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SEMI E130-1104 © SEMI 2003, 2004 29 R1-1.1.2 S equence Diagram R1-1.1.2.1 Job Setup Hos t Prober E87 Bi nd( ) E40: PRMult iCr eate( ) E94 Creat e CJ1() C J1: to Q UE UE D() PJ01: t o POO LED() PJ02: t o POO LED() CJ1 : Q…

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SEMI E130-1104 © SEMI 2003, 2004 28
RELATED INFORMATION 1
NOTICE: This related information is not an official part of SEMI E130 and was derived from the work of the
originating task force. This related information was approved for publication by full letter ballot procedures on
September 3, 2003.
R1-1 Scenarios
R1-1.1 Scenario I – Complete Multiple Process Job Run
R1-1.1.1 Job Description
R1-1.1.1.1 A single carrier containing six wafers in two lots is processed as two separate Process Jobs. E90 state
transitions are omitted for the sake of clarity. See Section R1-1.2 for a description of the substrate tracking events.
CarrierId: “CarrierA”
Process Job 1: Id: PJ01 Slots 1-3 Substrate Ids: SubstPJ01.01, SubstPJ01.02, SubstPJ01.03
Process Job 2: Id: PJ02 Slots 23-25 Substrate Ids: SubstPJ02.01, SubstPJ02.02, SubstPJ02.03
Pre-Align Chuck
CarrierA
PJ02
PJ01
Figure R1-1
Processing Environment for Scenarios
SEMI E130-1104 © SEMI 2003, 2004 29
R1-1.1.2 Sequence Diagram
R1-1.1.2.1 Job Setup
Host Prober
E87 Bind()
E40: PRMultiCreate()
E94 Create CJ1()
CJ1: to QUEUED()
PJ01: to POOLED()
PJ02: to POOLED()
CJ1: QUEUED to SELECTED()
PJ01: POOLED to SETTING UP()
PJ01: SETTING UP to PROCESSING()
PS: IDLE to SETTING UP
PS: SETTING UP to AWAITING LOAD
User
Deliver FOUP to tool
CA: IDNR to IDVO
CA: SMNR to SMVO()
LP: READY TO LOAD to TRANSFER BLOCKED()
LPCA: NOT ASSOCIATED to ASSOCIATED
Reference: SEMI E87
Normal Roundtrip 2
CA: to IDNR
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-2
Normal Run - Job Setup Scenario
SEMI E130-1104 © SEMI 2003, 2004 30
R1-1.1.2.2 Job Start — At this point, the Process Job is in the PROCESSING state and the prober is waiting for the
host to begin processing the material identified in the PRMtlNameList.
Host Prober
Load Substrate()
Move substrate to Pre-align()
Load substrate on Chuck()
Move next substrate to Pre-align()
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
PS: AWAITING LOAD to HANDLING MATERIAL
CA: NOT ACCESSED to IN ACCESS()
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.01
SubstPJ01.02
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-3
Normal Run - Job Start Scenario