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SEMI S2-0703a E © SEMI 1991, 2004 91 RELATED INFORMATION 15 ADDITIONAL CONSIDERATIONS FO R FIRE SUPPRESSION SYSTEMS NOTICE : This rel ated infor mation is not an offi cial part of SEM I S2. It was derived from editorial …

SEMI S2-0703a

R14-9.2.3 During pre-inspection, control system

commissioning protocols should be prepared.

R14-9.2.4 If a safety analysis or safety case has been

prepared for the specific installation, all documents

regarding this activity should be made available.

R14-9.2.5 Whether a safety analysis or safety case has

been prepared or not, a directory of available

documents should be generated.

R14-9.2.5.1 This list should include the titles, dates

and number of pages of all documents.

R14-9.2.5.1.1 If possible, all documents should also be

available in electronic form.

R14-9.2.5.2 The documentation should include:

a. Safety Specification (if possible as formal

specification),

b. Top-level diagram of the application (1 or 2

pages),

c. Technical implementation (e.g. block, flow

and timing diagrams),

d. Explanation of separation between safety

critical and not safety critical parts of the

application,

e. Safety handbooks of the system components

(safety handbooks of the safety controllers,

sensors and actuators),

f. Description of interfaces,

g. Specification of all safety relevant program

parts,

h. I/O documentation,

i. Software program documentation,

j. Wiring documents,

k. Diagram and listing of the interaction

between input- and output-data (e.g. safety

matrix, cause-effect diagrams or comparable

documents),

l. Cross reference listing,

m. Source programs on storage medium, and

n. Description of the procedure to verify, that

the documentation, respectively the files on

the storage medium, are identical to the

programs in the application (upload verify,

CRC checksums, or comparable).

R14-10 Safety Performance

R14-10.1 For details on how to achieve the necessary

safety system requirements, see ISO 13849.

NOTE 11: An update of document IEC 62061 is currently

under preparation, and it should be consulted for further

details.

R14-11 Application Examples

R14-11.1 Safety is important in semiconductor

equipment (especially in the area of wafer fabrication)

where toxic media (e.g. gases or chemicals), high-speed

motion, or lasers may be present. The following are

examples of some wafer fabrication equipment which

could be adapted to a FECS:

a. CVD

b. Cleaning Equipment

c. CMP

d. Diffusion/Oxidation

e. Dry Etch Systems

f. Epitaxy

g. Ion Implantation

h. Lithography

i. Physical Vapor Deposition

j. Vacuum Deposition

k. Wet Etch Systems

R14-12 Related Documents

R14-12.1 DIN V VDE Standards

DIN V VDE 19250 — Control Technology; Functional

Safety Aspects to be Considered for Measurement and

Control Equipment

24 VDE-Verlag GmbH, Bismarkstrasse 33, 10625 Berlin, Germany,

www.vde.de

SEMI S2-0703a

RELATED INFORMATION 15

ADDITIONAL CONSIDERATIONS FOR FIRE SUPPRESSION SYSTEMS

NOTICE: This related information is not an official part of SEMI S2. It was derived from editorial work by the

Fire Protection Task Force. This related information was approved for publication by Technical Ballot and formal

adjudication as an Effective date line item on March 18, 2004.

R15-1 Introduction

R15-1.1 Preventing discharges from occurring

accidentally and ensuring that systems are able to fulfill

their intended function requires attention to detail from

the specification of the system, through design,

installation and commissioning and then through on-

going maintenance.

R15-1.2 The following information is intended to assist

stakeholders involved in the process of designing,

installing, and maintaining fire protection of

semiconductor manufacturing equipment. Further

information can be found in the appropriate fire

protection codes and standards applicable to the type of

fire protection system and in related documents.

NOTE 1: The term “fire suppression” is limited to

extinguishing fire, once it has begun. The term “fire

protection” incorporates fire suppression and other means of

mitigating the risk of fires, including fire detection and

materials selection.

R15-1.3 The use of contractors with previous

experience in the design and installation of fire

protection of cleanrooms and semiconductor

manufacturing equipment is desirable.

R15-1.4 Independent third party review of fire

protection designs and installations by a fire protection

engineer with relevant experience can also help to

ensure that systems are correctly designed and installed.

NOTE 2: The material in this Related Information is

presented as additional guidance in designing, installing, and

maintaining fire protection systems in semiconductor

manufacturing equipment. Although this information is

believed to be useful in optimizing such systems, the material

in this Related Information does not comprise additional

criteria for determining conformance to the provisions of

SEMI S2 or SEMI S14.

R15-2 Design Review

R15-2.1 Ensure that system proposed uses approved or

listed components and that they are used within their

listing or approval, e.g., FM Approved wet bench fire

suppression systems should be used for open-faced wet

bench whereas an enclosed tool can use a system

comprising of FM approved & compatible components.

R15-2.2 Detection needs to be selected to suit the

working environment and the type of fire/smoke that is

anticipated. For example, optical detectors need to

have been tested and approved/listed for use with

specific flammable liquids or gases. Flames and smoke

from burning materials have varying physical

characteristics which mean that some detection devices

will not always react promptly.

