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SEMI P22-0699 © SEMI 1993 , 1999 6 Figure 21 Figure 22 Missing Opaque Pattern Missing Clear Pattern S1 S2 Figure 23 Figure 24 Dot Rando mly Shaped Edge Extension Ran domly Shape d Figure 25 Figure 26 Misplace ment On Opa…

SEMI P22-0699 © SEMI 1993, 19995

Figure 15 Figure 16

Truncation On Opaque Pattern Truncation On Clear Pattern

Figure 17 Figure 18

Misplacement On Opaque Pattern Misplacement On Clear Pattern

Figure 19 Figure 20

Transmission Defect On Clear Pattern Transmission Defect On Opaque Pattern

SEMI P22-0699 © SEMI 1993, 1999 6

Figure 21 Figure 22

Missing Opaque Pattern Missing Clear Pattern

Figure 23 Figure 24

Dot Randomly Shaped Edge Extension Randomly Shaped

Figure 25 Figure 26

Misplacement On Opaque Pattern Opaque Bridge

SEMI P22-0699 © SEMI 1993, 19997

Figure 27 Figure 28

Corner Extension Randomly Shaped Corner Intrusion Randomly Shaped

Figure 29 Figure 30

Corner Extension Randomly Shaped Corner Intrusion Randomly Shaped

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