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SEMI E54.9-0303 © SEMI 2000, 2003 10 Table 16 Sensor-AI-AT Object Instance Attributes and Services Sensor-AI-AT Class ID = 130, Instance = 01 through r Attributes ID Attribute Name SDM Tag -- No a dditional attr ibutes d…
SEMI E54.9-0303 © SEMI 2000, 2003 9
8 Protocol Compliance
8.1 A method of testing protocol compliance is
required to verify implementation conformance to the
standard. An independent compliance testing laboratory
has been established at The University of Michigan’s
Electronics Manufacturing Laboratory for the testing of
Modbus/TCP over TCP/IP solutions. This laboratory
utilizes an established, documented and freely available
mechanism for compliance certification of devices on a
Modbus/TCP over a TCP/IP network. This certification
includes procedures and reporting mechanisms to dem-
onstrate conformance and interoperability of Modbus/
TCP devices. Information on the conformance testing
laboratory can be found on the World Wide Web.
5
Additional information on certification procedures can
also be found on the World Wide Web.
6
9 Specific Device Model Mappings
9.1 This section provides for the mapping of network
visible specific device structure and behavior, specified
in a SEMI SDM specification, to the Modbus/TCP net-
work. Each subsection is devoted to a single Specific
Device Model (SDM) specification. Additional SDM
mappings are added as sub-sections to this NCS specifi-
cation according to SEMI guidelines and the guidelines
SEMI E54. Unless otherwise noted, all attributes and
services described are instance level attributes (as
opposed to class level attributes).
NOTE 4: The formats of object instance attributes and
services are detailed in the associated SDM specification; the
presentation of object attributes and services to the
Modbus/TCP over a TCP/IP network is detailed in the tables
contained in the following sub-sections and in the
Modbus/TCP standard specifications.
NOTE 5: Relationships between object classes, including
inheritance is defined in the associated SDM specification and
the CDM specification.
9.1.1 The instance identifier of 1 through r, assigned to
an object type, refers to the possibility of multiple
instantiations of the object type. Refer to Table 2 of this
document and the CDM document for a further
explanation of object instance identifier assignments.
9.2 Specific Device Model for Mass Flow Device —
These sections detail the network mapping required to
support the Specific Device Model for Mass Flow
Devices. Table 14 summarizes the Mass Flow Device
Object types. Subsequent Tables 15 to 24 detail the
instance attributes and services associated with each
Mass Flow Device object type.
5 http://www.eecs.umich.edu/~ sbus
6 http://www.modicon.com/openmbus
Table 14 Mass Flow Device Object Types
SDM Object
Identifier
Object Name Modbus
Class ID
MFD1 (DM) Device Manager 1
MFD2 (SAC) Sensor Actuator Controller 2
MFD3 Sensor-AI-MF 129
MFD4 Sensor-AI-AT 130
MFD5 Assembly-MFM 131
MFD6 Sensor-AI-Aux 132
MFD7 Actuator-AO-MF 133
MFD8 Controller 39
MFD9 Local Link 4
MFD10 SISO 134
MFD11 SISO-Setpoint 135
MFD12 Assembly-MFC 136
9.2.1 Sensor-AI-MF –– The presentation of the Sensor
Analog Input Mass Flow (Sensor-AI-MF) object
instance attributes and services are as indicated in Table
15.
Table 15 Sensor-AI-MF Object Instance Attributes
and Services
Sensor-AI-MF
Class ID = 129, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Flow Totalizer A1
129 Flow Hours A2
130 Zero Offset Mode A5
131 Zeroing Status A6
132 Autorange Status A7
Services
ID Service Name SDM Tag
129 Perform Zero Offset S1
131 Query-Supported Gas Types S2
133 Selected Programmed Gas Type S3
135 Insert Gas Type S4
137 Delete Gas Type S5
139 Get Gas Calibration Data Value S6
141 Set Gas Calibration Data Value S7
143 Autorange S8
9.2.2 Sensor-AI-AT –– The presentation of the Sensor
Analog Input Ambient Temperature (Sensor-AI-AT)
object instance attributes and services are as indicated
in Table 16.
SEMI E54.9-0303 © SEMI 2000, 2003 10
Table 16 Sensor-AI-AT Object Instance Attributes
and Services
Sensor-AI-AT
Class ID = 130, Instance = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.3 Assembly-MFM –– The presentation of the
Assembly Mass Flow Meter (Assembly-MFM) object
instance attributes and services are as indicated in Table
17.
