semi合集-English.pdf - 第7013页

SEMI S13-0305 © SEMI 1998, 2005 12  instructions for energy isolatio n (“ lockout/tagout”) (refer to ¶17.2);  descriptions of the emergency off (EMO ) and interlock fu nctions;  a list of hazardous materials (e.g., lu…

100%1 / 7923
SEMI S13-0305 © SEMI 1998, 2005 11
R2-6 Environmental Information
R2-6.1 SEMI S2-0703, ¶9.4 — The manufacturer should provide the user with the following environmental
documentation as applicable:
R2-6.1.1 ¶9.4.1 — Energy consumption information, including idle, average, and peak operating conditions, for the
manufacturer’s most representative (“baseline”) process.
R2-6.1.2 ¶9.4.2 — Mass balance, including idle, average, and peak operating conditions, for the manufacturer’s
most representative (“baseline”) process.
NOTE 3: The mass balance may include resource consumption rates, chemical process efficiencies, wastewater effluent and air
emission characterization, solid and hazardous waste generation (quantity and quality), and by-products.
R2-6.1.3 ¶9.4.3 — Information regarding routes of unintended release (of effluents, wastes, emissions, and by-
products) and methods and devices to monitor and control such releases. This should include information on
features to monitor, prevent, and control unintended releases (see ¶21.2.4).
R2-6.1.4 ¶9.4.4 — Information regarding routes of intended release (of effluents, wastes, and emissions) and
features to monitor and control such releases (see ¶21.2.5).
R2-6.1.5 ¶9.4.5 — A list of items that become solid waste as a result of the operation, maintenance, and servicing
of the equipment, and that are constructed of or contain substances whose disposal might be regulated (e.g.,
beryllium-containing parts, vapor lamps, mercury switches, batteries, contaminated parts, maintenance wastes).
R2-7 Exhaust Ventilation
R2-7.1 SEMI S2-0703, ¶22.3 — Documentation should be developed showing the equipment exhaust parameters
and relevant test methods, and should include (see also Appendix 2):
duct velocity (where needed to transport solid particles);
volumetric flow rate Q;
capture velocity (where airborne contaminants are generated outside an enclosure);
face velocity (where applicable);
hood entry loss factor F
h
or K;
coefficient of entry C
e.
;
hood static pressure SP
h
;
duct diameter at the point of connection to facilities; and
location(s) on the duct or hood where all ventilation measurements were taken.
R2-8 Manuals
R2-8.1 SEMI S2-0703, ¶9.6
R2-8.1.1 ¶9.6.1 — The supplier should provide the user with manuals based on the originally intended use of the
equipment. The manuals should describe the scope and normal use of the equipment, and provide information to
enable safe facilitization, operation, maintenance, and service of the equipment.
R2-8.1.2 ¶9.6.2 — The manuals should conform to SEMI S13.
NOTE 4: Fire suppression agents, and chemicals used to test fire detection or suppression systems, fall under the MSDS
provisions of SEMI S13 when they are provided with the equipment.
NOTE 5: Hazardous energies within fire detection or suppression systems fall under the hazardous energy control provisions of
SEMI S13 when fire detection or suppression systems are provided with the equipment.
R2-8.1.3 ¶9.6.3 — In addition to the provisions of SEMI S13, the manuals should include:
specific written instructions on routine Type 4 tasks, excluding troubleshooting (refer to ¶13.3);
SEMI S13-0305 © SEMI 1998, 2005 12
instructions for energy isolation (“lockout/tagout”) (refer to ¶17.2);
descriptions of the emergency off (EMO) and interlock functions;
a list of hazardous materials (e.g., lubricants, cleaners, coolants) required for maintenance, ancillary equipment
or peripheral operations, including anticipated change-out frequency, quantity, and potential for contamination
from the process;
a list of items that become solid waste as a result of the operation, maintenance, and servicing of the equipment,
and that are constructed of or contain substances whose disposal might be regulated (e.g., beryllium-containing
parts, vapor lamps, mercury switches, batteries, contaminated parts, maintenance wastes); and
maintenance and troubleshooting procedures needed to maintain the effectiveness of safety design features or
devices (i.e., engineering controls).
R2-8.1.4 ¶9.6.4 — Information should be provided regarding potential routes of unintended releases (see ¶21.2.4).
R2-8.1.5 ¶9.6.5 — Recommended decontamination and decommissioning procedures should be provided in
accordance with SEMI S12, and should include the following information:
identity of components and materials of construction, in sufficient detail to support recycling, refurbishment,
and reuse decisions (see ¶8.5.3); and
residual hazardous materials, or parts likely to become contaminated with hazardous materials, that may be in
the equipment prior to decommissioning.
NOTE 6: It is recommended that the manual state that changes to the typical process chemistry or to the equipment could alter
the anticipated environmental impact.
R2-8.1.6 ¶9.6.6 — Maintenance Procedures with Potential Environmental Impacts — The supplier’s recommended
maintenance procedures should:
R2-8.1.6.1 Identify procedural steps during which releases might occur, and the nature of the releases; and identify
waste characteristics and methods to minimize the volume of effluents, wastes, or emissions generated during
maintenance procedures.
SEMI S13-0305 © SEMI 1998, 2005 13
RELATED INFORMATION 3
DOCUMENT CRITERIA INCLUDED IN SEMI S8
NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S8. This
related information was approved for publication by a letter ballot on November 24, 2004.
R3-1 Purpose of this Related Information
R3-1.1 This related information contains criteria for documents that are presented in SEMI S8.
R3-1.2 The criteria in this related information are included in SEMI S8 as of the time this related information was
written, and are included herein for the convenience of users of this document.
NOTE 1: The information in this related information may not be current with the source document. The source document
contains the actual documentation criteria.
R3-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S8.
NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate
future revisions of SEMI S8 related to criteria for documents.
R3-2 Documentation
R3-2.1 SEMI S8-0701, ¶7.2 — Supplier provided documentation should include administrative controls intended
by the supplier to mitigate ergonomic risks.
R3-2.2 SEMI S8-0701, ¶7.3 — Supplier provided documentation should illustrate any installation requirement
necessary to meet SEMI S8 guidelines (e.g., Diagram should show clearance area required for opening hinged
panels, operator working area, allowable range of vertical foot adjustment to keep ergonomic measurements within
SESC acceptable limits, etc.).