semi合集-English.pdf - 第4276页

SEMI F79-0703 © SEMI 2003 13 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 10 Hydrogen Bromide 7 HBr HBr 11 Hydrogen Chloride 7 HCl HCl 17 Hydrogen Iodide 7 HI HI 183 Methyltrichlorosilane 7 CH3Cl3Si CH 3 SiC…

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SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
321 Trifluoromethylhypofluorite 4 CF4O CF
4
O CF3OF; Hypofluorous acid
290 Trifluoropropane 4 C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane
56 Vinyl Bromide 4 C2H3Br CH
2
=CHBr
55 Vinyl Chloride 4 C2H3Cl CH
2
=CHCl Chloroethylene
51 Vinyl Fluoride 4 C2H3F H
2
C=CHF
6.5 Hydrides 5
35 Arsine 5 AsH3 AsH
3
244 Deuteriumsilane 5 SiD4 SiH
4
2
58 Diborane 5 B2H6 B
2
H
6
217 Digermane 5 Ge2H6 Ge
2
H
6
97 Disilane 5 Si2H6 Si
2
H
6
43 Germane 5 GeH4 GeH
4
24 Hydrogen Cyanide 5 HCN HCN
23 Hydrogen Selenide 5 H2Se H
2
Se
22 Hydrogen Sulfide 5 H2S H
2
S
229 Hydrogen Telluride 5 H2Te H
2
Te
185 Methylsilane 5 CH6Si CH
3
SiH
3
Monomethylsilane
142 Pentaborane 5 B5H9 B
5
H
9
239 Pentaborane(11) 5 B5H11 B
5
H
11
31 Phosphine 5 PH3 PH
3
39 Silane 5 SiH4 SiH
4
245 Stibine 5 SbH3 SbH
3
253 Tetrasilane 5 Si4H10 Si
4
H
10
328 Trisilane 5 Si3H8 Si
3
H
8
Silicopropane; Trisilicane;
H
8
Si3
6.6 Halogens, other than
Fluorine
6
21 Bromine 6 Br2 Br
2
19 Chlorine 6 Cl2 Cl
2
6.7 Halides, other than
Fluorides
7
193 Arsenic Tribromide 7 AsBr3 AsBr
3
216 Arsenic Trichloride 7 AsCl3 AsCl
3
196 Arsenic Triiodine 7 AsI3 AsI
3
79 Boron Tribromide 7 BBr3 BBr
3
70 Boron Trichloride 7 BCl3 BCl
3
201 Chlorine Dioxide 7 ClO2 ClO
2
205 Chlorosilane 7 SiH3Cl SiH
3
Cl
67 Dichlorosilane 7 SiH2Cl2 SiH
2
Cl
2
113 Germanium Tetrachloride 7 GeCl4 GeCl
4
Tetrachlorogermane
SEMI F79-0703 © SEMI 2003 13
SEMI Gas # Chemical Name Category Symbol Formula Synonym
10 Hydrogen Bromide 7 HBr HBr
11 Hydrogen Chloride 7 HCl HCl
17 Hydrogen Iodide 7 HI HI
183 Methyltrichlorosilane 7 CH3Cl3Si CH
3
SiCl
3
MTS
238 Oxygen Dichloride 7 OCl2 OCl
2
60 Phosgene 7 CCl2O CCl
2
O Carbonyl Chloride
102 Phosphorus Oxychloride 7 POCl3 POCl
3
193 Phosphorus Trichloride 7 PCL3 PCl
3
278 Silicon Tetrabromide 7 Br4Si Br
4
Si SiBr4; Tetrabromosilane
108 Silicon Tetrachloride 7 SiCl4 SiCl
4
Tetrachlorosilane
189 Sulfur Monochloride 7 S2Cl2 S
2
Cl
2
248 Tetrachlorodiborane 7 B2Cl4 B
2
Cl
4
145 Tin Tetrachloride 7 SnCl4 SnCl
4
Tetrachlorostannane
114 Titanium Tetrachloride 7 TiCl4 TiCl
4
254 Titanium Tetraiodide 7 TiI4 TiI
4
255 Tribromostibine 7 SbBr3 SbBr
3
147 Trichlorosilane 7 SiHCl3 SiHCl
3
256 Trichlorostibine 7 SbCl3 SbCl
3
6.8 Fluorine and Fluorides 8
226 Aluminum Trifluoride 8 AlF3 AlF
3
96 Arsenic Pentafluoride 8 AsF5 AsF
5
