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SEMI E58-0703 © SEMI 1997, 2003 5 3.2 Other Document Harel, D., “Statecharts: A Visual Formalism for Complex Systems,” Science of Computer Programming 8 (1987) 2 31–274 NOTE 1: As listed or revised, all documents ci ted …
SEMI E58-0703 © SEMI 1997, 2003
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SEMI E58-0703
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on October 19, 2000. Initially available at www.semi.org
January 2001; to be published March 2001. Originally published June 1997.
NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of
SEMI E58.1.
1 Purpose
1.1 This document provides standards for
implementing and collecting SEMI E10 state changes at
the equipment level per SEMI E10.
1.1.1 SEMI E10 defines various terms and equipment
states but was not written specifically for application by
automated equipment. This document is intended to
provide a consistent interpretation of these equipment
states through formal state model methodology.
1.1.2 ARAMS defines concepts, behavior, and
message services to support the integration of
automated systems within a semiconductor factory.
1.1 Background and Motivations — To implement the
integration of SEMI E10 states on automated
equipment, integration of definitions and requirements
must be detailed and precise to ensure interpretations
are consistent across equipment suppliers. This
provides an opportunity to automatically retain
information at the equipment itself.
1.1.3 Both equipment supplier and equipment user
benefit from the automation of SEMI E10 data
collection at the equipment through application of a
consistent state model.
1.1.4 SEMI E10 defines specific states but does not
address transitions between states. The ARAMS
standard specifies the triggers for state transitions made
by automated equipment. Extensions to SEMI E10
described in this document apply to decisions made by
automated equipment only.
2 Scope
1.2 This standard is applicable to the following
relationships: traditional host/equipment,
operator/equipment, and cluster tool controller/attached
module. The scope of this document is to define
standards which facilitate equipment-level capture and
communication of SEMI E10 related data. Specifically,
this document provides the following:
• An equipment state model that defines the rules for
equipment state changes,
• A set of standard equipment codes for representing
substates of the six basic equipment states defined
in SEMI E10,
• Definition of equipment-generated data,
• Concepts and messages required to exchange
information, and
• Requirements for fundamental compliance to
ARAMS
• Additional optional specifications.
1.3 This standard is intended as a supplement to SEMI
E10 to be used for equipment support of SEMI E10.
Formal definitions of all terms common to both
documents are provided solely by SEMI E10.
1.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E10 — Standard for Definition and Measurement
of Equipment Reliability, Availability, and
Maintainability (RAM)
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E38 — Cluster Tool Module Communications
(CTMC)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts,
Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58-0703 © SEMI 1997, 2003 5
3.2 Other Document
Harel, D., “Statecharts: A Visual Formalism for
Complex Systems,” Science of Computer Programming
8 (1987) 231–274
NOTE 1: As listed or revised, all documents cited shall be
the latest publications of adopted standards.
4 Terminology
4.1 Acronyms — The following acronyms are used in
this document.
4.1.1 ARAMS — Automated Reliability, Availability,
and Maintainability Standard, as defined by this
document.
4.1.2 CTMC — Cluster Tool Module Communications
[SEMI E38].
4.1.3 EMS — Exception Management Standard [SEMI
E41].
4.1.4 ERS — Event Reporting Standard [SEMI E53].
4.1.5 GEM — Generic Equipment Model [SEMI E30].
4.1.6 OSS — Object Services Standard [SEMI E39].
4.1.7 RAM — Reliability, Availability, and
Maintainability.
4.2 General Terms — The following definitions for
general terms are used in this document. References are
given in brackets.
4.2.1 alarm — Related to any abnormal situation on the
equipment that may endanger people, equipment, or
material being processed [SEMI E30, SEMI E41].
4.2.2 collection event — An event (or grouping of
related events) on the equipment that is considered to
be significant to the host [SEMI E30].
NOTE 2: A state transition in a formal state model always
represents a collection event unless explicitly stated
otherwise.
4.2.3 equipment production criteria — The set of
conditions and operating specifications that must be
satisfied for the equipment to consider itself as
performing its intended function. This includes basic
requirements for information, material to process, and
the absence of any detectable exception conditions
(e.g., no alarms). It also includes criteria specific to the
equipment model, such as a required level for vacuum
pressure and availability of consumables and support
tools required for its process.
4.2.4 event — A detectable occurrence significant to
the equipment.
NOTE 3: Within the context of ARAMS, an event may be
detected by either the equipment or the user.
4.2.5 event report — A message the equipment sends
to the host on the occurrence of a collection event.
4.2.6 exception — An alarm or error that is reported to
the user and that may or may not be recoverable.
4.2.7 fault — An exception.
4.2.8 host — The intelligent system that communicates
with the equipment, acts as a supervisory agent, and
represents the factory and the user to the equipment.
