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SEMI E88-1104 E © SEMI 1999, 2004 3 5.2.18 Stocker Controller — stocker Eq uipment Controller that communica tes with the host and represents the system as the equi pment. 5.2.19 stocker crane — stocker transfer agent sp…

SEMI E88-1104

SEMI E37 — High-Speed SECS Message Services

(HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services

Single Selected-Session Mode (HSMS-SS)

SEMI E84 — Specification for Enhanced Carrier

Handoff Parallel I/O Interface

4.2 Other References

Harel, D., “Statecharts: A Visual Formalism for

Complex Systems,” Science of Computer Programming

8 (1987) 231-274.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.1.2 BP — Buffer Port

5.1.3 FOUP — Front Opening Unified Pod

5.1.4 GEM — Generic Equipment Model

5.1.5 IBSEM — InterBay/IntraBay Specific Equipment

Model

5.1.6 ITS — Interbay or Intrabay Transport System

5.1.7 LP — Loading Port

5.1.8 OP — Output Port

5.1.9 PGV — Person Guided Vehicle

5.1.10 SC — Stocker Controller

5.1.11 TCP/IP — Transmission Control

Protocol/Internet Protocol

5.1.12 TSC — Transport System Controller

5.2 Definitions

5.2.1 Automated Material Handling System — an

automated system to store and transport materials

within the factory.

5.2.2 automation — the capability of managing

material and data within the factory.

5.2.3 bidirectional load port — a load port used for

loading and unloading carriers.

5.2.4 buffer — a set of one or more locations for

holding carriers at the production equipment.

5.2.5 buffer port — special buffer port location on a

stocker output shuttle. Contains carrier presence

1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945,

http://www.elsevier.nl/homepage/browse.htt

sensors so that the host can be notified when a carrier is

situated at this position.

5.2.6 carrier — a container with one or more fixed

positions for holding substrates. Examples of carriers

include FOUPs and open cassettes.

5.2.7 carrier ID — a readable and unique identifier for

the carrier.

5.2.8 FOUP—a closed carrier for holding wafers.

5.2.9 host — the factory computer system, or an

intermediate system, that represents the factory and the

user to the equipment. Refers system that controls or

supervises the Stocker Controller (SC) throughout this

document.

5.2.10 independent port — a load port on the stocker

that is dedicated to input or output. It is considered that

the carriers can only be transferred in one direction.

5.2.11 interbay transport system — a transport system

used to move work-in-process between stockers in

different parts of the factory.

5.2.12 Intrabay Transport System — a transport

system dedicated to one or more bays in the factory and

responsible for transferring carriers to and from

production equipment. ITS consists of the physical

units of the system (e.g., vehicles, nodes, docking

stations), the low-level unit controllers, and a system-

level controller. ITS excludes factory floor storage

systems (stockers), but includes any short-term storage

integral to the system, such as storage locations within

an overhead track system that are accessible only to

units of the particular ITS.

5.2.13 load port — the interface location on the

equipment where carriers are transferred.

5.2.14 loading port — user or vehicle accessible port

location on a stocker output shuttle. Contains carrier

presence sensors so that the host can be notified when a

carrier is situated at this position.

5.2.15 output port —port location on a stocker output

shuttle, typically accessible by the stocker crane.

Contains carrier presence sensors so that the host can be

notified when a carrier is situated at this position.

5.2.16 process equipment — equipment used to make

semiconductor devices. This excludes metrology and

material handling equipment.

5.2.17 production equipment — equipment used to

produce semiconductor devices, including wafer

sorting, process, and metrology equipment and

excluding material handling equipment.

SEMI E88-1104

5.2.18 Stocker Controller — stocker Equipment

Controller that communicates with the host and

represents the system as the equipment.

5.2.19 stocker crane — stocker transfer agent

specialized for the movement of carriers between

shelves and input and output port locations.

5.2.20 stocker equipment — an individual stocker

viewed as a single piece of equipment, with distributed

components and distributed control, as illustrated in

Figure 1. The stocker controller communicates with the

host using HSMS and GEM and represents the system

as an equipment. The factory may require more than

one type of stocker.

5.2.20.1 Communications with transport system

equipment may require a low-level handshake with a

transport unit directly involved in the transfer of

material (such as a vehicle or a docking station on an

overhead track).

5.2.20.2 Communications between the various stocker

units and controllers are proprietary to the supplier.

Stocker

Controller

internal proprietary

communications

Factory Host

Stocker

Equipment

host/equipment

communications

factory network

Stocker

Unit

Stocker

Unit

Figure 1

Example of Stocker Equipment

5.2.21 stocker shelf — locations within the stocker

equipment to store carriers. These locations exclude

load ports.

5.2.22 stocker unit — a physical component of the

stocker system, such as a stocker crane, ID reader,

wafer sensor, shuttle port, etc.

5.2.23 swapping port — a load port on the stocker

capable of handling single load and unload of carriers

or simultaneous replace of carriers.

5.2.24 transfer agent — a component of equipment

specialized to the movement of transfer objects from

place to place within a factory. May be of different

types with widely-differing characteristics. Examples

are fixed-arm robots, robot arms on fixed tracks,

overhead gantries or even systems containing a

heterogeneous collection of other transfer agents.

Humans may also act as transfer agents.

