semi合集-English.pdf - 第1455页

SEMI 30.1-0200 © SEMI 1998, 2000 30 Parameter Value CPName Desc ription Range Format “ELE MEN TLIS T” L,n 1. El ementID 1 : n. For the SEMI M 21 coordinate system . List of A[1. .16] data item s “LOCATIONID” Unique ident…

100%1 / 7923
SEMI 30.1-0200 © SEMI 1998, 200029
PP-UPDATE “PPBUILDID”
“ALIGNLIST”
“ANOMALYLIST”
“AREALIST”
“ELEMENTLIST”
“SLOTLIST”
“SUBSTRATELIST”
“TABLE-ALIGN-DEF”
“TABLE-AREA-DEF”
“TABLE-ANOMALY-DEF”
“TABLE-M21-ANOMALY-DEF”
R
R*
R*
R*
R*
R*
R*
R*
R*
R*
R*
* At least one is required.
RESUME None N/A None
START “CARRIERBLD” 0 None
STOP “CARRIERBLD” 0 None
13.2.2 Host Command Parameter Names and Values
Table 9 Host Command Parameters CPNAMES
Parameter Value
CPName
Description Range Format
“ABORTLEVEL” ISEM-defined abort levels:
HALT — Process halts, and the ABORTING process state is
entered.
CLEANUP — Process halts, material cleanup is performed, and
the ABORTING process state is entered.
“1= HALT”
“2 = CLEANUP”
U2
“ALIGNLIST” L,n
1. AlignName
1
:
n.
For the SEMI M20 or M20P coordinate system.
List of
A[1..16]
data items
“ALIGNNAME” Alignment name
See the “TABLE-ALIGN-DEF” definition for further explanation.
A[1..16]
“ANOMALYLIST” L,n
1. AnomalyID
1
:
n.
For the SEMI M20 or M20P coordinate system.
List of
A[1..16]
data items
“ANOMALYID” Anomaly identifier
See the “TABLE-ANOMALY-DEF” or the “TABLE-M21-
ANOMALY-DEF” definition for further explanation.
A[1..16]
“AREALIST” L,n
1. AreaName
1
:
n.
List of
A[1..16]
data items
“AREANAME” Unique identifier for an area to be inspected.
See the “TABLE-AREA-DEF” definition for further explanation.
A[1..16]
“AUTOSTART” Specifies whether a START command is required from an external
source (operator or host) to exit the READY state.
0 = NoAutoStart (A START command required.)
1 = AutoStart (No external START command required to
begin execution.)
0–1 U2
“CARRIERID” Identifier of the carrier that the inspection/review data is
associated with.
A[1..16]
SEMI 30.1-0200 © SEMI 1998, 2000 30
Parameter Value
CPName
Description Range Format
“ELEMENTLIST” L,n
1. ElementID
1
:
n.
For the SEMI M21 coordinate system.
List of
A[1..16]
data items
“LOCATIONID” Unique identifier of the location to be used for the
“CARRIERBLD” assignment.
U2
“PPBUILDID” ProcessProgramBuildID A[1..80]
“PPNAME” ProcessProgramName A[1..80]
“PRIORITY” Assignment priority 0–9
Highest priority
corresponds to 0.
U2
“SLOTLIST” Specifies carrier slots containing substrate for the ISEM job.
L,n
1. SlotID
1
:
n. SlotIDn
Zero length list specifies
all slots.
List of U2
data items
“STOPLEVEL” Stop levels defined by the ISEM. “1 = LOCATIONID”
“2 = CARRIERID”
Use
defined
CPVALs
“SUBSTRATELIST” Specifies identifiers of substrate for the ISEM job.
L,n
1. SubstrateID
1
:
n. SubstrateID
n
Zero length list specifies
all substrate
(independent of substrate
identifier).
List of
A[0..16]
data items
“CARRIERBLD”
E5 Format
L, 3 Three ISEM required parameters
1. L, 2
1. “CARRIERID” A[9] -- CPName
2. CarrierID A[1..16] -- CPValue
2. L, 2
1. “LOCATIONID” A[10] -- CPName
2. LocationID U2 -- CPValue
3. L, 2
1. “PROCESS-BLD-LIST”
2. L, n List of n jobs
1. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m First ISEM job
2. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m Next ISEM job
.
.
.
n. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m Last ISEM job
m = 3 List
“PROCESS-BLD-
GROUP” (for
Inspection)
L,m
1. L,2
1. “PPBUILDID”
2. ProcessBuildGroupID
m ≥ 2
List of m
data items
SEMI 30.1-0200 © SEMI 1998, 200031
Parameter Value
CPName
Description Range Format
2. L,2
1. “PPNAME”
2. ProcessProgramID
3. L,2
1. “SLOTLIST”
2. L,n
1. SlotID
1
:
n.
Or
1. “SUBSTRATELIST”
2. L,n
1. SubstrateID
1
:
n.
4. L,2
1. “AUTOSTART”
2. AutoStart
5. L,2
1. “TABLE-AREA-DEF”
2. AreaTableName
6. L,2
1. “AREANAME”
2. L,n
1. AreaName
1
:
n.
7. L,2
1. “TABLE-ALIGN-DEF”
2. AlignTableName
8. L,2
1. “ALIGNNAME”
2. L,n
1. AlignName
1
:
n.
9. L,2
1. “ELEMENTLIST” **
2. L,n
1. ElementID
1
:
n.
10. L,2
1. CPNAME*
2. CEPVAL*
m. L,2
1. CPNAME*
2. CEPVAL*
NOTES: “PPBUILDID” and “PPNAME” are required.
“SLOTLIST”, “SUBSTRATELIST”, “AREALIST”, and
“ALIGNLIST” are optional.
* Supplier shall define as many of these CPNAME, CEPVAL