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SEMI E127-0705 © SEMI 2003, 2005 4 1 Purpose 1.1 Inte grated Measurement 1.1.1 The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring t hrough rapid access to …
SEMI E127-0705 © SEMI 2003, 2005 3
Table 17 IMM Converted Data Table Object Attribute Definitions............................................................................37
Table 18 Event Variables for Conversion Data Table Object......................................................................................37
Table 19 IMM Calibration Data Table Object Attribute Definitions ..........................................................................38
Table 20 Data Table Object Attribute Definitions.......................................................................................................39
Table 21 Data Row Attribute Definitions....................................................................................................................39
Table 22 Data Row Template Attribute Definitions....................................................................................................40
Table 23 Data Information Attribute Definitions ........................................................................................................40
Table 24 Assurance Element Definitions ....................................................................................................................41
Table 25 Additional Substrate Attribute Definitions...................................................................................................42
Table 26 List of Services.............................................................................................................................................43
Table 27 Definitions for Parameters and Parameter Elements ....................................................................................43
Table 28 Definitions for RetentionRule Parameter Elements......................................................................................44
Table 29 Valid ErrorCode Enumerations ....................................................................................................................45
Table 30 ClientConnect Service Parameters................................................................................................................45
Table 31 ClientDisconnect Service Parameters...........................................................................................................46
Table 32 RequestRetentionConditions Service Parameters.........................................................................................46
Table 33 Parameters for ChangeService......................................................................................................................46
Table 34 SetAutoTableSend Service Parameters ........................................................................................................46
Table 35 SetRetentionConditions Service Parameters.................................................................................................46
Table 36 TransferPathCalibration Service Parameters................................................................................................47
Table 37 XfrCmdListRequest Service Parameters ......................................................................................................47
Table 38 XfrCommand Service Parameters ................................................................................................................47
Table 39 XfrHalt Service Parameters ..........................................................................................................................47
Table 40 XfrVerify Service Parameters.......................................................................................................................48
Table 41 List of Client Services ..................................................................................................................................48
Table 42 IMMC Compliance.......................................................................................................................................48
SEMI E127-0705 © SEMI 2003, 2005 4
1 Purpose
1.1 Integrated Measurement
1.1.1 The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process
monitoring through rapid access to measurement data, reduce material handling between process and measurement
equipment, and the opportunity to increase process monitoring with minimal or no decrease in throughput. The
benefits of integrated measurement also allow Advanced Process Control systems to use the results with reduced
feedback lag time.
1.2 Specification for the Integrated Measurement Module Communications (IMMC)
1.2.1 The purpose of the IMMC specification is to provide an object-based specification of an Integrated
Measurement Module together with a standard interface between an integrated measurement module and its control
and data ports where these are commonly implemented by different suppliers. The interface allows access to the
properties and services of specific objects. This will facilitate the effort needed for the integration of the module into
a larger system.
1.2.2 An additional purpose of this standard is to provide sufficient information through a combination of on-line
services and interface documentation that an IMMC-compliant integrated measurement module may be integrated
with multi-module equipment without requiring a software change in either the module or the equipment. This may
require configuration changes made by the end-user through the equipment user interface where certain options are
left to the module supplier.
2 Scope
2.1 Scope of This Document
2.1.1 The Integrated Measurement Module Communications specification covers concepts, behaviors, and services
to be provided by a metrology or inspection module so that it may be integrated into production equipment intended
for large substrates processing. However, nothing should preclude its application to smaller substrate
manufacturing.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Host/Integrated Equipment Interface
3.1.1 This specification does not apply to the communications interface between the host and integrated equipment.
3.2 Object-Based Implementation
3.2.1 Compliance to this standard does not require object-oriented implementation. However, it does require the
appearance of implentation of those objects defined in this document.
3.3 In-Situ Processing
3.3.1 This specification applies only to measurement components that are contained within a module that provides
its own material handling and does not measure during a process step. Interactions with in-situ measurement
components are expected to differ significantly from the current specification.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)
SEMI E127-0705 © SEMI 2003, 2005 5
SEMI E32 — Material Movement Management (MMM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior,
and Services
SEMI E90 — Specification for Substrate Tracking
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E116 — Provisional Specification for Equipment Performance Tracking
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI M20 — Specification for Establishing a Wafer Coordinate System
4.2 Other Sources
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67, available from
http://www.omg.org/technology/documents/modeling_spec_catalog.htm.
uuid: ISO/IEC 11578:1996 Information technology - Open Systems Interconnection – Remote Procedure Call
(RPC),
http://www.iso.ch/cate/d2229.htm.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
NOTE 1: Terms defined in §5 that are used in other definitions have been underlined
.
5.1 Abbreviations and Acronyms
5.1.1 IMM — Integrated Measurement Module
5.1.2 IMMC — Specification for Integrated Measurement Module Communications: Concepts, Behavior, and
Services
5.1.3 IMMDTOSM — IMM Data Table Object State Model
5.1.4 SLOSM — Substrate Location Object State Model (SEMI E90)
5.1.5 STPO — Substrate Transfer Path Object, an abstraction of the IMM capability to load and unload substrates
into the IMM.
5.1.6 STPOSM — Substrate Transfer Path Object State Model
5.2 Definitions
5.2.1 array, n. — an ordered list of numeric values. A valid data type for table row entries.
5.2.2 conversion recipe, n. — a recipe or portion of a recipe that describes the steps required for taking
measurement data and reporting a result. This does not need to be a physically separate recipe.
5.2.3 error message, n. — a notification to the user/client that an error has occurred. It may or may not be
associated with an alarm. Note: depending upon the communication protocol, error messages may or may not be
treated differently from normal collection events.
5.2.4 inspection, n. — an examination of an area of material to detect anomalies.