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SEMI S20-0303 © SEMI 2003 2 3.7 This d ocument does not apply to the lab eling of hazards, which is the function of SEMI S1. 4 Referenced Standards 4.1 SEMI Standar ds SEMI S1  Safety Guideline for Equipment Safety Labe…

SEMI S20-0303 © SEMI 2003 1

SEMI S20-0303

SAFETY GUIDELINE FOR IDENTIFICATION AND DOCUMENTATION

OF ENERGY ISOLATION DEVICES FOR HAZARDOUS ENERGY

CONTROL

This safety guideline was technically approved by the Environmental, Health, and Safety Committee and is

the direct responsibility of the North American Environmental, Health, and Safety Committee. Current

edition approved by the North American Regional Standards Committee on November 22, 2002. Initially

available at www.semi.org January 2003; to be published March 2003.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this document and are not intended to

modify or supersede the official guideline. The task

force has supplied them to clarify and to enhance usage

of the guideline by equipment designers.

NOTICE: The intent of the task force that produced

this document is that conformance to the “should”

provisions of this guideline comprises conformance

with this guideline.

1 Purpose

1.1 This guideline is intended to establish a method for

the unique identification of energy isolation devices

(EID) used for lockout/tagout (LOTO). This

identification is intended to occur both at the devices

and at those places in the supplier-provided manuals

where the devices are referenced in tasks or procedures.

NOTE 1: Throughout this document, “LOTO EID” refers to

these devices.

1.2 This document supplements the existing provisions

in SEMI S2 (for Hazardous Energy Isolation) and

SEMI S13 (for providing appropriate documentation)

with a uniform graphical representation and

identification system.

1.3 This document also provides guidance for

developing instructions for operating LOTO EIDs.

2 Scope

2.1 This guideline applies to equipment used to

manufacture, measure, assemble, and test

semiconductor products, and the maintenance and

service procedures associated with the equipment.

2.2 This guideline provides criteria for documentation

and identification of all supplier-specified LOTO EIDs

meeting the criteria of SEMI S2. This includes

isolation devices that the supplier intends to be

provided by the end user.

EXCEPTION: Equipment in which a cord and plug

connection is the only LOTO EID is exempt from this

guideline.

NOTE 2: Isolation devices with locking capability are not

necessarily LOTO EIDs, unless the supplier specifies them as

LOTO EIDs.

NOTE 3: In some jurisdictions, it is the responsibility of the

supplier to specify the energy isolation points that must be

locked out in conjunction with the manufacturer-specified

maintenance procedures. However, the end user is

responsible for the overall hazardous energy control program

for the work site and for the installation of additionally

required facility EIDs. The user is not responsible for EIDs

that are required by regulation to be incorporated within the

equipment.

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use.

It is the responsibility of the users of this safety

guideline to establish appropriate safety and health

practices and determine the applicability of regulatory

or other limitations prior to use.

3 Limitations

3.1 This document is not intended to provide

guidelines for developing or replacing user-site energy

isolation programs.

3.2 This document is not intended to be used in place

of the need for adequate training of individuals who

perform hazardous energy control.

3.3 This document is not intended to conflict with laws

and regulations on Control of Hazardous Energy.

3.4 This guideline does not contain criteria or

requirements for providing a particular LOTO EID to

be used in a LOTO program.

NOTE 4: The requirements and criteria for providing a

particular LOTO EID for use in a LOTO program may be

found explicitly or implicitly in SEMI S2, equipment design

standards, United States OSHA requirements, or in various

good engineering practices.

3.5 This document is not intended to replace or

supersede SEMI S2 or any other SEMI Safety

Guideline.

3.6 This document is not intended to be applied

retroactively, i.e., to designs already in the field.

SEMI S20-0303 © SEMI 2003 2

3.7 This document does not apply to the labeling of

hazards, which is the function of SEMI S1.

4 Referenced Standards

4.1 SEMI Standards

SEMI S1  Safety Guideline for Equipment Safety

Labels

SEMI S2  Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S8  Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

SEMI S13  Safety Guidelines for Operation and

Maintenance Manuals Used With Semiconductor

Manufacturing Equipment

4.2 ANSI Standards

ANSI Z535.1  Color Coding for Labels

4.3 Code of Federal Regulations - United States of

America

29 CFR 1910.147  The Control of Hazardous Energy

(lockout/tagout)

29 CFR 1910.147



Appendix A “Typical Minimal

Lockout Procedure”

4.4 ISO Standards

ISO 3864  Safety Colours and Safety Signs

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbrevitions and Accronyms

5.1.1 LOTO  acronym for lockout/tagout.

NOTE 5: Also equivalent to the term Hazardous Energy

Isolation (HEI), which may be used in some jurisdictions.

5.2 Definitions

5.2.1 blocking (v)  preventing flow of material as

through piping or preventing energies (such as

1 American National Standards Institute, New York Office: 11 West

42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;

Fax: 212.398.0023 Website: www.ansi.org

2 Available from Occupational Safety and Health Administration,

U.S. Department of Labor, http://www.osha.gov

3 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

suspended weights or springs) held in a suspended state

from movement.

5.2.2 clean room compatible materials — materials

approved for use within a fabrication facility, including:

laminated card stock or paper, clean room paper,

electronic media or other approved media.