4.2.9 intended function — A manufacturing function
that the equipment was built to perform. This includes
transport functions for transport equipment and
measurement functions for metrology equipment as
well as process functions such as physical vapor
deposition and wire bonding. Complex equipment may
have more than one intended function.
4.2.10 interrupt (interruption) — A failure [SEMI
E10].
4.2.11 operator — Any person who communicates
locally with the equipment through the equipment’s
control panel.
4.2.12 state — A static set of conditions and associated
behavior. While all of its conditions are met, the state is
current (active). Behavior within a given state includes
the response to various stimuli.
NOTE 4: Within the scope of this document, the term “state”
generally refers to one of the six equipment states defined by
SEMI E10 and used in the ARAMS State Model: productive,
standby, engineering, scheduled downtime, unscheduled
downtime, and non-scheduled time.
4.2.13 state model — A collection of states and state
transitions that combine to describe the behavior of a
system. This model includes a definition of the
conditions that delineate a state, the activities possible
within a state, the events that trigger transitions to other
states, and the process of transitioning between states.
4.2.14 state transition — A change from one state to
another state.
4.2.15 standby condition — Any condition during
manufacturing time when the equipment’s production
criteria are not satisfied, and it is fault free and
otherwise able to perform its intended function.
4.2.16 substate — A refinement of a state.
NOTE 5: States may be subdivided into substates to facilitate
more concise definition of behavior. Thus, a hierarchy is
defined whereby any state may be a substate of some parent
state and in turn be the parent of its own substates [SEMI
E30, Appendix].
4.2.17 superstate — The parent state of two or more
states.
SEMI E58-0703 © SEMI 1997, 2003
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4.2.18 symptom — A user-detected event (e.g., smoke
observed).
4.2.19 timestamp — The notation of the date and time
of the occurrence of an event [SEMI E42].
4.2.20 timestamp format — A text string of the form
“YYYYMMDDhhmmsscc”, where:
YYYY = year (e.g., 1995)
MM = month (01–12)
DD = day (01–31)
hh = hour (00–23)
mm = minute (00–59)
ss = second (00–59)
cc = centisecond (00–99)
4.2.21 trigger — An event that causes a change in the
state of the equipment. Examples are changes in sensor
readings, alarms, messages received from the host, and
operator commands.
4.2.22 user — Any entity interacting with the
equipment, either locally as an operator or remotely via
the host. From the equipment’s viewpoint, both the
operator and the host represent the user.
4.3 data types — The following terms are used to
represent valid types of data.
4.3.1 form — Type of data: positive integer, unsigned
integer, integer, floating point (float) enumerated,
Boolean, text, formatted text, structure, list, ordered list.
4.3.2 positive integer — May take the value of any
positive whole number. Messaging protocol may
impose a limit on the range of possible values.
4.3.3 unsigned integer — May take the value of any
positive integer or zero. Messaging protocol may
impose a limit on the range of possible values.
4.3.4 integer — May take on the value of any negative
or unsigned integer. Messaging protocol may impose a
limit on the range of possible values.
4.3.5 floating point (float) — May take on any single
(real) numeric value, positive or negative. Messaging
protocol may impose a limit on the range of possible
values.
4.3.6 enumerated — May take on one of a limited set
of possible values. These values may be given logical
names, but they may be represented by any single-item
data type.
4.3.7 boolean — May take on one of two possible
values, equating to TRUE and FALSE.
4.3.8 text — A character string. Messaging protocol
may impose restrictions, such as length or ASCII
representation.
4.3.9 formatted text — A character string with an
imposed format. This could be by position, by use of
special characters, or both.
4.3.10 structure — A specific set of items, of possibly
mixed data types, in a specified arrangement.
4.3.11 list — A set of one or more items that are all of
the same form (one of the above forms).
4.3.12 ordered list — A set of items in specific
sequence.
5 Basic Requirements
1.5 An ARAMS-compliant implementation requires
provision of certain capabilities defined by other
standards: accessibility to status information, event
reporting, alarm management, and provision of an
internal time-and-date clock. These requirements may
be satisfied through compliance to one of the following
sets of requirements:
• The Generic Equipment Model (GEM):
• Clock Services
• Event Notification
• Status Data Collection
• Equipment Constants
• Alarm Management
• The following set of standards:
• Object Services Standard
• Clock Services, Cluster Tool Module
Communications
• Event Reporting Standard
• Exception Management Standard
1.6 The developer is expected to be familiar with the
appropriate documents before attempting to implement
ARAMS (see Section 16.1).
6 Conventions
This document follows the conventions for state model
methodology and service definitions used by the SEMI
standards referenced in Section 3.
6.1 State Model Methodology — This document uses
the state model methodology in SEMI E30 to describe
the behavior of equipment. A state model has three
elements: definitions of each state and substate, a