195 Arsenic Trifluoride 8 AsF3 AsF
3
48 Boron Trifluoride 8 BF3 BF
3
116 Bromine Pentafluoride 8 BrF5 BrF
5
76 Bromine Trifluoride 8 BrF3 BrF
3
202 Chlorine Pentafluoride 8 ClF5 ClF
5
77 Chlorine Trifluoride 8 ClF3 ClF
3
232 Difluoroamidogen 8 NF2 NF
2
134 Difluorosilane 8 SiH2F2 SiH
2
F
2
326 Disilane Hexafluoride 8 SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane
18 Fluorine 8 F2 F
2
327 Fluoro Silane 8 SiH3F SiH
3
F H
3
FSi
99 Germanium Tetrafluoride 8 GeF4 GeF
4
Tetrafluorogermane
12 Hydrogen Fluoride 8 HF HF
115 Iodine Pentafluoride 8 IF5 IF
5
124 Molybdenum Hexafluoride 8 MoF6 MoF
6
53 Nitrogen Trifluoride 8 NF3 NF
3
41 Oxygen Difluoride 8 OF2 OF
2
SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
72 Perchloryl Fluoride 8 ClO3F ClO
3
F
143 Phosphorus Pentafluoride 8 PF5 PF
5
62 Phosphorus Trifluoride 8 PF3 PF
3
243 Rhenium Hexafloride 8 ReF6 ReF
6
325 Selenium Hexafluoride 8 SeF6 SeF
6
UN 2194; Selenium fluoride
88 Silicon Tetrafluoride 8 SiF4 SiF
4
110 Sulfur Hexafluoride 8 SF6 SF
6
86 Sulfur Tetrafluoride 8 SF4 SF
4
87 Sulfuryl Fluoride 8 SO2F2 SO
2
F
2
247 Tellurium Hexafluoride 8 TeF6 TeF
6
249 Tetrafluorodiborane 8 B2F4 B
2
F
4
157 Tetrafluorohydrazine 8 N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride
261 Trifluorosilane 8 SiHF3 SiHF
3
121 Tungsten Hexafluoride 8 WF6 WF
6
123 Uranium Hexafluoride 8 UF6 UF
6
324 Xenon difluoride 8 XeF2 XeF
2
F
2
Xe; Xenon fluoride
6.9 Organo-metallic and
Siloxanes
9
212 Dichlorodimethylsilane 9 C2H6SiCl2 (CH
3
)
2
SiCl
2
188 Diethoxy Dimethyl Silane 9 C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
154 Diethylsilane 9 C4H12Si (C
2
H
5
)
2
SiH
2
214 Diethylzinc 9 C4H10Zn Zn(C
2
H
5
)
2
300 Dimethoxydimethyl silane 9 C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22
284 Dimethyl Selenide 9 C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl
164 Dimethylaluminum-hydride 9 C2H7Al (CH
3
)
2
AlH DMAH
218 Dimethylcadmium 9 C2H6Cd (CH
3
)
2
Cd
219 Dimethylsilane 9 C2H8Si (CH
3
)
2
SiH
2
220 Dimethyltellurium 9 C2H6Te (CH
3
)
2
Te
135 Dimethylzinc 9 C2H6Zn (CH
3
)
2
Zn
285 Ethoxy Silane 9 C2H8OSi C
2
H
8
OSi
224 Fluorotriethoxysilane 9 C6H15OSiF (C
2
H
5
O)
3
SiF
139 Hexamethyldisilane 9 C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS
227 Hexamethyldisilazane 9 C6H19Si2N (CH
3
)
6
Si
2
NH
228 Hexamethyldisiloxane 9 C6H18Si2O (CH
3
)
6
Si
2
O
279 Tantalum (V) Ethoxide 9 C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5
274 TEAsat 9 C6H15O4As (C
2
H
5
O)
3
AsO
161 Tertiarybutylarsine 9 C4H11As C(CH
3
)
3
AsH
2
TBA
162 Tertiarybutylphosphine 9 C4H11P C(CH
3
)
3
PH
2
TBP
144 Tetraethoxysilane 9 C8H20O4Si (C
2
H
5
O)
4
Si TEOS