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Table 1 Filter and Purifier Interface Recommendations Filter and Purifier End-to-End Lengths: 1/4-inch Integral/fixed male face seal 1/4-inch Swivel face seal (male o r female) 1/4-inch Tube weld 84 mm (3.31 in.) - - NOT…

5.1.7 purifier  an in-line device used for the removal of homogeneous impurities from gases, typically consisting

of a packed-bed of active solids contained in a stainless steel housing. The active purification media may remove

impurities such as moisture, oxygen, CO, CO

, hydrocarbons, hydrogen, or nitrogen from specific gases using a

variety of chemical reaction, physisorption, or chemisorption mechanisms. Point-of-use purifiers often contain a

particle filter within the same housing.

5.1.8 valve  a device that controls the flow or pressure of a gas. Valve functions can include shutoff, metering,

backflow prevention, and pressure relief.

6 Ordering Information

6.1 Device manufacturers may use this guide when procuring processing equipment to communicate to the

equipment supplier the interface specifications required for interchangeability of components. This document may

also be used by semiconductor processing equipment suppliers to specify standardized interfaces to component and

module suppliers.

6.2 Orders for components in accordance with this standard shall include:

6.2.1 This standard number and date of issue.

6.2.2 Reference to the table number.

6.2.3 Reference to the option number, if applicable.

7 Filters and Purifiers

7.1 Filters less than 30 SLM and purifiers less than 1 SLM should conform to the interface design recommendations

appearing in Figure 1 and Table 1.

Figure 1

Filter and Purifier Interface Design

SEMI F36-0299 © SEMI 1999, 2004 2

Table 1 Filter and Purifier Interface Recommendations

Filter and Purifier

End-to-End Lengths:

1/4-inch Integral/fixed male face seal

1/4-inch Swivel face seal (male or female)

1/4-inch Tube weld

84 mm (3.31 in.)

NOTE 1: The tolerance on length for machined components is ± 0.15 mm (0.006 in.) from the component centerline to each

end.

NOTE 2: The tolerance on length for welded components is ± 0.5 mm (0.020 in.) from the component centerline to each end.

Overall Component Envelope:

Maximum Diameter

38 mm (1.5 in.)

Base to Centerline of Flow Path:

Mounting provisions:

Threaded holes

Pattern

None required

Fittings:

Process

1/4-inch

Control:

None required

8 Shut-off Valves

8.1 Shut-off valves should conform to the interface design recommendations appearing in Figure 2 and Table 2.

Figure 2

Shut-off Valve Interface Design