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SEMI E38-1296 © SEMI 1995 , 1996 25 The cluster controller m a y direct recov er y of error conditions using the EXRecover service. T he module resource perform s the recovery action and reports its completion us i ng th…

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SEMI E38-1296 © SEMI 1995, 1996 24
Table 2 Material Slot Attributes
Attribute Name Definition Rqmt Access Form
ObjType The object type. Y RO Text: “MATERIALSLOT”
ObjID Module unique identifier for the material slot. Y RO Text: Unique with respect to the module.
MtlName Identifier of the material occupying or
assigned to the slot.
YRWText
OccState Current state of the material slot. Y RW Text:
SlotUnknown
SlotEmpty
SlotOccupied
SlotActive
SlotDisabled
The material slot occupancy attribute indicates the presence of material as follows:
• SlotUnknown — the carrier is present and slot occupancy is not known, such as from when a carrier is loaded
until the material is detected or the state is set by the cluster controller.
• SlotEmpty — no material in the slot.
• SlotOccupied — material is present in the slot.
• SlotActive — material is being removed from, or is arriving at, the slot.
• SlotDisabled — material slot unusable, such as when the carrier is not present.
Module resource capabilities required, but not already specified above:
• Reject incomplete, invalid, and unsupported requests.
Module resource capabilities permitted, but not to be required, by the cluster controller:
• Detection of the presence of material in a material slot.
• Detection of the identifier of material in a material slot.
Table 3 lock Attributes
Attribute Name Definition Rqmt Access Form
ObjType The object type. Y RO Text: “CLOCK”
ObjID Module unique identifier for the clock. Y RO Text: Unique with respect to the module. Services
timestamp clock is “SERVICESCLOCK”
DateTime Current time. Y RW Text: yyyymmddhhmmsscc
8.4 Exception Management Services — Exception management across a cluster tool module communications
interface is achieved using the exception management services. These services provide the communications and
behavior required of the module resource by the exception models described in Section 7.1.5 through defining the
exception condition object and its operations.
The exception management services follow SEMI Draft Document 2013C (SECS II Support for SEMI E41
(Exception Management Standard)). Cluster tool module communications require full compliance with the
information, behavior, and messaging services of the fundamental requirements of that standard.
Exception conditions (alarms and error conditions) are created and managed by the module resource detecting the
related abnormal situation. The module resource uses the EXPost service to report the occurrence of the abnormal
situation or some significant change in exception condition information while the situation exists. EXCleared reports
that the abnormal situation is no longer apparent or relevant. Reporting on an exception condition is enabled and
disabled by setting its EXEnabled attribute.
SEMI E38-1296 © SEMI 1995, 199625
The cluster controller may direct recovery of error
conditions using the EXRecover service. The module
resource performs the recovery action and reports its
completion using the EXRecoveryComplete service.
The module resource is only required to permit a single
recovery action at a time on all set exception
conditions, but may support multiple recovery actions.
The module resource shall support the
EXRecoveryAbort service, which ceases any activity
and terminates the recovery action.
Exception condition object attributes required to be
accessible through object services:
Attribute Name Description: Requirements
ObjType The object type: EXCEPTION.
EXID Identifier for the exception condition.
EXType Type of exception condition:alarm or
error condition.
EXMessage Text message describing the
abnormal situation monitored.
EXEnabled Indicates reporting to decision
authority enabled/disabled.
EXRecActList Possible recovery actions (none for
alarms).
EXStateList All concurrent substates of the
exception.
Exception management messaging services required:
Message Name Description: Requirements
EXPost Notify/update on abnormal situation.
EXCleared Notify resolution of abnormal
situation.
EXRecover Command to perform recovery
action.
EXRecoveryComplete Notify completion of recovery action.
EXRecoveryAbort Command to abort a recovery action.
Reporting of all exception conditions is set to be
enabled on establishment of an association, and those in
the set state are posted.
Module resource capabilities required, but not already
specified above:
• Reject incomplete, invalid, and unsupported
requests.
Module resource capabilities permitted, but not to be
required, by a service-user:
• Multiple concurrent recovery actions.
• Dynamic update of exception condition message
and valid recovery actions.
8.5 Recipe Management Services — Recipe
management across a cluster tool module
communications interface is achieved using the recipe
management services. These services provide the
communications and behavior required of the module
by the recipe models described in Section 7.1.6 of this
document.