Table 17 Assembly-MFM Object Instance Attributes
and Services
Assembly-MFM
Class ID = 131, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.4 Sensor-AI-Aux –– The presentation of the Sensor
Analog Input Auxiliary (Sensor-AI-Aux) object
instance attributes and services are as indicated in Table
18.
Table 18 Sensor-AI-Aux Object Instance Attributes
and Services
Sensor-AI-Aux
Class ID = 132, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.5 Actuator-AO-MF –– The presentation of the
Actuator Analog Output Mass Flow (Actuator-AO-MF)
object instance attributes and services are as indicated
in Table 19.
Table 19 Actuator-AO-MF Object Instance
Attributes and Services
Actuator-AO – MF
Class ID = 133, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Valve Type A1
129 Override A2
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.6 Controller –– The presentation of the extended
Controller (Ca) object instance attributes and services
are as indicated in Table 20.
Table 20 Controller Object Instance Attributes and
Services
Controller
Class ID = 39, Instance ID = 01 through q
Attributes
ID Attribute Name SDM Tag
128 Alarm Settling Time CaA21
129 Warning Settling Time CaA24
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.7 Local Link –– The presentation of the extended
Local Link (Lnk) object instance attributes and services
are as indicated in Table 21.
Table 21 Local Link Object Instance Attributes and
Services
Local Link
Class ID = 4, Instance ID = 01 through j
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.8 SISO –– The presentation of the Single Input
Single Output (SISO) object instance attributes and
services are as indicated in Table 22.
SEMI E54.9-0303 © SEMI 2000, 2003 11
Table 22 SISO Object Instance Attributes and
Services
SISO
Class ID = 134, Instance = 01
Attributes
ID Attribute Name SDM Tag
128 Input A1
129 Output A2
130 Data Type A3
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.9 SISO-Setpoint –– The presentation of the Single
Input Single Output Setpoint (SISO-Setpoint) object
instance attributes and services are as indicated in Table
23.
Table 23 SISO-Setpoint Object Instance Attributes
and Services
SISO-Setpoint
Class ID = 135, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
161 Ramp Type A33
162 Ramp Rate A34
163 Ratio A35
Services
ID Service Name SDM Tag
--- No additional services defined. --
9.2.10 Assembly-MFC –– The presentation of the
Assembly Mass Flow Controller (Assembly-MFC)
object instance attributes and services are as indicated
in Table 24.
Table 24 Assembly-MFC Object Instance Attributes
and Services
Assembly-MFC
Class ID = 136, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.3 Specific Device Model For In-Situ Particle Monitor
Device — These sections detail the network mapping
required to support the Specific Device Model for In-
Situ Particle Monitor (ISPM) Devices. Table 25
summarizes the In-Situ Particle Monitor Device Object
types. Subsequent Tables 26 to 40 details the attributes
and services associated with each In-Situ Particle
Monitor Device object type.
Table 25 In-Situ Particle Monitor Device Object
Types
SDM Object
Identifier
Object Name Modbus
Class ID
ISPMD1 (DM) Device Manager 1
ISPMD2 (SAC) Sensor Actuator Controller 2
ISPMD3 Sensor-AI-LCS 137
ISPMD4 Sensor-AI-SLS 138
ISPMD5 Sensor-AI-MNS 139
ISPM16 Sensor-AI-Counter 140
ISPMD17 Assembly-ISPM#1 141
ISPMD18 Assembly-ISPM#2 142
ISPMD19 Assembly-ISPM#3 143
ISPMD20 Assembly-ISPM#4 144
ISPMD21 Assembly-ISPM#5 145
ISPMD22 Assembly-ISPM#6 146
ISPMD23 Assembly-ISPM#7 147
ISPMD24 Assembly-ISPM#8 148
ISPMD25 Assembly-ISPM#9 149
9.3.1 Device Manager (DM) –– The presentation of the
extended ISPM Device Manager (DM) object attributes
and services are as indicated in Table 26.
Table 26 DM Object Instance Attributes and
Services
Device Manager Object (DM)
Class ID = 01, Instance ID = 01
Attributes
ID Attribute Name CDM Tag
128 Gain DmA33
129 Filter Bandwidth DmA34
130 Tool State DmA35
131 Laser Status DmA36
132 Flow Path DmA37
133 Volume DmA38
134 Volume Units DmA39
135 Leak Status DmA40
136 Time Stamp DmA41
Services
ID Service Name CDM Tag
33 Laser On DmS1
35 Laser Off DmS2