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SEMI E52-0703 © SEMI 1995, 2003 6 Code Gas Name Symbol Formula Synonym Ref 159 Tritium T2 H 3 2 T2 2 160 Difluoromethane CH2F2 CH 2 F 2 Methylene Fluoride 2 161 Tertiarybutylarsine C4H11As C(CH 3 ) 3 AsH 2 TBA 8 162 Tert…

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SEMI E52-0703 © SEMI 1995, 2003 5
Code Gas Name Symbol Formula Synonym Ref
115 Iodine Pentafluoride IF5 IF
5
1
116 Bromine Pentafluoride BrF5 BrF
5
1
117 Butane C4H10 CH
3
(CH
2
)
2
CH
3
1
118 Hexafluoroethane C2F6 F
3
CCF
3
F-116, Perfluoroethane 1
119 Chloropentafluoroethane C2ClF5 ClCF
2
CF
3
F-115, R-115 1
120 Methylbutene C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene 1
121 Tungsten Hexafluoride WF6 WF
6
2
122 Dimethylpropane C5H12 (CH
3
)
4
C Neopentane 2
123 Uranium Hexafluoride UF6 UF
6
2
124 Molybdenum Hexafluoride MoF6 MoF
6
2
125 Dichlorotetrafluoroethane C2Cl2F4 F
3
CCCl
2
F F-114, R-114 1
126 Trichlorotrifluoroethane C2Cl3F3 CF
2
ClCCl
2
F F-113, R-113 1
127 Hexane C6H14 CH
3
(CH
2
)
4
CH
3
2
128 Perfluoropropane C3F8 CF
2
(CF
3
)
2
1
129 Octafluorocyclobutane C4F8 (CF
2
)
4
Perfluorocyclobutane or
Cyclobutane, Perfluoro
1
130 Dibromotetrafluorethane C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2 1
131 Trimethoxyborine C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate 2
132 Trimethylphosphorous C3H9P (CH
3
)
3
P Trimethylphosphine, TMP 2
133 Trimethylphosphite C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine 2
134 Difluorosilane SiH2F2 SiH
2
F
2
10
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
136 Ethanol C2H6O CH
3
CH
2
OH 2
137 Halothane C2HBrClF3 BrClHCCF
3
6
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
139 Hexamethyldisilane C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS 3
140 Nickel Carbonyl C4O4Ni Ni(CO)
4
1
141 Nitrosyl Chloride NOCl NOCl 1
142 Pentaborane B5H9 B
5
H
9
2
143 Phosphorus Pentafluoride PF5 PF
5
1
144 Tetraethoxysilane C8H20O4Si (C
2
H
5
O)
4
Si TEOS 2
145 Tin Tetrachloride SnCl4 SnCl
4
Tetrachlorostannane 2
146 Tributylaluminum C12H27Al (CH
3
CH
2
CH
2
CH
2
)
3
Al TBAl 3
147 Trichlorosilane SiHCl3 SiHCl
3
5
148 Triethylgallium C6H15Ga (C
2
H
5
)
3
Ga TEGa 4
149 Trimethylaluminum C3H9Al Al(CH
3
)
3
TMA, TMAl 4
150 Trimethylantimony C3H9Sb (CH
3
)
3
Sb Trimethylstibene 2
151 Trimethylarsenic C3H9As (CH
3
)
3
As Trimethylarsine, TMAs 2
152 Trimethylgallium C3H9Ga Ga(CH
3
)
3
TMGa 4
153 Trimethylindium C3H9In (CH
3
)
3
In TMIn 3
154 Diethylsilane C4H12Si (C
2
H
5
)
2
SiH
2
2
155 Pentafluoroethane C2HF5 CF
3
CHF
2
F-125, R-125 9
156 Tetrafluoroethane C2H2F4 CH
2
FCF
3
R-134A, F-134A 2
157 Tetrafluorohydrazine N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride 1
158 Tetramethylcyclotetra-siloxane C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TOMCATS 7
SEMI E52-0703 © SEMI 1995, 2003 6
Code Gas Name Symbol Formula Synonym Ref
159 Tritium T2 H
3
2
T2 2
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
161 Tertiarybutylarsine C4H11As C(CH
3
)
3
AsH
2
TBA 8
162 Tertiarybutylphosphine C4H11P C(CH
3
)
3
PH
2
TBP 8
163 Triethylborate C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane 2
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
165 Trimethylaminealane C3H12AlN (CH
3
)
3
NAlH
3
TMAA 11
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
167 Nitric Acid HNO3 HNO
3
2
168 Tetrachloroethylene C2Cl4 Cl
2
C=CCl
2
Perchloroethylene orEthylene,
Perchloro
2
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
171 Sulfuric Acid H2SO4 H
2
SO
4
2
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
173 Acetonitrile C2H3N CH
3
CN 2
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
175 Intentionally Left Blank
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
178 4-Methyl, 1-Pentene C6H12 (CH
3
)
2
CHCH
2
CH=CH
2
2
179 o-Xylene C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene 2
180 Phenol C6H6O C
6
H
5
OH 2
181 Toluene C7H8 C
6
H
5
CH
3
Methylbenzene 2
182 Tetrahydrofuran C4H8O C
4
H
8
O 2
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
184 Acetone C3H6O CH
3
COCH
3
2
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
186 2,2 Dichloro 1,1,1 Trifluoroethane C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
189 Sulfur Monochloride S2Cl2 S
2
Cl
2
2
190 Trimethyl Silane C3H10Si (CH
3
)
3
SiH 2
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
192 Hexafluorobenzene C6F6 C
6
F
6
2
193 Phosphorus Trichloride PCL3 PCl
3
2
194 Titanium Tetraisopropoxide C12H28OTi Ti(OC
3
H
7
)
4
1
195 Arsenic Trifluoride AsF3 AsF
3
2
196 Arsenic Triiodine AsI3 AsI
3
2
197 Benzene C6H6 C
6
H
6
2
198 Borazine B3N3H6 H
3
B
3
N
3
H
3
14
199 Bromochlorodifluoromethane CBrClF2 BrClCF
2
2
200 Carbon Tetrabromide CBr4 CBr
4
2
201 Chlorine Dioxide ClO2 ClO
2
2
202 Chlorine Pentafluoride ClF5 ClF
5
2
SEMI E52-0703 © SEMI 1995, 2003 7
Code Gas Name Symbol Formula Synonym Ref
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
205 Chlorosilane SiH3Cl SiH
3
Cl 2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
217 Digermane Ge2H6 Ge
2
H
6
2
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
223 Fluoroacetylene C2HF FC=CH 2
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
226 Aluminum Trifluoride AlF3 AlF
3
2
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
229 Hydrogen telluride H2Te H
2
Te 2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
232 Difluoroamidogen NF2 NF
2
2
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
235 Nitromethane CH3NO2 CH
3
NO
2
2
236 Octafluorobutane C4F8 C
4
F
8
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
238 Oxygen Dichloride OCl2 OCl
2
2
239 Pentaborane(11) B5H11 B
5
H
11
2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
241 Perfluorobutane C4F10 C
4
F
10
3
242 Arsenic Tribromide AsBr3 AsBr
3
2
243 Rhenium Hexafluoride ReF6 ReF
6
2
244 Deuteriumsilane SiD4 SiH
2
4
2
245 Stibine SbH3 SbH
3
2
246 Sulfur Trioxide SO3 SO
3
2
247 Tellurium Hexafluoride TeF6 TeF
6
2