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SEMI P1-1101 © SE MI 1981, 2001 9 Square C orner Ro und C orn er Figure 8a Dimensio ns of Notc hes for H TE, MTE, LTE, ULTE, DFS 5.0 ± 0.5 mm 2.0 ± 0.5 mm Back s ide > 1.0 mm Edge Figure 8b Dimension of Notches fo r M…

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SEMI P1-1101 © SEMI 1981, 2001 8
a: Green Soda Lime (HTE)
White Crown Soda Lime (HTE)
b: Borosilicate (MTE)
c: Aluminosilicate (LTE)
d: Quartz (ULTE)
e: Quartz (DFS) f: Quartz (MFS)
Figure 7
Glass Substrate Identification by Notches
SEMI P1-1101 © SEMI 1981, 20019
Square Corner Round Corner
Figure 8a
Dimensions of Notches for HTE, MTE, LTE, ULTE, DFS
5.0 ± 0.5 mm
2.0 ±
0.5 mm
Back side
> 1.0 mm
Edge
Figure 8b
Dimension of Notches for MFS
SEMI P1-1101 © SEMI 1981, 2001 10
APPENDIX 1
NOTE: The material in this appendix is an official part of SEMI P1 and was approved by full letter ballot
procedures on August 3, 2001.
A1-1 Hard Surface Photomask Glass Properties
GLASS PROPERTIES
Property
HIGH THERMAL EXPANSION (HTE)
Modulus of Elasticity
7.0–7.3 × 10
3
Kg/mm
2
Poisson's Ratio 0.22–0.23
Specific Gravity 2.50–2.56 g/cm
3
Index of Refraction 1.52
MEDIUM THERMAL EXPANSION (MTE)
Modulus of Elasticity
7.1–9.4 × 10
3
Kg/mm
2
Poisson's Ratio 0.18–0.26
Specific Gravity 2.36–2.87 g/cm
3
Index of Refraction 1.49–1.57
LOW THERMAL EXPANSION (LTE)
Modulus of Elasticity
7.5–8.7 × 10
3
Kg/mm
2
Poisson's Ratio 0.16–0.24
Specific Gravity 2.52–2.58 g/cm
3
Index of Refraction 1.53–1.56
ULTRA LOW THERMAL EXPANSION (ULTE)
Modulus of Elasticity
6.7–7.4 × 10
3
Kg/mm
2
Poisson's Ratio 0.16–0.19
Specific Gravity 2.18–2.20 g/cm
3
Index of Refraction 1.46
DURABLE FUSED SILICA (DFS)
Modulus of Elasticity
6.7–7.4 × 10
3
Kg/mm
2
Poisson's Ratio 0.16–0.19
Specific Gravity 2.18–2.20 g/cm
3
Index of Refraction 1.46
MODIFIED FUSED SILICA (MFS)
Modulus of Elasticity
6.7–7.4 × 10
3
Kg/mm
2
Poisson's Ratio 0.16–0.19
Specific Gravity See NOTE 1.
Index of Refraction See NOTE 1.
NOTE 1: Specific Gravity and Index of Refraction of MFS shall be agreed upon between user and supplier.
NOTE 2: Index of Refraction on this table is the value at 587 nm wavelength.
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