The recipe management services follow SEMI E42
(Recipe Management Standard). Cluster tool module
communications require full compliance with the
information, behavior, and messaging services of the
fundamental requirements of a recipe executor, and
optionally the recipe namespace management, as
defined in that standard.
The module requiring recipe services contains a recipe
executor that is capable of performing recipe download,
verification, selection, deselection, and deletion as
requested by the cluster controller. The module may
also support recipe namespace services.
In certain configurations, the module may require
recipe management services to be provided by the
cluster controller, in order that it may request a selected
recipe that is not stored locally. The module is the
service-user in this case, and the cluster controller
should support the necessary recipe namespace
services.
The module coordinates the activities of the processing
resource and the recipe executor to ensure the
appropriate recipes are loaded into the execution area
for material processing.
Recipe executor object attributes required to be
accessible through object services:
Attribute Name Description
ObjType The object type: “RcpExec”
ObjID Identifier for the recipe executor
DefaultNamespace Namespace for all hardware-dependent
recipes
RecipeSelectID List of recipe identifiers for the currently
selected recipe
Recipe management messaging services required:
Message Name Description: Requirements
RMEDnldVer Receive a recipe, optionally verify it, and
put it into storage
RMEDelete Delete a recipe from storage
RMESelect Select recipes for execution
RMEDeselect Deselect a recipe to prevent its execution
RMEComplete Notify service-user of completion of an
action
SEMI E38-1296 © SEMI 1995, 1996 26
Modules that require more than one recipe class for an
execution cycle shall support multi-part recipes. That is,
the ability to select multiple recipes in a single process
job request is not supported in processing management.
Recipe executor capabilities required and not already
specified above:
• Reject incomplete, invalid, and unsupported
requests
Recipe executor and module capabilities permitted by
not to be required by a service-user:
• Support for variable parameters (attributes and
select service),
• Support for multi-part recipes,
• Upload a recipe,
• Support recipe namespace services for local recipe
management,
• Local editing.
8.6 Event Reporting Services — Event reporting
services are to be supported in accordance with the
models described in Section 7.1.7. Both event-based
reporting and tracing are required. Support for user-
defined reports is not required.
Event reporting for CTMC-compliant modules shall be
based on services as described in SEMI E53.
8.6.1 The attributes defined in the following table shall
be supported by CTMC compliant modules.
Attribute Name Description: Requirements
ObjID The identifier for Data Reports, Event
Reports, and Trace Reports.
DataReportList List of data report identifiers.
Enabled A flag which controls generation of
Event and Trace Reports.
SamplePeriod Time delay between samples in a Trace
report.
TotalSamples Maximum number of samples to
include in a Trace report.
GroupSize Number of samples to include before
sending a report to a service user.
8.6.2 Support for the following messages from SEMI
E53 shall be provided.
Message Name Description: Requirements
EventReportRequest User can ask for a report to be
generated and sent.
EventReportSend Provider generates and sends report
on an event.
DataReportCreate Define attributes to be sampled for a
report.
DataReportDelete Delete report definitions
DataReportRequest User requests sample and send of a
report.
CollectionEventLink Link data reports to a collection
event.
CollectionEventUnlink Unlink a data report
TraceReportCreate Define a trace report
TraceReportDelete Delete trace report definitions
TraceReportRequest User requests a sample and send of a
trace data.
TraceReportSend Service provider sends a trace report
to the user.
TraceReportReset A trace reporting is set to its IDLE
state.
8.6.3 Support for dynamic and user defined reports is
optional. However, implementations which support
these advanced capabilities, shall comply with the
specifications of SEMI E53 and SEMI E39. SEMI E39
service messages shall use the optional object specifier
arguments, such as EvtSrcSpec. Object services can
then be used to interrogate objects for their reportable
attributes.
8.7 Clock Services — The clock services provide for
synchronization of the clocks on the modules with that
of the cluster controller. These services provide the
communications required of the appropriate module
resources through defining the clock object.
The clock services are fully specified in terms of the
clock attributes accessed through the get and set
services of SEMI E39 (Object Services Standard:
Concepts, Behavior, and Services). Cluster tool module
communications require full compliance with the
information, behavior, and messaging services of the
fundamental requirements of that standard.
The clock object is uniquely identified for the module.
Table 3 describes the attributes of the clock object. The
identifier of the clock used for communications services
is defined. The clock attribute Time is kept current and
used to determine the value of the timestamp used in
service messages. The module returns the current Time
when it receives a get.
The clock time is synchronized by using the object set
service on the Time attribute. On receipt of a set