semi合集-English.pdf - 第5080页
SEMI M23-0703 © SEMI 1993, 2003 9 Figures 4A and 4B Both Diagr ams Show a n InP Wafer w ith Surface Ori entation B and Fl at Option V -Groove
SEMI M23-0703 © SEMI 1993, 2003 8
Figures 3A and 3B
Both Diagrams Show an InP Wafer with Surface Orientation B and Flat Option Dove-Tail
SEMI M23-0703 © SEMI 1993, 2003 9
Figures 4A and 4B
Both Diagrams Show an InP Wafer with Surface Orientation B and Flat Option V-Groove
SEMI M23-0703 © SEMI 1993, 2003 10
Figure 5
Diagram Shows an InP Wafer with the Same Orientation as Figure 3, but with a Few Degrees of Orthogonal
Misorientation from the Intended Off-Orientation. The
α angle is also shown.