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SEMI E116-0705 © SEMI 2002, 2005 9 # PREVIOUS STATE TRIGGER NEW STATE ACTIONS COMMENTS 5 BUSY A pause command is received that paus es the EPT Module i . [OR] An abort command is received that aborts the EPT Module i . […

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SEMI E116-0705 © SEMI 2002, 2005 8
Table 1 Basic EPT State Transitions – Module Level
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
1 (No state) EPT Module
i
initialization
completed.
IDLE
[OR]
BLOCKED
No EPT event is triggered
EPTState
i
= IDLE or
BLOCKED
PreviousEPTState
i
= NoState
PreviousTaskName
i
= “No
Task”
PreviousTaskType
i
= 0
EPTStateTime
i
= 0
If no Fault
conditions exist
and no material is
present, transition
to IDLE
If Fault conditions
exist, or EPT
module cannot be
initialized, then
transition to
BLOCKED
If Material is
present, then
transition to
BLOCKED
2 IDLE EPT Module
i
starts
execution of a new task.
BUSY
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= BUSY
PreviousEPTState
i
=IDLE
TaskName
i
is set
TaskType
i
is set
3 BUSY EPT Module
i
completes
execution of task.
[AND]
Material is removed from
the EPT Module
i
.
IDLE
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= IDLE
PreviousEPTState
i
=BUSY
TaskName
i
= “No Task”
TaskType
i
= 0
PreviousTaskName
i
is set
PrevoiusTaskType
i
is set
4 BUSY EPT Module
i
starts
execution of a new task
upon the normal completion
of the previous task.
BUSY
EPTStateChange
i
event is
triggered
TaskName
i
is set
TaskType
i
is set
EPTStateTime
i
does not
change. Thus when the
module transitions out
of BUSY state, the
value of EPTStateTime
i
will reflect the total
time the module was
BUSY.
PreviousEPTState
i
does
not change. Thus,
PreviousEPTState
i
will
continue to reflect the
state of the module
before it was BUSY.
SEMI E116-0705 © SEMI 2002, 2005 9
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
5 BUSY A pause command is
received that pauses the EPT
Module
i
.
[OR]
An abort command is
received that aborts the EPT
Module
i
.
[OR]
A Fault condition occurs
that prevents the EPT
Module
i
from executing its
task.
BLOCKED
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTState
i
=BLOCKED
PreviousEPTState
i
=BUSY
TaskName
i
and
TaskType
i
do not
change. The variables
continue to reflect the
information of the task
that is currently blocked
from executing.
6 BLOCKED All fault conditions that
prevented task execution are
cleared and the EPT
Module
i
resumes execution
of its task or starts execution
of a new task.
[OR]
A resume command is
received that enables the
EPT Module
i
to resume its
task.
BUSY
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= BUSY
PreviousEPTState
i
=BLOCKED
TaskName
i
is set
TaskType
i
is set
BlockedReason
i
= 0
BlockedReasonText
i
= “Not
Blocked”
7 BLOCKED All fault conditions that
prevented task execution are
cleared.
[AND]
All material is removed
from the EPT Module
i
.
[AND]
EPT Module
i
can begin a
new task.
IDLE
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
=IDLE
PreviousEPTState
i
=BLOCKED
TaskName
i
= “No Task”
TaskType
i
= 0
PreviousTaskName
i
is set
PrevoiusTaskType
i
is set
BlockedReason
i
= 0
BlockedReasonText
i
= “Not
Blocked”
SEMI E116-0705 © SEMI 2002, 2005 10
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
8 IDLE Material arrives at the EPT
Module
i
and the EPT
Module
i
cannot begin
executing a task on the
material.
[OR]
A fault condition occurs
which prevents the EPT
Module
i
from starting a new
task.
BLOCKED
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTState
i
= BLOCKED
PreviousEPTState
i
= IDLE
9 BLOCKED Fault conditions occur that
prevent the EPT Module
i
from resuming a blocked
task, or starting a new task.
BLOCKED
EPTStateChange
i
event is
triggered
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTStateTime
i
does not
change. Thus when the
module transitions out
of BLOCKED state, the
value of EPTStateTime
i
will reflect the total
time the module was
BLOCKED from
processing.
PreviousEPTState
i
does
not change. Thus,
PreviousEPTState
i
will
continue to reflect the
state of the module
before it was
BLOCKED from
processing.
9.6 EPT State Transition Table for Equipment
9.6.1 This section defines the State Transitions for the Equipment, in terms of its EPT modules.
Table 2 Basic EPT State Transitions — Equipment Level
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
1 (No state) Equipment initiation
completed (includes
initialization of EPT modules)
IDLE
[OR]
BLOCKED
[OR]
BUSY
EPTStateChange event is
triggered
EPTState = IDLE or
BLOCKED or BUSY
PreviousEPTState =
NoState
EPTStateTime = 0
BlockedReason may be
updated
BlockedReasonText may be
updated
2 IDLE At least one EPT module
transitions to the BUSY state
with task type of 1..5.
BUSY
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BUSY
PreviousEPTState
= IDLE