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SEMI E42-0704 © SEMI 1995, 2004 113 mandatory at tribute — A requ ired attribute that always exists and has a non-default valu e . modify vari able paramet ers — An operati on that modifies the variable parameter definit…
SEMI E42-0704 © SEMI 1995, 2004 112
deselect — The operation that prevents a selected
recipe from subsequent execution without its first being
selected again.
distributed recipe namespace — A namespace that is
capable of using namespace segments provided by
multiple agents.
download — To send a recipe to the recipe executor.
edit — An operation which creates a new recipe body
or changes the body of an existing recipe.
editor — A service which allows a user to create or
modify the contents of the recipe body. Editors are not
defined by RMS and are generally considered as
external to a namespace.
eol — The ASCII line-feed character (0A
16
) signifying
the end of a line of text.
empty — An attribute with a binary, list, or text format
with no content.
end of line character — See eol.
equipment — An agent with associated hardware that
provides, at a minimum, recipe execution services.
event — A detectable occurrence of interest to a service
user.
exception — An irregular event that indicates some
abnormal or unacceptable condition that requires
attention but does not constitute a safety hazard. Within
RMS, exceptions indicate the abnormal completion of
an operation.
execute — An agent executes a recipe by reading the
recipe contents and implementing its instructions,
process parameters, or other information required for its
own processing.
executing agent — The agent that is capable of
executing a specific recipe.
execution area — The storage location of the recipe(s)
currently selected (ready) for execution.
executable copy — A selected recipe, or “copy” of a
selected recipe, which is in the execution area.
execution recipe — The subtype of recipe that is stored
by the recipe executor.
execution recipe descriptor — Consists of the execution
attribute description, the generic attribute description,
and the body descriptor, in that order.
execution recipe storage — Storage for recipes
provided by the recipe executor for recipes that are not
currently selected.
external reference — (1) The reference which a recipe
makes to another recipe; (2) The list of subrecipes
referenced by a parent recipe.
forced overwrite — The replacement of an existing
execution recipe with a downloaded recipe with the
same identifier.
fundamental requirements — The requirements for
information and behavior that must be satisfied for
compliance to the Recipe Management Standard.
Fundamental requirements apply to specific areas of
application or objects.
generic attribute — A recipe attribute that applies to all
agents capable of executing a specific recipe.
get available storage — The operation that calculates
the amount of remaining recipe storage capacity, in
bytes, exceeding overhead requirements.
header length — The sum of the lengths of the
attributes the header contains at the time the calculation
is performed.
host — A supervisory agent that represents the factory
to its subordinates.
identification attribute — An attribute that is used to
identify a specific object and that is not included in a
recipe section when a recipe is transferred.
identification code — A text string containing a unique
and persistent “signature” for the recipe executor that
last performed verification on a recipe.
identifier — One or more attributes of an object that
uniquely identify it within a specific context.
last value — The setting for a variable parameter
specified by the user when the recipe was last selected
for execution.
link — The operation performed on a main recipe that
collects and resolves external references, and collects
variable parameter definitions, for that recipe and all
referenced recipes.
linked recipe set — The set of recipes identified by the
link operation and specified by the attribute LinkList
.
logical recipe — A recipe with a particular set of
attributes and a particular body considered
independently from its physical location. A logical
recipe may have multiple instances or copies.
main recipe — (1) The recipe, within a set of one or
more recipes to be linked together, which is not a
subrecipe; (2) The starting recipe or “entry point” for a
set of recipes.
managed recipe — A recipe that is stored with a recipe
namespace.
SEMI E42-0704 © SEMI 1995, 2004 113
mandatory attribute — A required attribute that always
exists and has a non-default value.
modify variable parameters — An operation that
modifies the variable parameter definitions applied to a
specific agent.
name — A text-based attribute of an object that may be
used as all or part of an identifier. Certain restrictions
on its characters exist. (See SEMI E39.)
namespace — A domain within which object identifiers
are unique. Also see recipe namespace.
namespace specifier — An object specifier applied to a
recipe namespace.
non-numeric parameter — Any variable parameter that
is not a numeric parameter.
non-shared namespace — A recipe namespace that has
at most one member.
notification service — A service that does not expect a
response.
numeric parameter — Any variable parameters that
can take on any numeric value for their format type,
between a parameter low limit and a parameter high
limit. These limits shall not exceed absolute minimum
and maximum limits set for that parameter by the
agent's supplier.
numeric version — See version number.
object form — (1) Any recipe not in text form; (2) The
body of a recipe which has been compressed from the
source form. (See also the generic attribute
BodyFormat
.)
object specifier — A logical pointer to a remote object.
See SEMI E39 (OSS).
operator — The user who interacts locally with agent
through the agent's human interface.
originate — Any operation which produces a new
recipe identifier, including copying, renaming, creating,
editing a read-only recipe, and downloading a new
version.
originating namespace — The recipe namespace from
which an execution recipe was originally downloaded
and/or to which it is to be uploaded.
parameter — A control value that affects the agent's
process. Also see variable parameter.
parameter definition — A formal declaration of a
variable parameter that specifies the parameter's name,
initial value, and restrictions.
parameter domain — The set of all possible values for
a given form that fulfill the conditions of the parameter
restriction (if any).
parameter restriction — A required part of a parameter
definition specifying one or more conditions that any
value assigned to that parameter is required to satisfy to
be valid.
parent recipe — Any recipe with external references to
subrecipes.
primary class — A recipe class which is not a subclass
of another class.
