semi合集-English.pdf - 第5693页
SEMI P10-0705 © SEMI 1990, 2005 188 complexType CdDefinitionType diagram
SEMI P10-0705 © SEMI 1990, 2005 187
RELATED INFORMATION 9
SEMI PHOTOMASK MASK ORDER STRUCTURE TREE DIAGRAM
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the <mask_order> portion of the standard in XML format.
NOTE: All portions of the tree were scaled to fit within single pages. In cases where a portion of the tree is very long, this
causes the text to be very small. Such portions of the tree will be more easily read by viewing them with a text editor or text
viewer and using an increased magnification.
complexType AerialImageDataType
diagram
complexType BarcodeDataType
diagram
SEMI P10-0705 © SEMI 1990, 2005 188
complexType CdDefinitionType
diagram
SEMI P10-0705 © SEMI 1990, 2005 189
complexType CdGroupType
diagram
complexType CdIsoDenseDefinitionType
diagram