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SEMI E41-95 © SEM I 1995 1 SEMI E41-95 EXCEPTION MA NAGEM ENT (EM) STA NDARD 1 Purpose 1.1 In teractive e xception handling e nha nces the erro r recovery abili ty while maintaining automated control in the f actory. Thi…

SEMI E40.1-0705 © SEMI 1996, 2005 4

Attribute Name Attribute Data Form: SECS-II Structure

“PRMtlNameList” When MF = 13 (0x0d) (carriers)

L,n n=number of carriers

1. L,2

1. <CARRIERID

2. L,j j=number of slots

1. <SLOTID

j. <SLOTID

n. L,2

1. <CARRIERID

2. L,k k=number of slots

1. <SLOTID

k. <SLOTID

When MF = 14 (0x0e) (substrate)

L,n n=number of material (substrate)

1. <MID

> substrate ID

…

n. <MID

MID restricted to format A

“PRMtlType” <MF>

MF restricted to format B

MF Value Description

13 (0x0d) carriers (e.g. FOUP, SMIF pod, cassette)

14 (0x0e) substrate (e.g. wafer, mask, flat panel)

other not valid for E40 material

“PRProcessStart” <PRPROCESSSTART>

“PRRecipeMethod” <PRRECIPEMETHOD>

“RecID” <RCPSPEC>

“RecVariableList” L,n n=number of recipe variables

1. L,2

1. <RCPPARNM

2. <RCPPARVAL

…

n. L,2

1. <RCPPARNM

2. <RCPPARVAL

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any

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the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

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consent of SEMI.

SEMI E41-95 © SEMI 19951

SEMI E41-95

EXCEPTION MANAGEMENT (EM) STANDARD

1 Purpose

1.1 Interactive exception handling enhances the error

recovery ability while maintaining automated control in

the factory. This standard addresses the

communications needs within the semiconductor

manufacturing environment with respect to equipment

exception handling.

1.2 This standard specifies capabilities to be provided

by the exception agent for effective reporting and

interaction with respect to abnormal situations in the

equipment. It describes the concept of exception

management, the behavior of the equipment in relation

to interactive exception handling, and the messaging

services which are needed to provide the functionality.

1.3 The communications services defined here will

enable standards-based interoperability of independent

systems. They shall allow application software to be

developed which can assume the existence of these

services and allow software products to be developed

which offer them.

1.4 Implementation of automated exception

management will help reduce error recovery time and

avoid changing from automatic to manual equipment

control in many situations. The adoption of the

standards described will greatly reduce the effort

required to integrate compliant equipment components.

Compliance requires a specific set of standard services.

2 Scope

2.1 The current scope of this standard is interactive

exception handling within a cluster tool.

2.2 While the functionality provided may be applied to

other multi-resource equipment, it may not provide the

flexibility required for automated management and

command by the factory of all types of equipment. It is

anticipated that this standard will be extended to

accommodate management of exceptions in other types

of multi-resource equipment and by the factory of all

types of equipment.

2.3 This standard supports exception condition

reporting, including alarms, by an exception agent to a

decision authority. The exception agent also has the

ability to enable and disable reporting on each

exception condition.

2.4 Interactive exception handling is supported

through selection by the decision authority of recovery

actions in certain situations. The recovery actions are

performed by the exception agent with the goal of

resolving the abnormal situation and allowing normal

equipment operation to continue.

2.5 This standard presents a solution from the

concepts and behavior down to the messaging services.

It does not define the messaging protocol.

2.6 A messaging service includes the identification

that a message shall be exchanged and definition of the

data which is contained in that message. It does not

include information on the structure of the message,

how the data is represented within the message, or how

the message is exchanged. This additional information

is contained within the message protocol.

2.7 The defined services may be applied to multiple

protocols. Information on the mapping of exception

management services to special protocols (e.g., SECS-

II) are added as adjunct standards.

2.8 The services assume a communications

environment in which a reliable connection has been

established between the user of the services and the

provider of the services. Establishing, maintaining,

releasing a connection, and handling communication

failures is beyond the scope of this standard.

