semi合集-English.pdf - 第4129页

SEMI F62-0701 © SEMI 2001 9 Figure 7 Gas Temperature Effect on Steady State Span 0% X X X X TGg (% Reading/ O C) Flow Setpoint (% F.S.) 25 50 75 100

100%1 / 7923
SEMI F62-0701 © SEMI 2001 8
Figure 5
Steady State Ambient Temperature Effects
Figure 6
Transient Ambient Temperature Effects
100
∆=
% Reading
-100
100
0
∆=
Temp
O
C
Time (Hr)
+100
0
-100
1
Tmin
Tmax
SEMI F62-0701 © SEMI 20019
Figure 7
Gas Temperature Effect on Steady State Span
0%
X
X
X
X
TGg (% Reading/
O
C)
Flow Setpoint (% F.S.)
25 50 75 100
SEMI F62-0701 © SEMI 2001 10
Figure 8
Transient Gas Temperature Effect
Flow Setpoint (% of
Reading)
Time (Hr)
.5 1
2.0
3.0
1.5 2.5
3.5 4.0
Tg (
O
C)
Time (Hr)
.5 1
2.0
3.0
1.5 2.5
3.5 4.0
-.1
-.05
.05
.1
0
40
35
30
25
20
25%
50%
75%
100%