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SEMI D11-95 © SEMI 1995, 2003 3 Figure 1 FPD Substrate Cassette (Detail View)

SEMI D11-95 © SEMI 1995, 2003 2

4.2.11 mizo base — the innermost portion of a mizo.

4.2.12 mizo centerline — 1/2 the mizo clearance.

4.2.13 mizo clearance — the minimum dimensions

between two adjacent mizo teeth, into which a substrate

can be placed.

4.2.14 mizo depth — the distance between the base of

the mizo and the top of the tooth. It is also called ‘tooth

height.’

4.2.15 mizo flat — the distance along the mizo base

between two adjacent mizo teeth.

4.2.16 mizo opening width — the distance between the

extreme ends of two adjacent mizo teeth.

4.2.17 mizo pitch — the distance between adjacent

mizo centerlines.

4.2.18 mizo plate — a plate that contains mizo for

supporting glass substrates.

4.2.19 mizo plate space — the distance between

adjacent mizo plates. It is used in the alignment of

substrates after loading.

4.2.20 mizo size — the distance between opposite mizo

bases.

4.2.21 substrate clearance — the difference between

the substrate width and the mizo size.

4.2.22 substrate load depth — the shortest distance

between the front surface of the cassette and the front

surface of the substrate stops.

4.2.23 substrate stop — a portion of the cassette,

located at the cassette rear, that provides a mechanical

stop for substrates during their insertion.

4.2.24 tooth — the protrusion, on the inner surface of

the mizo-pocket plate, that contains the mizo shape.

4.2.25 tooth height — see “mizo depth.”

5 Cassette Specification

5.1 An FPD substrate cassette contains the following

items:

5.1.1 One cassette bottom plate.

5.1.2 One cassette top plate.

5.1.3 One or more substate stops. A mizo plate may be

used as a substrate stop.

5.1.4 Three or more mizo plates.

5.2 Capacity — Two or more substrates.

5.3 Dimensions and Tolerances — To be agreed upon

between supplier and user. The following table and

figures explain application of the above definitions and

located related dimensions.

5.4 Material — To be agreed upon between supplier

and user. Construction may be of one or more molded

or machined parts.

Table 1 Cassette Designations

Symbol Description

A1 Outer height

A2 Outer width

A3 Outer length

B1 Mizo per plate

B2 Mizo pitch

B3 The distance between the first mizo centerline and

the last mizo centerline

B4 Substrate load depth

B5 The distance between the cassette rear and the

inside surface of the substrate stop

B6 The distance between the cassette front and the

front edge of the substrate

C1 Mizo opening width

C2 Mizo depth

C3 Mizo clearance

C4 Mizo size

C5 Tooth size

C6 Substrate clearance

D1 First mizo dimension

D2 First mizo clearance

D3 Thickness of the cassette bottom plate

D4 Thickness of the cassette top plate

D5 Inner height

D6 Width of mizo plate space

Figure 1

FPD Substrate Cassette (Detail View)

Figure 2

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