semi合集-English.pdf - 第3319页

SEMI E130-1104 © SEMI 2003, 2004 33 R1-1.1.2.6 Load 1 st Substrate of PJ02. PJ01 Terminates Host Prober Load Substra te() PS: AWAI TING COMMAND to HANDLI NG MATERIAL Unload subst rate fr om chuck() PJ01: PROCESSING to PR…

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SEMI E130-1104 © SEMI 2003, 2004 32
Process Substrate SubstPJ01.02 (See Section R1-1.1.2.3 )
R1-1.1.2.5 Load 3
rd
Substrate – PJ02 Dispatched
PJ2 Recipe settings are identical to PJ1. No setup task required
Host Prober
Load Substrate()
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: AWAITING COMMAND to HANDLING MATERIAL
PS: HANDLING MATERIAL to AWAITING COMMAND
PJ02: POOLED to SETTING UP()
PJ02: SETTING UP to PROCESSING()
PJ02 may transition from POOLED to
SETTING UP to PROCESSING before
the 3
rd
substrate of PJ01 alignment
completes. The order of the messages
presented in this scenario is not
significant.
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.03
SubstPJ02.01
Figure R1-6
Normal Run - Load 3
rd
Substrate Scenario
Process Substrate SubstPJ01.03 (See Section R1-1.1.2.3 )
SEMI E130-1104 © SEMI 2003, 2004 33
R1-1.1.2.6 Load 1
st
Substrate of PJ02. PJ01 Terminates
Host Prober
Load Substrate()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck()
PJ01: PROCESSING to PROCESS COMPLETE()
PJ01: PROCESSING COMPLETE to TERMINAL()
Load substrate on Chuck()
Move next substrate to Pre-align()
Align and Profile()
PS: HANDLING MATERIAL to AWAITING COMMAND()
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.01
SubstPJ02.02
Figure R1-7
Normal Run - Load 1
st
Substrate of PJ02 Scenario
Process Substrate SubstPJ01.01 (See Section R1-1.1.2.3 )
SEMI E130-1104 © SEMI 2003, 2004 34
R1-1.1.2.7 Load PJ02 Substrate 2
Host Prober
Load Substrate()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.02
SubstPJ02.03
Figure R1-8
Normal Run - Load 2
nd
Substrate of PJ02 Scenario
Process Substrate SubstPJ02.02 (See Section R1-1.1.2.3 )
R1-1.1.2.8 Load PJ02 substrate 3
Message sequence identical to Section R1-1.1.2.7
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.03
Figure R1-9
Normal Run - Load 3
rd
Substrate of PJ02 Scenario
Process Substrate SubstPJ02.03 (See Section R1-1.1.2.3 )