5.2.25 transfer completed port — the destination port

specified in a transfer command.

5.2.26 transfer port — point on the transport system at

which a change of equipment ownership of the carrier

occurs.

5.2.27 transfer unit — the element of movement

(assemblage of carriers) of the ITS that consists of a

maximum number of carriers allowed in a specific

transfer command:

 AA is the maximum number of carriers allowed for

acquire at the transfer source.

 BB is the maximum number of carriers allowed for

deposit at the transfer destination.

 CC is the maximum number of carriers allowed for

transfer in one transport vehicle.

5.2.27.1 The maximum size of the transfer unit is the

minimum of AA, BB, and CC.

5.2.27.2 For purposes of the Stocker SEM, the transfer

unit is limited to one carrier.

5.2.28 transport system — the component of AMHS

that moves material from one part of the factory to

another.

5.2.29 transport unit — a physical component of a

transport system, such as a vehicle, node, or docking

unit.

5.2.30 zone — a logical assignment referencing a set of

one or more locations. A stocker can have several

logical zone assignments. For example, a specific

stocker may have 2 zones defined as LEFT_ZONE and

RIGHT_ZONE. The assignment of zones is specific to

the Stocker SEM equipment supplier and it may be

desirable for the supplier to remain flexible in the

assignment of zones so that it could be configured to

meet the specific requirements of different users. A

specific zone may only contain shelf locations or ports,

but not both. A location may be in at most one zone.

6 Overview and Assumptions

NOTE 1: This section has been included as background

information to help clarify requirements.

6.1 Destination Control (to Shelf or to Output Port)

6.1.1 The destination is controlled by Host when the

carrier is input to the stocker (i.e., the carrier enters the

stocker domain). The destination of the transfer

command is required. It would be invalid for the Host

to issue a transfer command to the SC without

including a valid destination.

SEMI E88-1104

6.1.2 Output to the Interbay Output Port

6.1.2.1 The destination for a transfer command to

move a carrier to an interbay output port must be a

loading port. It is the responsibility of the Host to

ensure that sufficient capacity exists in the destination

stocker when delivering from a source stocker to a

destination stocker (i.e., an interbay move). For

example, it would be the responsibility of the Host to

check the remaining capacity of the destination stocker

prior to issuing the transfer command to send the carrier

to the interbay output port of the source stocker.

6.1.3 Output to the Intrabay Output Port

6.1.3.1 The destination for a transfer command to

move a carrier to an intrabay output port must be a

loading port.

6.1.4 Store to the Stocker Shelf

6.1.4.1 The specific stocker shelf location is to be

controlled by the Stocker Controller (SC). The Host

does not specify a shelf ID in a transfer command. The

Host sends the name of a zone as the destination in the

transfer command

6.1.4.2 The carrier is stored to a stocker shelf

temporarily when the Host requested output port

destination is occupied. This is the responsibility of the

Stocker Controller. The carrier count of the stocker is

incremented due to this temporary storage (i.e., the

current capacity decreases).

6.1.4.3 For multi-crane stockers, the carrier is

temporarily stored to a stocker shelf when the source

and destination is not accessible by the same stocker

crane. This is the responsibility of the Stocker

Controller. The carrier count of the zone containing the

location where the carrier is temporarily stored is

incremented due to this temporary storage (i.e. the

current capacity decreases).

6.2 Quantity Control in the Stocker (Capacity

Planning)

6.2.1 The number of carriers in the stocker is

controlled by the Host. A list of carrier database entries

in the specified stocker’s SC database will be available

to the Host upon request via a remote command.

6.3 Number of Stocker Cranes

6.3.1 No Limitation. May be zero for systems that do

not include a crane. Host does not control the stocker

crane directly.

6.4 Port Type

6.4.1 The independent input port and the independent

output port are required for the Stocker SEM. The

swapping type is considered as an independent port.

6.5 Plural Sets of Input/Output Ports

6.5.1 Plural sets of Input/Output ports connected to the

interbay or intrabay transport system must be

considered. (This would be considered a Multi-loop

type interface connection to the stocker.) Examples of

plural sets of interfaces are as follows:

 Main Loop/Sub Loop,

 Right-handed rotation/Left-handed rotation, and



Double Track (i.e., Stacked Track).

6.6 Carrier ID Reader

 Manual Input Port: Carrier ID Reader is

mandatory.

 Automated Input Port: Carrier ID Reader is a

customer option.

 Carrier ID Reader at any output port: Carrier ID

Reader is a customer option.

6.6.1 The intrabay automated input port is sometimes

used as the manual Input Port. If one port is used for

both an automated and a manual, the Carrier ID Reader

is mandatory for this port. If there is a Carrier ID

Reader, the scenario for a stocker transfer without a

Carrier ID Reader is not applicable.

6.7 Tag

6.7.1 Same assumptions as Carrier ID Reader.

6.8 Carrier Exchanger/Gas Purger

6.8.1 Out of scope of Stocker SEM.

6.9 Robot Arm in the Passive Type Stocker

6.9.1 No assumption is made regarding the passive

type stocker.

6.10 Empty or Not Empty Carriers

6.10.1 No assumption is made regarding empty and not

empty carriers.

6.11 Monitor/Dummy

6.11.1 No assumption.

6.12 Operation Mode

6.12.1 No assumption.