5.2.3 Energy Isolation Device (EID)  a mechanical

device that physically prevents the transmission or

release of energy, including but not limited to the

following: a manually operated electrical circuit

breaker; a disconnect switch; a manually operated

switch by which the conductors of a circuit can be

disconnected from all ungrounded supply conductors,

and, in addition, no pole can be operated independently;

a line valve; a block; and any similar device used to

block or isolate energy. Push buttons, selector

switches, and other control devices are not energy

isolation devices. [OSHA 29 CFR 1910.147]

NOTE 6: Lockout devices (elsewhere defined in this

document) are not energy isolation devices.

5.2.4 graphical  using an image or multiple image

representation that reflects the equipment as assembled

and is used for indicating the location of the individual

LOTO EIDs in relation to the equipment being

maintained. Images include labeled drawings, or

photographs enhanced with labels.

5.2.5 graphical reference guide — the merger of text

instructions and graphical representations of the

equipment in a manner that provides a clear description

of the task and a simple means of locating the correct

devices.

5.2.6 lockout  the placement of a lockout device on

an energy isolation device, in accordance with an

established procedure, ensuring that the energy

isolation device and the equipment being controlled

cannot be operated until the lockout device is removed.

[OSHA 29 CFR 1910.147]

5.2.7 lockout device  a lock and associated hardware

used to secure an EID in the safe position and prevent

energy flow.

NOTE 7: Energy isolation devices (elsewhere defined in this

document) are not lockout devices.

5.2.8 maintenance  planned or unplanned activities

intended to keep equipment in good working order.

(See also definition for service.) [SEMI S2]

5.2.9 marked — identified by the use of a label,

engraving, silk screening, etching, or other physical and

durable indication; placed near components or on

systems for the purpose of matching to identifying

documentation.

SEMI S20-0303 © SEMI 2003 3

5.2.10 service



unplanned activities intended to

return equipment that has failed to good working order.

(See also the definition for maintenance.) [SEMI S2]

5.2.11 tagout  the placement of a tagging device

(such as a tag and a secure means of attachment) to an

energy isolation device in accordance with an

established procedure. The tagout indicates that the

energy-isolation device may not be operated until the

tagging device is removed.

6 Task Specific Information

6.1 For each task requiring hazardous energy isolation

(i.e., LOTO), the following information should be

provided in a combined format (including labels,

maintenance manuals, and graphical reference guides as

described in Sections 7, 8, and 9 of this document).

NOTE 8: In some jurisdictions the bulleted items below are

required.

6.1.1 Identification of:

• type and magnitude of hazardous energies to be

isolated,

• LOTO EIDs necessary for controlling sources of

hazardous energy, and

• lockout devices necessary to secure the LOTO

EIDs.

6.1.2 Instructions for the following:

• isolating each source of energy,

• blocking energy, or reducing the potential to a zero

energy state (such as blocking chemical lines or

blocking the suspended energy state in a spring or

raised weight),

• dissipating any residual energy,

• isolating hazardous energy sources that are isolated

by disconnection, but for which there are no

lockable EIDs. These instructions should state that

the protection depends on the means of

disconnection remaining in the immediate control

of the personnel performing the work,

• attempting to restart the equipment or re-energize

the system(s) that is/are to be isolated from

hazardous energy, and

• verification that there is no hazardous residual

energy in the system.

NOTE 9: An example of minimum Hazardous Energy Control

Procedures can be found in 29 CFR 1910.147 Appendix A.

NOTE 10: The intent of instructions is to meet the need for a

valid verification method that energy is isolated and to ensure

that proper procedures are provided. An instruction is not

required if the condition is not present or possible or the

method is not technically feasible.

7 Energy Isolation Device Identification

7.1 Each LOTO EID should be uniquely and

consistently identified on the system, drawings,

schematics, procedures, etc. to reduce confusion.

EXCEPTION: Equipment consisting of a grouping of

functional modules (e.g., a “cluster tool”), where more

than one module is used in the same grouping, may use

the same identifying numbers in each module.

NOTE 11: Where there are multiple control devices such that

one or more operating devices might be confused with the

LOTO EID, a differentiation marking may be used to prevent

confusion. One example of such a differentiation marking is

shown in Related Information 3.

7.2 All LOTO EIDs integral to the equipment should

be marked on the equipment.

7.2.1 LOTO EID markings should be located on the

equipment adjacent to (not on) the EIDs they identify.

NOTE 12: Marking directly on the EID can mean that

replacement of the EID will also remove the EID marking.

7.2.2 Where the LOTO EID marking is obscured

(covered by wiring, tubing, installation hardware, etc.),

an additional marking should also be placed on the EID

itself.

7.3 For LOTO EIDs required by the supplier but

provided and installed by the user, the supplier should

specify the requirements for such devices.

7.3.1 When such devices are specified, users should

provide lockable EIDs.

7.3.2 Users should provide to the supplier, if requested,

the location of the device.

7.3.3 Utility connection points for which LOTO EIDs

are located external to the equipment should be marked

to indicate that a user-provided EID is the method of

energy isolation. Space on the equipment should be

provided for the user to indicate the location of the

LOTO EID.

7.4 The style and size of letters and numbers on LOTO

EID markings should meet the criteria of SEMI S8 in

order to be readable from the normal viewpoint of

access to the LOTO EID.

7.4.1 The LOTO EID marking (as it appears on the

equipment) need not be colored according to Table 1 in

Section 9.