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SEMI MF1569-0705 © SEMI 2003, 2005 5 6.7 Prepare guide for gene ration of multiple sets of refere nce materials traceable to the ConRefs generated by the ILS (see Appendix 1) . 7 Keywords 7.1 certified re ference materia…
SEMI MF1569-0705 © SEMI 2003, 2005 4
6.1.1.3 Draft test method.
6.1.1.4 Obtain consensus within a representative task group or subcommittee.
6.2 Design and initiate the Interlaboratory Study (ILS).
6.2.1 Design the experiment in accordance with the principles of ASTM Practice E 691, taking into account
whether the test is destructive or nondestructive.
6.2.2 Prepare an interlaboratory test protocol that specializes the test method to this design and also includes a
provision for reporting deviations from the method if participants in the interlaboratory test are unable to follow the
test method exactly.
6.2.3 Select, qualify, and prepare materials for the interlaboratory test, paying particular attention to issues of
uniformity, stability, storage, transportation, and handling.
6.2.4 Qualify instrumentation in accordance with test method and applicable quality control practices.
6.2.5 Select and qualify participating laboratories.
6.3 Execute the interlaboratory experiment.
6.3.1 Collect the data in a round-robin or hub-and-spoke mode.
6.3.2 Analyze the data collected in accordance with Practice E 691 to establish the repeatability and reproducibility
of the test.
6.3.3 Derive an appropriate “uncertainty” from the results of the analysis and incorporate the repeatability and
reproducibility into “Precision” and “Bias” sections for the test method.
6.4 Evaluate test results against the preselected criteria (see ¶6.1).
6.4.1 If the result is acceptable, proceed to ¶6.5.
6.4.2 If the result is not acceptable, assess the validity of the test method and the usefulness of the generated
materials. Consider whether the test method may need to be revised or the ILS repeated with improved controls on
the procedures used.
6.5 Prepare a Research Report.
6.5.1 Include the following information in the research report:
6.5.1.1 Description of the nature, purpose, and application of the ILS.
6.5.1.2 Identification of the test method evaluated.
6.5.1.3 Detailed instructions for carrying out the test method including any special conditions or requirements for
the test and any special requirements regarding the nature, transmission, and storage of the test materials.
6.5.1.4 List of participating laboratories.
6.5.1.5 Data report forms.
6.5.1.6 Statistical data summary.
6.5.1.7 Summary of results and conclusions.
6.5.2 Reference the research report in the appropriate test method.
6.5.3 Consider preparing a technical paper to report the results of the ILS.
6.6 Determine disposition of materials.
6.6.1 If the results of the ILS are considered acceptable, establish an appropriate repository for the ConRefs
generated.
6.6.2 Establish the protocol for storage and handling of the ConRefs and the ground rules for future use in
developing other reference materials.
SEMI MF1569-0705 © SEMI 2003, 2005 5
6.7 Prepare guide for generation of multiple sets of reference materials traceable to the ConRefs generated by the
ILS (see Appendix 1).
7 Keywords
7.1 certified reference material; consensus reference material; flat panel display; interlaboratory experiment;
reference material; semiconductor; silicon; sputtering target; working reference material
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APPENDIX 1
GENERATION OF MULTIPLE SETS OF REFERENCE MATERIALS
NOTICE: The material in this appendix is an official part of SEMI MF1569. Approval was by full letter ballot
procedures with publication authorized by the ISC Audits & Review Subcommittee on April 7, 2005.
A1.1 This guide describes a methodology for generating a single set of reference materials from a test procedure.
Replication of this set requires additional procedures for generating multiple sets of reference materials from other
materials such as the ConRefs. Therefore, another procedure is required; this procedure is of the type used by
laboratories that generate certified reference materials and is generally specific to the particular material or property.
A1.2 The guide for generation of multiple sets of reference materials should include information on the following
topics:
A1.2.1 Terminology specific to the property or material,
A1.2.2 Reagents as needed for preparation of the materials,
A1.2.3 Hierarchy of available reference materials including CRMs and ConRefs,
A1.2.4 Description of test instrumentation,
A1.2.5 Qualification of test instrumentation,
A1.2.6 Selection and qualification of materials,
A1.2.7 Preparation of materials,
A1.2.8 Procedures for assigning property values,
A1.2.9 Deliverable documentation,
A1.2.10 Application of the reference materials,
A1.2.11 Operator training for generation or use (or both) of the reference materials, and
A1.2.12 Keywords.
A1.3 Include test analyses and raw data values in related information sections, as required.
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