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SEMI S13-0305 © SEMI 1998, 2005 9 RELATED INFORMATION 1 LAWS AND REGULATIONS NOTICE : This relat ed information is not an offi cial part of SEMI S1 3 and was deri ved from the work of the SEMI S13 Revisio n Task Force. T…
SEMI S13-0305 © SEMI 1998, 2005 8
APPENDIX 1
DOCUMENT CRITERIA RELATING TO SEMI S2
NOTICE: The material in this Appendix is an official part of SEMI S13 and was approved by full letter ballot
procedures on November 24, 2004.
NOTE 1: Documentation criteria described in §A1-2 regarding safety interlock systems are part of conformance criteria to this
guideline.
A1-1 Purpose of this Appendix
A1-1.1 This appendix contains criteria for documents that relate to technical criteria that are presented in SEMI S2.
A1-1.2 The criteria in this appendix are not included in SEMI S2 as of the time this Appendix was written, but are
included herein as criteria for determining whether the documents provided to the equipment user conform to SEMI
S13.
A1-1.3 The criteria in this appendix were included in SEMI S13-0298.
A1-1.4 The criteria in this appendix are arranged to correspond with the sections of SEMI S2.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this appendix be incorporated in a
future revision of SEMI S2 and that this appendix be removed from SEMI S13 by revising SEMI S13 with the same effective
date as the effective date of the addition of these criteria to SEMI S2.
A1-2 Safety Interlock Systems
A1-2.1 The equipment supplier should describe the safety interlock systems provided for the equipment and their
operation in a list or similar format in the documents provided to the equipment user. Each interlock system
description should include at least the hazard for which the interlock system is provided, the detection methods
utilized, and equipment condition after the interlock system is activated.
A1-2.2 The locations of safety interlock sensors (e.g. door switches, pressure sensors, gas detectors) should be
clearly indicated using a layout sketch.
SEMI S13-0305 © SEMI 1998, 2005 9
RELATED INFORMATION 1
LAWS AND REGULATIONS
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision Task Force. This related information was approved for publication by a letter ballot on November 24,
2004.
R1-1 Laws and Regulations
R1-1.1 The contents of this section should be addressed in the terms and conditions of sale or other contractual
agreements between the supplier and user. The following information may be included in the documents provided
to the equipment user.
R1-1.2 Relevant Administrative Laws and Regulations — These may include laws and regulations relevant to
installation, operation, maintenance, and decommissioning of the equipment.
R1-1.2.1 The supplier may describe, in the documents provided to the equipment user, the laws and regulations
related to EHS of the user’s jurisdiction relevant to operation, maintenance, and supervision of the system.
R1-1.2.2 The supplier may describe the measure of support by the supplier for the implementation of laws and
regulations related to EHS after delivery of the equipment.
NOTE 1: It is recommended that equipment supplier and equipment user jointly investigate the laws and regulations of the
jurisdiction where the equipment is to be used, and they incorporate these requirements into the purchase specification. In
addition, the supplier has a right to describe the laws and regulations considered, and means of compliance implemented, during
the development and production of the equipment.
R1-1.3 Issues Regarding Product Liability (PL)
R1-1.3.1 The supplier may describe the following in the documents provided to the equipment user to ensure
mutual understanding of the issues regarding product liability for the equipment:
R1-1.3.1.1 How a field retrofit is announced and implemented.
R1-1.3.1.2 How to notify discontinuance information of the equipment production to the equipment user and what
repair and maintenance services are available after discontinuation of production of the equipment.
R1-1.3.1.3 How parts should be handled by the user for the transport for repair.
R1-1.3.1.4 The equipment supplier should describe, in the documents provided to the equipment user, the
possibility of not being able to carry out servicing for reasons of safety and health of the dispatched personnel, if the
equipment user refuses to disclose the names and contents of materials being used, for reasons of confidentiality or
trade secret protection.
R1-1.3.1.5 The limit of the responsibility of the equipment supplier when the equipment user transports, reuses,
resells, or modifies the equipment without the equipment supplier’s agreement.
R1-1.3.1.6 The responsibility with regard to the parts designed by the equipment user without the approval of the
equipment supplier.
SEMI S13-0305 © SEMI 1998, 2005 10
RELATED INFORMATION 2
DOCUMENT CRITERIA INCLUDED IN SEMI S2
NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S2. This
related information was approved for publication by a letter ballot on November 24, 2004.
R2-1 Purpose of this Related Information
R2-1.1 This related information contains criteria for documents that are presented in SEMI S2.
R2-1.2 The criteria in this related information are included in SEMI S2 as of the time this related information was
written, and are included herein for the convenience of users of this document.
NOTE 1: The information in this related information may not be current with the source document. The source document
contains the actual documentation criteria.
R2-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S2.
NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate
future revisions of SEMI S2 related to criteria for documents.
R2-2 Safety Interlock Systems
R2-2.1 SEMI S2-0703, ¶11.7.2.2 — If a safety interlock is defeated, the maintenance manual should identify
administrative controls to safeguard personnel or to minimize the hazard.
R2-3 Emergency Shutdown
R2-3.1 In case assemblies that are not intended to be used as stand-alone equipment and EMO circuit is not
necessary in the assemblies of the equipment, assembly’s installation manual should provide clear instructions to the
equipment installer to connect the assembly to the integrated system’s emergency off circuit, (based on SEMI S2-
0703, ¶12.1).
R2-3.1.1 SEMI S2-0703, ¶12.1.1 — If the supplier provides an external EMO interface on the equipment, the
supplier should include instructions for connecting to the interface.
R2-4 Electrical Design
R2-4.1 SEMI S2-0703, ¶13.3 — Routine Type 4 tasks, excluding troubleshooting, should have specific written
instructions in the maintenance manuals.
R2-4.2 SEMI S2-0703, ¶13.4.9 — The current interrupting capacity (also known as amperes interrupting capacity,
or AIC) of the equipment main disconnect should be identified in the facility installation and maintenance manuals.
R2-4.3 SEMI S2-0703, ¶13.5.1 — Whenever a UPS is provided with the equipment, its location and wiring should
be clearly described within the installation and maintenance manual.
R2-5 Seismic Information
R2-5.1 SEMI S2-0703, ¶19.3 — The supplier should provide the following data and procedures to the user. This
information should be included in the installation instructions as part of the documentation covered in §9.
A drawing of the equipment, its support equipment, its connections (e.g., ventilation, water, vacuum, gases) and
the anchorage locations identified in ¶19.4.
The type of feet used and their location on a base frame plan drawing.
The weight distribution on each foot.
Physical dimensions, including width, length, and height of each structurally independent module.
Weight and location of the center of mass for each structurally independent module.
Acceptable locations on the equipment frame for anchorage.