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SEMI S22-1103a © SEMI 2003, 2005 34 22.5.2 Procedure — Measure the input cu rrent to the equi pment under t h e maxim um normal operating load conditions (i.e., with all motors, heaters, etc. running at manufacturer’s sp…
SEMI S22-1103a © SEMI 2003, 2005 33
22.2.2 Procedure For equipment connected to the facility branch circuit with a cord-and-plug (plug/socket
combination), ensure that the equipment is isolated (e.g., by placing the equipment on a wooden or other non-
conductive surface). Connect the equipment to its rated source of supply with the protective earthing conductor
disconnected and operate it at the least favorable conditions specified by the manufacturer. Connect the impedance
network between each accessible metal part and the protective earthing conductor. In determining accessibility of
energized parts, remove all doors, panels, etc. that are to be removed by the operator during normal operation. Using
a true RMS voltmeter, measure the voltage drop across the impedance network. Calculate the leakage current using
the formula:
I
leakage
Vo
l
tage
measured
1500 ohms
22.2.3 Acceptable Results The maximum calculated leakage current does not exceed 3.5 mA.
NOTE 59: This test is to be conducted only on cord and plug connected equipment.
22.3 Earthing Continuity and Continuity of the Protective Bonding Circuit Test
22.3.1 Test Equipment Low range ohmmeter with a range to measure 0.10 ohm with an accuracy of 1.0 percent.
The alternate test demands a low voltage current source capable of 10 Amps, a current meter to measure 10 amps
with an accuracy of 1 percent, and a voltage meter with a range to measure 0.01 Volts and an accuracy of 1 percent.
22.3.2 Procedure
Complete the test using one of the following procedures:
22.3.2.1 Disconnect the equipment from the supply. For equipment installed with fixed wiring methods, disconnect
the protective earthing conductor from the protective earthing conductor terminal. Measure the resistance between
the protective earthing terminal and each accessible metal part (handle, monitor, doors, etc.) on the equipment using
a low-range ohm-meter. Upon test completion, reconnect the protective earthing conductor to the protective
earthing conductor terminal.
22.3.2.2 Disconnect the equipment from the supply. For equipment installed with fixed wiring methods, disconnect
the protective earthing conductor from the protective earthing conductor terminal. Connect the low voltage current
source between the protective earthing conductor terminal and each accessible metal part (handle, monitor, doors,
etc.) on the equipment frame or cover. With a current of 10 amps injected, measure the voltage drop between the
equipment connection point and the protective earthing conductor terminal. Calculate the resistance by dividing the
measured voltage by the injected current. Upon test completion, reconnect the protective earthing conductor to the
protective earthing conductor terminal.
EXCEPTION: Earthing Continuity Test does not need to be conducted where accessible metal surfaces are not
likely to become energized in a single fault condition.
NOTE 60: Some standards (e.g., IEC 60204-1, IEC 61010-1) may specify this test to be performed using a current injection
method using more than 10 Amps.
22.3.3 Acceptable Results The resistance between the protective earthing conductor terminal and each accessible
part should not exceed 0.1 ohm.
22.4 Starting Current Test
22.4.1 Test Equipment None
22.4.2 Procedure — Start the equipment in accordance with manufacturer's instructions three times from a
completely stopped condition. Ensure that the time interval between successive starts is sufficient to allow the
equipment to return to ambient conditions.
22.4.3 Acceptable Results None of the equipment's overcurrent protective devices should trip during this test.
NOTE 61: It is recommended that the peak inrush starting current be measured using an appropriate current measuring device
and recorded in the test report.
22.5 Input Test
22.5.1 Test Equipment True RMS current measuring equipment, with accuracy of 3.0 percent.
SEMI S22-1103a © SEMI 2003, 2005 34
22.5.2 Procedure — Measure the input current to the equipment under the maximum normal operating load
conditions (i.e., with all motors, heaters, etc. running at manufacturer’s specified maximum loading conditions).
22.5.3 Acceptable Results The measured current does not exceed 110 percent of the rated full load current value
specified on the equipment nameplate.
22.6 Dielectric Test
22.6.1 Test Equipment Timer with accuracy of 5 seconds. Dielectric Withstand Tester with means of
indicating test potential, as well as an audible or visual indicator of dielectric breakdown, or an automatic-reject
feature for any unacceptable unit. In an alternating current test, the test equipment should include a transformer
having sinusoidal output. This transformer should have a rating of 500 VA or greater unless it is provided with a
voltmeter that directly measures the applied output potential.
22.6.2 Procedure — With the equipment disconnected from its supply, apply a dielectric withstand potential of
1500 Volts AC or 2121 Volts DC between energized metal parts of the primary circuit(s) and dead metal parts.
Surge suppression components and devices, and electronic components certified by an accredited testing laboratory
that may be damaged may be disconnected from the circuit for this test. For this test, the following conditions need
to be set:
a) the equipment should be at its maximum operating temperature;
b) switches should be placed in the “on” position; and
c) circuits through contactors should be completed by manually engaging the contacts or bypassing the contactor
terminals.
