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SEMI C46-0699 © SEMI 1991, 1999 25% TETR AMETHYLA MMONIUM HYDROXID E 2 Table 1 Impurity Limits and Other Requirements f or 25 % Tetrameth y lammonium H y droxide Previ ous SEMI Reference # C 7.14-91 Tier A (Guide line) A…

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25% TETRAMETHYLAMMONIUM HYDROXIDE SEMI C46-0699 © SEMI 1991, 19991
SEMI C46-0699
GUIDELINE FOR 25% TETRAMETHYLAMMONIUM HYDROXIDE
This guideline was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C7.14 in its entirety. Originally published in
1991.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for 25% tetramethylammonium hydroxide
used in the semiconductor industry and testing
procedures to support those standards. Test methods
have been shown to give statistically valid results. This
document also provides guidelines for grades of 25%
tetramethylammonium hydroxide for which a need has
been identified. In the case of the guidelines, the test
methods may not have been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of 25%
tetramethylammonium hydroxide used in the
semiconductor industry.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Not applicable.
7 Requirements
7.1 The requirements for 25% tetramethylammonium
hydroxide for Tier A are listed in Table 1.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
SEMI C46-0699 © SEMI 1991, 1999 25% TETRAMETHYLAMMONIUM HYDROXIDE2
Table 1 Impurity Limits and Other Requirements for 25% Tetramethylammonium Hydroxide
Previous SEMI Reference # C7.14-91
Tier A
(Guideline)
Assay (wt %) 25.0 ± 0.1
Carbonate (as CO
3
2) 300 ppb max
Total Halides (as Cl
-1
) 5 ppb max
Color (APHA) 10 max
Aluminum (Al) 10 ppb max
Antimony (Sb) 10 ppb max
Arsenic (As) 10 ppb max
Barium (Ba) 10 ppb max
Beryllium (Be) 10 ppb max
Bismuth (Bi) 10 ppb max
Boron (B) 10 ppb max
Cadmium (Cd) 10 ppb max
Calcium (Ca) 10 ppb max
Chromium (Cr) 10 ppb max
Cobalt (Co) 10 ppb max
Copper (Cu) 10 ppb max
Gallium (Ga) 10 ppb max
Germanium (Ge) 10 ppb max
Gold (Au) 5 ppb max
Iron (Fe) 5 ppb max
Lead (Pb) 10 ppb max
Lithium (Li) 10 ppb max
Magnesium (Mg) 10 ppb max
Manganese (Mn) 10 ppb max
Molybdenum (Mo) 10 ppb max
Nickel (Ni) 10 ppb max
Potassium (K) 5 ppb max
Silver (Ag) 10 ppb max
Sodium (Na) 5 ppb max
Strontium (Sr) 10 ppb max
Thallium (Tl) 10 ppb max
Tin (Sn) 10 ppb max
Zinc (Zn) 10 ppb max
Zirconium (Zr) 10 ppb max
Particles in bottles:
size, #/mL
≥0.5 µm, 50 max
SEMI C46-0699 © SEMI 1991, 19993
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
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compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
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