd:ShotAreaInformationType"
maxOccurs="unbounded"/>
<xsd:element name="ShotInformation" type="rfd:ShotInformationType"
maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="WaferInformationType">
<xsd:sequence>
<xsd:element name="WaferType" type="xsd:string"/>
<xsd:element name="WaferSize" type="rfd:WaferSizeType"/>
<xsd:element name="EdgeClearance" type="rfd:EdgeClearanceType"/>
<xsd:element name="WaferThickness" type="rfd:WaferThicknessType"/>
<xsd:element name="WaferRotation" type="xsd:unsignedInt"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="ShotMapInformationType">
<xsd:sequence>
<xsd:element name="StepPitch" type="rfd:XYCodeType"/>
<xsd:element name="ShotMapArray" type="rfd:CRUnitType"/>
<xsd:element name="ShotMapOffset" type="rfd:XYCodeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="ShotAreaInformationType">
<xsd:sequence>
<xsd:element name="ShotAreaID" type="xsd:ID"/>
<xsd:element name="ReticleID" type="xsd:string"/>
<xsd:element name="ShotAreaSize" type="rfd:XYCodeType"/>
<xsd:element name="ShotAreaShift" type="rfd:XYCodeType"/>
<xsd:element name="ShotAreaPositionShift" type="rfd:XYCodeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="ShotInformationType">
<xsd:sequence>
<xsd:element name="ShotID" type="xsd:ID"/>
<xsd:element name="ShotAreaID" type="xsd:string"/>
<xsd:element name="ShotLocation" type="rfd:CRUnitType"/>
<xsd:element name="ShotPosition" type="rfd:XYCodeType"/>
SEMI P42-0304 © SEMI 2004 8
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="WaferSizeType">
<xsd:sequence>
<xsd:element name="Size" type="xsd:unsignedInt"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="EdgeClearanceType">
<xsd:sequence>
<xsd:element name="Clearance" type="xsd:double"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="WaferThicknessType">
<xsd:sequence>
<xsd:element name="Thickness" type="xsd:unsignedInt"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="CRUnitType">
<xsd:sequence>
<xsd:element name="C" type="xsd:unsignedInt"/>
<xsd:element name="R" type="xsd:unsignedInt"/>
</xsd:sequence>
</xsd:complexType>
<!-- ========================= ReticleDesign =============================== -->
<xsd:complexType name="ReticleDesignType">
<xsd:sequence>
<xsd:element name="ReticleInformation" type="rfd:ReticleInformationType"
maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="ReticleInformationType">
<xsd:sequence>
<xsd:element name="ReticleID" type="xsd:ID"/>
<xsd:element name="ReticleName" type="xsd:string"/>
<xsd:element name="BarCode" type="xsd:string"/>
<xsd:element name="ReticleSize" type="rfd:ReticleSizeType"/>
<xsd:element name="ReticleType" type="xsd:string"/>
<xsd:element name="ReticleMarkID" type="xsd:string"/>
<xsd:element name="ReticleMarkType" type="xsd:string"/>
<xsd:element name="ProjectionMagnification" type="xsd:unsignedInt"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="ReticleSizeType">
<xsd:sequence>
<xsd:element name="Size" type="xsd:unsignedInt"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ======================= AlignmentMarkDesign ============================ -->
<xsd:complexType name="AlignmentMarkDesignType">