semi合集-English.pdf - 第5602页

SEMI P10-0705 © SEMI 1990, 2005 97 < x s : e l e m e n t n a m e = " R e g i s t r R e l a t i v e R e f e r e n c e O n l y " t y p e = " x s : b o o l e a n " m i n Oc c u r s = " 0 " /…

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SEMI P10-0705 © SEMI 1990, 2005 96
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Regist rRe sidua lRe fe re nce Only"
type
= " xs:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent nam e= "Regist rThr ee Sigm a" >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Regist rThre e Sigm a Refer enceOnly"
type
= " x s:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent nam e= "Regist rResidua lThr eeSigm a ">
- < xs: com plexType
>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent
nam e= " Regist rResidua lThree Sigm a Re fere nce On ly"
type
= " xs:boolean" m inOccurs= "0 " / >
< / xs: sequence>
< xs: elem ent nam e= "Regist rTole ran ce" t ype= "xs:dou ble
"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Regist rOrt ho" t ype= "x s:double " / >
< xs: elem ent nam e= "Regist rOrt hoRe fere nceOnly"
type
= " xs:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Regist rRela t ive" t ype= "x s:st ring" / >
SEMI P10-0705 © SEMI 1990, 2005 97
< xs: elem ent nam e= "Regist rRe la t iveRe fere nce On ly"
type
= " x s:boolean" m inOccurs= "0 " / >
< / xs: sequence>
< xs: elem ent nam e= "Mea sure dRegist r M ar k "
type
= " M ea suredRe gist rM a r k Type" m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Mea sure dRegist r Error "
type
= " x s:dou ble" m inOccurs= " 0 " / >
- < xs: elem ent nam e= "Mea sure dRe gist r Sca le " m inOccurs= "0 ">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iVa lue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dRe gist r Thre e Sigm a"
m inOccurs
= " 0 " >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "
2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dRe gist r Residua l"
m inOccurs
= " 0 " >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dRe gist r Re sidua lThre e Sigm a"
m inOccurs
= " 0 " >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
SEMI P10-0705 © SEMI 1990, 2005 98
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dRe gist r Tole ran ce">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dRe gist r M inim um " >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
-
< xs: elem ent nam e= " M e asur edRe gist rMa x im um ">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " xs:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Mea sure dRegist r Ort ho"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sure dRegist r Relat ive
"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sure dRegist r FileN a m e "
type
= " x s:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>