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Figure 4 MFC and MF M Interface Design SEMI F36-0299 © SEMI 1999, 2004 8
Table 3 Pressure Regulator Interface Recommendations
Option 1
Pressure Regulators
Option 2
Pressure Regulators
End-to-End Lengths:
1/4-inch Integral/fixed male face seal
1/4-inch Swivel face seal (male or female)
1/4-inch Tube weld
-
70.5 mm (2.78 in.)
-
-
94 mm (3.70 in.)
-
NOTE 1: The tolerance on length for machined components is ± 0.15 mm (0.006 in.) from the component centerline to each
end. The tolerance on length for welded components is ± 0.50 mm (0.020 in.) from the component centerline to each end.
Overall Component Envelope:
Maximum height
Maximum width
180 mm (7.1 in.)
38 mm (1.5 in.)
180 mm (7.1 in.)
58 mm (2.3 in.)
Base to Centerline of Flow Path:
11 mm (0.44 in.)
± 0.3 mm (0.012 in.)
17.5 mm (0.69 in.)
± 0.3 mm (0.012 in.)
or
19 mm (0.75 in.)
± 0.3 mm (0.012 in.)
Mounting Provisions:
Threaded holes
Pattern
M5 0.8 6H; 6 mm (0.24
in.) perfect thread depth
25.4 mm (1.00 in.) bolt circle
centered on bottom of base
with two threaded holes 180°
apart and 45° off of the
vertical or horizontal axis.
One hole in each of the upper
left and lower right quadrants
when looking at the bottom of
the component.
M5 0.8 6H; 6 mm
(0.24 in.) perfect thread
depth
Two threaded holes,
centered on bottom of
base, in line with flow
path, spaced 22.5 mm
(0.88 in.) between centers
NOTE 2: The M5 0.8 threaded mounting holes will accept 1032 screws, but 1032 threaded holes will not accept M5
0.8 screws.
Fittings:
Process
1/4-inch
Control:
Manual
10 MFCs and MFMs
10.1 MFCs and MFMs should conform to the interface design recommendations appearing in Figure 4 and Table 4.
10.2 A nine pin connector was specified along with a signal for each pin to allow for MFC/MFM
interchangeability. If additional signals are required, an additional connector should be specified. If signals are
different, an alternate connector should be specified.
10.3 Current technology limits the MFC and MFM base-to-centerline dimension to 12.7 mm (0.50 in.). If future
technologies permit, 11 mm (0.44 in.) should be considered as an option for the base-to-centerline dimension. This
recommendation would improve modularity by permitting selection of each component type with a common base-
to-centerline dimension.
SEMI F36-0299 © SEMI 1999, 2004 7
Figure 4
MFC and MFM Interface Design
SEMI F36-0299 © SEMI 1999, 2004 8
Table 4 MFC and MFM Interface Recommendations
Option 1
MFC and MFM
Option 2
MFC and MFM
End-to-End Lengths:
1/4-inch Integral/fixed male face seal
1/4-inch Swivel face seal (male or female)
1/4-inch Tube weld
124 mm (4.88 in.)
-
-
106 mm (4.17 in.)
-
-
NOTE 1: The tolerance on length is ± 0.50 mm (0.020 in.) from the component centerline to each end.
Overall Component Envelope:
Maximum height
Maximum width
180 mm (7.1 in.)
38 mm (1.5 in.)
Base to Centerline of Flow Path:
12.7 mm (0.50 in.)
± 0.3 mm (0.012 in.)
Mounting provisions:
Threaded holes
Pattern
M4 0.7 6H; 3 mm (0.12 in.) minimum perfect thread depth
42 mm (1.65 in.) bolt circle centered on bottom of base with two
threaded holes 180° apart and 45° off of the vertical or horizontal
axis.
One hole in each of the upper left and lower right quadrants when
looking at the bottom of the component.
Fittings:
Process
1/4-inch
Electrical
9-pin sub-D connector
Analog signal pin out as follows:
Pin 1. Valve Closed (Ground Pin to Close Valve)
Pin 2.
05 V
DC
Flow Signal Output
Pin 3. +15 V
DC
Power Supply
Pin 4. Power Common
Pin 5. -15 V
DC
Power Supply
Pin 6.
05 V
DC
Setpoint Input
Pin 7. Output Common
Pin 8. Setpoint Common
Control:
Pin 9. Valve Test Point
SEMI F36-0299 © SEMI 1999, 2004 9