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SEMI E30-1103 © SEMI 1992, 2003 49 Equipment-Initiated Process Program Download — Formatted: COMMENTS HOST EQUIPMENT COMMENTS <--S7,F25 Formatted Process Program Request Formatted Process Program Data S7,F26--> [IF…

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SEMI E30-1103 © SEMI 1992, 2003
48
Host-Initiated Process Program Download — Unformatted:
COMMENTS HOST EQUIPMENT COMMENTS
[IF]
Process program is multi-block
[THEN]
Process Program Load Inquire S7,F1
21
-->
<--S7,F2 Process Program Load Grant
[END_IF]
Process Program Send S7,F3-->
<--S7,F4 Process Program Acknowledge
Large Process Program S7,F37-->
Send
<--S7,F38 Large Process Program
Acknowledge
<--S13,F3 Open Data Set Request
S13,F4-->
Open Data Set Data [START] repeat until ACKC13 is
error:
<--S13,F5 Read Data Set Request
S13,F6-->
Read Data set Data [END]
<--S13,F7 Close Data Set Send
S13,F8-->
Close Data Set Acknowledge
[IF]
S7,F27 is multi-block
[THEN]
Process Program Verification
<--S7,F29 Inquire
Process Program S7,F30-->
Verification Grant [END_IF]
<--S7,F27 Process Program Verification
Send
Process Program S7,F28-->
Verification Acknowledge
SEMI E30-1103 © SEMI 1992, 2003
49
Equipment-Initiated Process Program Download — Formatted:
COMMENTS HOST EQUIPMENT COMMENTS
<--S7,F25 Formatted Process Program
Request
Formatted Process Program Data S7,F26-->
[IF] S7,F27 is multi-block
[THEN]
<--S7,F29 Process Program Verification
Inquire
S7,F30--> Process Program Verification
Grant
[END IF]
<--S7,F27 Process Program Verification
Send
Process Program Verification
Acknowledge S7,F28-->
<--S7,F43 Large Formatted Process Program
Large Formatted Process S7,F44--> Program Request
Program Acknowledge
<--S13,F3 Open Data Set Request
S13,F4-->
Open Data Set Data [START] repeat until ACK13 is
error:
<--S13,F5 Read Data Set Request
S13,F6-->
Read Data Set Data [END]
<--S13,F7 Close Data Set Send
S13,F8-->
Close Data Set
Acknowledge [IF]
S7,F27 is multi-block
[THEN]
<--S7,F29 Process Program Verification
Inquire
Process Program [END_IF]
Verification Grant
<--S7,F27 Process Program Verification
S7,F28--> Send
Process Program
Verification Acknowledge
SEMI E30-1103 © SEMI 1992, 2003
50
Equipment-Initiated Process Program Download — Unformatted:
COMMENTS HOST EQUIPMENT COMMENTS
<--S7,F5 Process Program Request
Process Program Send S7,F6-->
<--S7,F41 Large Process Program Request
Large Process Program S7,F42-->
Program Acknowledge
<--S13,F3 Open Data Set Request
Open Data Set Data S13,F4-->
[START] repeat until ACKC13 is
error:
<--S13,F5 Read Data Set Request
Open Data Set Data S13,F6-->
[END]
<--S13,F7 Close Data Set Send
Close Data Set Acknowledge S13,F8-->
[IF]
S7,F27 is multi-block
[THEN]
<--S7,F29 Process Program Verification
Process Program S7,F30--> Inquire
Verification Grant [END_IF]
<--S7,F27 Process Program
Process Program S7,F28--> Verification Send
Verification Acknowledge
4.6.6 Scenarios for Recipes
4.6.6.1 Recipe Creation, Editing, or Deletion
Recipe Created by Operator:
COMMENTS HOST EQUIPMENT COMMENTS
New recipe created by operator
at equipment
RcpChangeName = RCPID
RcpChangeStatus = 1 (Created)
[IF] CEID for New Execution
Recipe Event enabled
[THEN]
<--S6,F11 Send Event Report
Event Report Acknowledge S6,F12-->
[END_IF]