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SEMI E92-0302 E © SEMI 1999, 2003 8 Top View Facial d atum plane (Undock position) Bilateral datum plane Front View Side View Horizonta l datum plane z110 =10 ±1 z112 ≥ 15 z107 =480 ± 1 ISO M8x 16H Thread for locking scr…

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SEMI E92-0302
E
© SEMI 1999, 2003 7
BOLTS/Light Plane
Rear View
z101
=402 ±1
z102
=478 ±1
Seal zone (side
interface
feature)
Floor
Horizontal
datum plane
(E15.1_H)
z109
=402 ±2
z107
=480 ±1
z111
=45 ±2
y110
(E63-y76)
y102
≥
80
y103
≥
3
y101
=170 ±2
Side View
(E15.1_D)(E15.1_D1)
z103
≥
394
z108
=45 ±2
z105
≥
470
Reserved space when
door is opening or
closing
Reserved space when
door is closed
Bilateral datum plane
Facial datum plane
(Undock position)
x101=200 ±1
x103=207± 1
z103
≥
394
z105
≥
470
z106=471±1
x102
≥
199
y112
≥
31
Top
View
x101
=200 ±1
x102
≥
199
(E15.1_D1)
(E15.1_D)
y110 (E63_y76)
y111
=220 ±2
x108
=207 ±1
Bilateral
datum plane
y101
=170 ±2
Facial datum plane
(Undock position)
y102
≥
80
y103
≥
3
Docked Facial datum plane
(Docked position)
BOLTS/Light Plane
Docked Facial datum
plane (Docked position)
Door seal exclusion volume
BOLTS/Light
opening exclusion
volume
Permanent reserved
space
Loader
exclusion
volume
The loader bottom flange
exclusion volume (see Fig.3)
z104=395±1
Figure 2
Top, Rear, and Side Views of BOLTS/Light Exclusion Volume and Equipment Side of the Side Interface
Feature
SEMI E92-0302
E
© SEMI 1999, 2003 8
Top View
Facial datum plane
(Undock position)
Bilateral
datum plane
Front View
Side View
Horizontal
datum plane
z110
=10 ±1
z112
≥
15
z107
=480 ±1
ISO M8x16H
Thread for locking screws (4x)
d1=12 ±0.05(PIN 2x)
y106
=180 ±0.05
y109
=110 +0/-5
y107
=100 ±0.3
y108
=100 ±0.3
Seal zone
y104
=200 +0/-10
y105
=220 +0/-10
x104=235 ±2
x105=200 ±2
x106
=220 ±0.05
x107
=175 +5/-0
[E15.1_D]
Facial datum plane
(Undock position)
Bilateral
datum plane
d1=12 ±0.05(PIN 2x)
x106
=220 ±0.05
y105
=220 ±10
x108
= 207±1
x109
≥
235
y115
≥
220
z113
≥
30
y116
≥
200
Seal zone
the loader
bottom flange
exclusion volume
the loader bottom
flange exclusion volume
Figure 3
Equipment Side of the Bottom Interface Feature
SEMI E92-0302
E
© SEMI 1999, 2003 9
Positioning
Pin
BOLTS/Light Plane
Anti-rotation
Pin
TOP VIEW
Figure 4
Usage of Loader Locating Pins
Table 1 Dimensions for Light-Weight and Compact Box Opener/Loader to Tool Standard (BOLTS/Light)
Interface
Symbol Value Specified Datum Measured from Feature Measured to
σ1
0 ± 0.1° Facial and horizontal
datum planes
Perpendicularity of seal zone.
σ2
0 ± 0.1° Horizontal datum plane Parallelism of bottom interface plane.
d1 12 ± 0.05 mm - Loader locating pin diameter.
r100 1 mm maximum not applicable All concave features. (radius)
r101 2 mm maximum not applicable All required convex features. (radius)
x101 200 ± 1 mm Bilateral datum plane Edge of hole opening and inside edge of seal zone.
x102 199 mm minimum Bilateral datum plane Encroachment of equipment on the sides of the reserved spaces inside
the equipment.
x103 207 ± 1 mm Bilateral datum plane Outside edge of seal zone.
x104 235 ± 2 mm Bilateral datum plane Outside edge of bottom interface plane.
x105 200 ± 2 mm Bilateral datum plane Inside edge of bottom interface plane.
x106 220 ± 0.05 mm Bilateral datum plane Center of positioning pin location and tightening locking screw
location.
x107 175 +5/-0 mm Bilateral datum plane Outside edge of control connection area.