22.6.2.1 Achieve the test potential gradually, starting from zero and holding at the maximum value for a period of
one minute.
EXCEPTION: Where line-to-earth filter components are installed in the equipment, the DC dielectric potential
specified above may be used as an equivalent.
NOTE 62: An earthed conductor (neutral), if used in the circuit, is considered to be an energized conductor.
22.6.3 Acceptable Results The equipment does not have a dielectric breakdown.
NOTE 63: Breakdown is often indicated by an abrupt decrease or nonlinear advance of voltage as the voltage is increased.
Similarly, a breakdown is often indicated by an abrupt increase in current. Partial discharge (corona) and similar phenomena are
disregarded during application of the test voltage.
22.7 Strain Relief Test Either Procedure One or Procedure Two may be used to demonstrate compliance to this
test.
22.7.1 Test Equipment Timer with accuracy of 5 seconds. A calibrated weight to apply a force of 156
Newtons (35 lb) 1.56 Newtons (0.35 lb). A supporting surface on which to secure the equipment.
22.7.2 Procedure One
22.7.2.1 For cord-and-plug connected equipment, strain relief is provided to prevent mechanical stress such as a
pull or twist being transmitted to terminals, splices or interior wiring. Support the equipment on a surface so it will
not move when the force is applied to the cord. Apply a direct pull of 156 N (35 pounds) to the equipment supply
cord from the least favorable angle. If necessary, use pulleys or other means to adjust the angle of force applied to
the strain relief on the equipment. Apply the force gradually by slowly suspending the weight on the cord and
maintain the applied force for a period of one minute.
22.7.2.2 Acceptable Results For Procedure One The equipment supply cord does not displace to the extent that
stress could be applied to the internal connections.
22.7.3 Procedure Two
22.7.3.1 Support the equipment on a surface so it will not move when the force is applied to the cord. Disconnect
the internal connections for the cord. Mark the external portion of the cord with tape where it meets the strain relief.
Apply a direct pull of 156 N (35 pounds) to the equipment supply cord from the least favorable angle. If necessary,
SEMI S22-1103a © SEMI 2003, 2005 35
use pulleys or other means to adjust the angle of force applied to the strain relief on the equipment. Apply the force
gradually by slowly suspending the weight on the cord and maintain the applied force for a period of one minute.
22.7.3.2 Acceptable Results For Procedure Two — No displacement of the tape demonstrates an acceptable result.
22.8 Transformer Output Short Circuit Test
22.8.1 Test Equipment Timer with accuracy of 5 minutes. A substantial conductor suitable for carrying the
short circuit current.
22.8.2 Procedure — With the equipment in its standby condition, short circuit the output of each power
transformer.
NOTE 64: If overcurrent protection is connected to the output of the transformer under test, connect the short-circuit jumper
after this protective device.
EXCEPTION 1: Where the overcurrent protective devices on the input or output of the transformer are rated at not
more than 125 percent of the rated current of the transformer respectively and the overcurrent protective devices are
certified by an accredited testing laboratory, the transformer need not be subjected to this test.
EXCEPTION 2: A thermally-protected or impedance-protected transformer that is certified by an accredited testing
laboratory need not be subjected to this test.
22.8.3 Acceptable Results A hazardous condition (e.g., smoke, fire, or molten material) does not exist within 8
hours or before activation of overcurrent protection, thermal protection, or other protective circuit/device, whichever
occurs first.
22.9 Power Supply Output Short Circuit Test
22.9.1 Test Equipment Timer with accuracy of 5 minutes. A substantial conductor suitable for carrying the
short circuit current.
22.9.2 Procedure — With the equipment in its standby condition, short circuit the output of each power supply, one
at a time.
NOTE 65: If overcurrent protection is connected to the output of the power supply under test, connect the short circuit jumper
after this protective device.
EXCEPTION: A power supply that is certified by an accredited testing laboratory and used in accordance with its
certification and the manufacturer’s instructions need not be subjected to this test.
22.9.3 Acceptable Results A hazardous condition (e.g., smoke, fire, or molten material) does not exist within 8
hours or before activation of overcurrent protection, thermal protection, or other protective circuit/device, whichever
occurs first.
22.10 Safety Circuit Function Test
22.10.1 Test Equipment Contingent on safety devices being tested.
22.10.2 Procedure Functionally test each safety circuit by actuation and resetting.
22.10.3 Acceptable Results The following sections provide the acceptable results for the applicable safety
systems:
a) When the EMO is actuated, all hazardous voltage and all power greater than 240 volt-amps in the equipment
beyond the main power enclosure should be de-energized, except where permitted by ¶13.3.3.
b) Actuation of the emergency stop and safety interlocks causes the equipment, or relevant parts of the
equipment, to be automatically brought to a safe condition.
c) Resetting of the safety circuit should not cause the system to resume operation.
NOTE 66: This test documents the electrical functionality of the safety circuit(s). It is not intended to determine or document
the appropriateness of the shutdown actions taken.
22.11 Safety Circuit Conductor Disconnection Test