3 Referenced Standards

3.1 SEMI Standards

3.2 The following SEMI

standard is related to the

Exception Management standard:

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

4 Definitions

The following definitions are arranged in alphabetical

order. Some are defined using terms defined elsewhere

within this section. No references beyond this section

should be necessary for a basic understanding of these

terms.

agent — an intelligent system within a factory that

provides one or more service resources and uses the

services of other agents. A generalization of host,

equipment, cell, cluster, cluster module, station

controller, work station. Agents are associated with a

physical system or a collection of physical systems,

including computer platforms.

1 These documents can be obtained from Semiconductor Equipment

and Materials International, 3081 Zanker Road, San Jose, CA 95134,

408.943.6900.

SEMI E41-95 © SEMI 1995 2

alarm — an alarm is related to any abnormal situation

of the equipment that may endanger people, equipment,

or material being processed.

clearing — exception agent to decision authority

reporting that an abnormal situation related to an

exception condition is no longer apparent or relevant.

decision authority — an entity requiring to be notified

of significant exception condition changes and which

decides how to proceed to resolve abnormal situations

related to recoverable error conditions. The decision

authority may be represented by a supervisory

controller interacting with an operator who may

ultimately choose the recovery action.

error condition — an exception condition which is not

an alarm and which may support recovery actions

requested by a decision authority.

exception agent — the entity which manages access to

and reporting of information on abnormal situations in

equipment. It achieves this by defining exception

conditions, each related to a significant abnormal

situation. It may provide services for a decision

authority to direct the recovery from certain situations.

exception condition — a condition managed by an

exception agent for reporting on and recovery from an

abnormal situation in the equipment.

form — type of data representing information contained

in an object attribute or service message parameter. The

data types are detailed in Section 4.1.

fundamental requirements — the requirements for

information and behavior that must be satisfied for

compliance with a standard. Fundamental requirements

apply to specific areas of application, objects, or

services.

posting — all exception agent to decision authority

reporting associated with an exception condition while

the related abnormal situation is apparent and relevant.

recovery action — an operation associated with an error

condition with the aim of resolving the abnormal

situation detected. It may supply information to the

exception agent or request the exception agent to

perform some activity.

service — the set of messages and definition of the

behavior of a service provider that enables remote

access to a particular functionality.

service-provider — the software control entity that is

the provider of any of the related services.

service-user — the software control entity that is the

user of any of the related services.

4.1 Data Type

form — type of data: positive integer, unsigned integer,

integer, enumerated, boolean, text, formatted text,

structure, list, ordered list.

positive integer — may take the value of any positive

whole number. Messaging protocol may impose a limit

on the range of possible values.

unsigned integer — may take the value of any positive

integer or zero. Messaging protocol may impose a limit

on the range of possible values.

integer — may take on the value of any negative or

unsigned integer. Messaging protocol may impose a

limit on the range of possible values.

enumerated — may take on one of a limited set of

possible values. These values may be given logical

names, but they may be represented by any single-item

data type.

boolean — may take on one of two possible values,

equating to TRUE or FALSE.

text — a text string. Messaging protocol may impose

restrictions, such as length or ASCII representation.

formatted text — a text string with an imposed format.

This could be by position, by use of special characters,

or both.

structure — a complex structure consisting of a specific

set of items, of possibly mixed data types, in a specified

arrangement.

list — a set of one or more items that are all of the same

form (one of the above forms).

ordered list — a list for which the order in which items

appear is significant.

5 Conventions

5.1 Harel State Model — This document uses the

Harel State Chart notation to describe the dynamic

behavior of the objects defined. An overview of this

notation is presented in an Appendix of SEMI E30. The

formal definition of this notation is presented in Science

of Computer Programming 8, “Statecharts: A Visual

Formalism for Complex Systems,” by D. Harel, 1987.

Transition tables are provided in conjunction with the

state diagrams to describe explicitly the nature of each

state transition. A transition contains columns for

Transition #, Current State, Trigger, New State,

Action(s). The “trigger” (column 3) for the transition

occurs while in the “current” state. The “actions”

(column 5) include a combination of (1) actions taken

upon exit of the current state, (2) actions taken upon

entry of the new state, and (3) actions taken which are

most closely associated with the transition. No

differentiation is made.