semi合集-English.pdf - 第4838页

SEMI M1-0305 © SEMI 1978, 2005 14 ITEM SPECIFICATION MEASUREMENT METHOD 2-7.1.3 Potassium [ ]Not greater th an [  10 ]a toms/cm 2 [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS); [ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF); [ ]Othe…

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SEMI M1-0305 © SEMI 1978, 2005 13
ITEM SPECIFICATION MEASUREMENT METHOD
2-6.3 Primary Flat/Notch Orientation
[ ] (crystal axis) [_____] ____
[ ]SEMI MF847 (Flat); [ ] Other: (specify)___________
2-6.4 Secondary Flat Length
[ ]None; [ ]Other: _________mm
[ ]SEMI MF671; [ ]Other: (specify)___________
2-6.5 Secondary Flat Location
(see Figure 4)
[ ]None; [ ]Other: (
) _______
2-6.6 Edge Profile [ ] (specify)__________ SEMI MF928: Method A [ ], Method B [ ]; DIN 50441/2:
Procedure 1 [ ], Procedure 2 [ ]; [ ]Other: (specify)_________
2-6.7 Thickness
[ ]Nominal [ ] ± Tolerance [ ] µm [ ]SEMI MF533; [ ]SEMI MF1530; [ ]JIS H 0611;
[ ]DIN 50441/1; [ ]Other: (specify)________
2-6.8 Total Thickness Variation
(TTV)
[ ] [ ] µm, max. [ ]SEMI MF533; [ ]SEMI MF657; [ ]SEMI MF1530;
[ ]JIS H 0611; [ ]DIN 50441/1; [ ]Other: (specify)_________
2-6.9 Bow
[ ] [ ] µm, max [ ]SEMI MF534; [ ]JIS H 0611; [ ]Other: (specify)___________
2-6.10 Warp
[ ] [ ] µm, max [ ]SEMI MF657; [ ]SEMI MF1390; [ ]Other:
(specify)_________
2-6.11 Sori [ ] [ ] µm, max [ ] SEMI MF1451; [ ] JEITA EM-3401; [ ]Other:
(specify)__________
2-6.12 Flatness, Global Acronym:
#3
[ ] [ ] [ ] [ ] Value: [ ]µm [ ]SEMI MF1530; [ ]DIN 50441/3; [ ]JEITA EM-3401;
[ ]Other: (specify)__________
2-6.13 Flatness, Site Acronym:
#3
[ ] [ ] [ ] [ ] Value: Not greater than [ ]µm
Site Size ___ mm × ___ mm
[ ]% Usable Area________
[ ]Include partial sites; [ ]Do not include partial sites
Offset: x = [ ] mm, y = [ ] mm
[ ]SEMI MF1530; [ ]Other: (specify)_____________
2-6.14 Nanotopography
[ ]SEMI M43 (specify conditions):____________________
2-7. FRONT SURFACE CHEMISTRY
2-7.1 Surface Metal Contamination
2-7.1.1 Sodium
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]Other: (specify)_____________
2-7.1.2 Aluminum
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]Other: (specify)_____________
SEMI M1-0305 © SEMI 1978, 2005 14
ITEM SPECIFICATION MEASUREMENT METHOD
2-7.1.3 Potassium
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.4 Chromium
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.5 Iron
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.6 Nickel
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.7 Copper
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.8 Zinc
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2 Other Surface Metals (List Separately)
2-7.2.1 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.2 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.3 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
SEMI M1-0305 © SEMI 1978, 2005 15
ITEM SPECIFICATION MEASUREMENT METHOD
2-7.2.4 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.5 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.6 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.3 Surface Organics [ ]Not greater than [ ]ng/cm
2
[ ]SEMI MF1982; [ ]Other: (specify)___________
2-8. FRONT SURFACE INSPECTION CHARACTERISTICS
FOR ALL WAFER DIAMETERS, THE ITEMS LISTED IN THIS SECTION MAY BE SPECIFIED INDIVIDUALLY. ALTERNATIVELY, FOR WAFERS
150 mm OR LESS IN DIAMETER, WHICH CAN BE INSPECTED VISUALLY, THE ITEMS LISTED MAY BE [ ]Specified according to Table 10. If the
items are specified according to Table 10, the items marked with the symbol need not be entered individually.
2-8.1 Scratches – Macro
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.2 Scratches – Micro [ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.3 Pits
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.4 Haze
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.5 Localized Light Scatterers
(LLS)
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.6 Contamination/Area
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.7 Edge Chips and Indents
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________