R15-2.3 The location of detection devices in relation to

hazards needs to be carefully considered. A detector

that is located too close to a heat source may activate

when it sees normal process conditions rather than fire

conditions.

R15-2.4 Some optical detectors may also be

susceptible to accidental activation if they are exposed

to welding flashes. Care in detector selection can avoid

this, but implementing strict cutting and welding

working practices and permissions can also play an

important part.

R15-3 Installation Review

R15-3.1 Once completed by the fire protection

installer, the fire protection installation should be

inspected and reviewed by a competent and

experienced fire protection engineer. This review will:

R15-3.1.1 Verify installation against previously

working drawings.

R15-3.1.2 Ensure that specified equipment has been

installed as indicated on the working drawings and in

line with equipment approvals and listings.

R15-3.2 Distribution pipework networks should be

complete (including all connections), properly

supported using listed and approved equipment.

Frequent failures of piped systems, including CO

systems, occur due to incorrectly connected pipes or

where fittings have not been made or sufficiently

tightened.

R15-3.3 Supports for pipework should be able to

withstand the expected forces that will be experienced

during discharge of the suppression system. This is

important to protect personnel and property from

moving pipes in high-pressure systems using agents

such as carbon dioxide.

R15-3.4 Detection systems should have components

installed as per reviewed drawings, however it is not

always possible during desktop drawing review to

identify that detectors are correctly sited. As a result,

SEMI S2-0703a

the field review should concentrate on ensuring that

components are located so that they can see the hazard

without obstruction, including clear vision panels,

which may prevent detector from “seeing” the flame.

R15-3.5 Similarly, detectors need to be sited so that

they will not experience normal process temperatures,

radiation or be exposed to chemical, liquid or particles

that could result in an accidental activation.

R15-3.6 Where linear heat detection cable is used it

should be located where it will not be exposed to levels

of ambient or process related heat that could trigger an

alarm signal. In addition, the cable should be securely

attached to prevent it dislodging and coming into

contact with hot surfaces.

R15-3.7 Nozzle locations in many suppression systems

can be critical to ensuring functionality, reliability and

safety. For example, CO

nozzles incorrectly

positioned can result in chemical splashing or

dislodging product or quartzware. If nozzles are

exposed to chemical action including corrosive

chemicals, it is important that the materials are resistant

to the chemical

R15-3.8 Where automatic sprinkler heads are used, the

fusible link should be adequately protected from

chemical and mechanical attack.

R15-4 Commissioning Tests

R15-4.1 All installations should undergo a thorough

commissioning and acceptance test conducted by the

installer and witnessed by the owner or owner’s

representative.

R15-4.2 Functional Tests are essential, but not

sufficient to ensure that system will operate as in

tended. The types of problems that can be picked up by

functional testing are:

R15-4.2.1 Inability of detection system to detect as

intended,

R15-4.2.2 Inability of control system to receive signal

from individual detectors, and

R15-4.2.3 Inability of alarm panel to initiate system

discharge or send alarm signals to connected devices

and safety systems, e.g.,

 local or remote alarm panels,

 sounders & warning devices, and

 interlocks to equipment shutdown and safety

systems, EMO.

R15-4.3 Discharge Testing is the only way that we can

ensure that that a system will fulfill its intended

function. The types of problems that can be picked up

by discharge testing are:

R15-4.3.1 Lack of extinguishing agent

R15-4.3.2 Inability to transfer agent from supply to

nozzles due to:

 Blockages arising from incorrect equipment,

 Incomplete piping, loose fittings & supports, and

 Installation, design problems (e.g., icing up of CO

pipes or nozzles).

R15-4.4 In many cases discharge testing within the

cleanroom environment is not considered acceptable or

practical. Accordingly, alternatives such as type testing

can prove that the design will provide the necessary

protection, but may need to be supplemented by a more

rigorous commissioning test of the final systems. Type

testing would involve the installation and discharge

testing of a system on a tool during manufacture or on a

mock up of the tool. The aim would be to prove that

distribution pipework and nozzles have been correctly

designed and that the concentration of agents and

distribution patterns from nozzles is acceptable. This

would be supplemented by additional tests on each

installation, including pressure tests of pipework and

“puff” tests to verify pipework integrity.

R15-5 Burn In

R15-5.1 In order to avoid unnecessary discharges, a

period of burn-in for the detection system is advisable.

This involves the detection system operating, enabling

detection of fires and initiation of alarms, but the

detection is not interlocked to shut down the process

equipment or initiate a discharge.

R15-5.2 A period of days or weeks may be appropriate

depending on the effect of an accidental activation of

the system in terms of interruption to processing,

damage to product or contamination of the

environment.

R15-6 Maintenance & Servicing

R15-6.1 Once systems are installed and commissioned

it is important that the routine inspection and

maintenance procedures recommended by

manufacturers and those required by codes and

standards, are adequately implemented.

R15-6.2 The inspection frequencies may need to be

modified if the ambient conditions can adversely affect

the protection systems. For example, sprinkler heads

protecting corrosive fume exhaust ducts may need to be

inspected weekly or monthly until the appropriate

frequency for that particular system can be determined.