PROCESS class — The required primary class for all
recipes used for the agent's normal process.
protect — The operation of changing the approval level
of an individual recipe to that of the RecipeRead-
OnlyLevel attribute of the recipe namespace.
read-only recipe — A recipe that is protected. A recipe
with an approval-level greater than, or equal to, the
value of the namespace attribute RecipeRead-
OnlyLevel cannot be changed by updating, deleting,
renaming, unlinking, or re-linking.
recipe — (1) The pre-planned and reusable portion of
the set of instructions, settings, and parameters under
control of the agent that determine the processing
environment seen by the manufactured object and that
may be subject to change between runs or processing
cycles; (2) The aggregation composed of a generic
header, zero or more agent-specific headers, and a
recipe body.
recipe attribute — Structured information concerning a
recipe within the recipe header.
recipe body — The contents of the recipe containing
the data used for execution purposes.
recipe class — A formal grouping of recipes with a
common language syntax and functionality.
managed recipe descriptor — Consists of the generic
attribute descriptor and the body descriptor, followed
by descriptors for any agent-specific datasets.
recipe execution area — Storage used for currently
selected recipes (i.e., for the current process cycle).
recipe executor — The component of an executing
agent responsible for understanding and verifying the
syntax and semantics of a recipe, for validating it, and
for executing it.
recipe identifier — Consists of the recipe's class, name,
and version.
SEMI E42-0704 © SEMI 1995, 2004 114
recipe name — A user-defined text string used in the
recipe identifier. The name corresponds to PPID in
Stream 7 implementations.
recipe namespace — A logical management domain for
(1) the storage and management of recipes, and (2) the
insurance of the uniqueness of recipe identifiers within
that domain.
recipe namespace manager (manager) — The
component of an agent that manages the recipe
namespace and that represents the interface for the
namespace to the external world.
recipe namespace segment (segment) — The
component of a namespace that represents the internal
storage and actual manipulation of recipes.
recipe section — A partition of the recipe for purposes
of transferring it through an RMS service. All recipes
have a section containing the generic attributes and a
section containing the body. Some recipes also have a
section containing the agent-specific attributes.
recipe specifier — An object specifier applied to a
recipe.
recipe storage area — A storage area for recipes.
rename — The operation of assigning a new identifier
to a recipe or to a recipe namespace.
request service — A service that requires a response.
SERVICE class — An optional primary class used for
recipes whose purpose is to maintain, prepare, calibrate,
or test the operation of equipment.
reset — See clear.
resource — An owned entity that has an active role in
factory operations.
select — The act of preparing a recipe, or a linked
recipe set, for execution. This includes confirmation
that all specified subrecipes are available, that the
attributes of the main recipe and all its referenced
recipes meet execution requirements, that the recipes
are validated as a set, and that all other steps that may
be necessary for the proper execution of the recipe have
been performed.
service — A service (or message service) represents a
function offered to a user by a provider. A service is
one of two types: a request or a notification.
service resource — A set of services within a particular
area of specialization, such as a recipe namespace
resource or a recipe execution resource.
setting — A static value accessible to the user, through
one or more methods, that is used by agent to control its
process. Settings include, but are not limited to, setpoint
values. Settings typically may be specified within a
recipe.
shared namespace — A namespace with more than one
member.
source form — A recipe body which consists of one or
more lines of text and which conforms to a formally
defined recipe language.
storage area — An area where objects and data are
stored. See also recipe storage area.
stored recipe attribute — An attribute of a recipe, a
recipe header, or a recipe body, that is stored as a
name/value pair within a recipe header whenever the
recipe is transferred.
subclass — A class of recipes within a larger class.
subrecipe — Any recipe which is referenced by another
recipe within the same namespace.
supervisory agent — An agent with supervisory
responsibilities for one or more subordinate agents.
Examples include a host manufacturing system and a
cluster controller.
timestamp — (1) The notation of the date and time of
the occurrence of an event; (2) An attribute of a recipe
header or recipe body that contains the date and time
the particular section was last changed. This attribute is
a text string of the form “yyyymmddhhmmsscc” for the
year yyyy, the month mm, the day dd, the hour hh, the
minutes mm, and the seconds ss.
unlink — An operation that clears all attributes set by a
link operation.
unprotect — An operation that resets a recipe's
ApprovalLevel
attribute. (Set it to zero.)
update — The operation of replacing the body of an
existing recipe.
upload — To transfer a recipe body from the recipe
executor.
user — A person interacting with an agent directly
through the agent's human interface or indirectly
through the agent's supervisor.
validate — The action of checking a recipe to ensure
that the recipe and its parameters' type
and range are
valid for the agent's configuration at the time the recipe
is selected for execution. [A recipe may be syntactically
correct and yet may contain statements that cannot be
executed under all configurations of the agent.]
variable parameter — A formally defined variable
(setting) defined in the body of a recipe (1) With a
specified default value, boundaries or conditions for
replacement values, and (where applicable) units, and