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SEMI E88-1104 E © SEMI 1999, 2004 12 Transition # Previous State Trigger New State Action Comments 15 None 1. Carrier created directly on the cr ane (as the result of duplicate ID reco very). 2. Transfer Command received…

SEMI E88-1104

8.4.4 Stocker Carrier State Transition Table

Table 3 Stocker Carrier State Transition Table

Transition

Previous State Trigger New State Action Comments

1 none Carrier arrives at a

WaitIn position of the

stocker.

WAIT IN S6F11

CarrierWaitIn

2 WAIT IN Stocker is executing a

TRANSFER command

for the carrier.

TRANSFERRING S6F11 Carrier-

Transferring

3 TRANSFERRING Completion of a

TRANSFER command

with a DEST of

internal stocker

storage.

COMPLETED S6F11

CarrierStored

Carrier is at an

internal storage

destination.

4 COMPLETED Stocker is executing a

TRANSFER command

for the carrier.

TRANSFERRING S6F11 Carrier-

Transferring

5 TRANSFERRING Carrier has arrived at

the output port.

WAIT OUT S6F11

CarrierWaitOut

6 WAIT OUT Carrier has advanced

(automatically) on a

port beyond the output

port.

WAIT OUT S6F11

CarrierWaitOut

7 WAIT OUT Carrier is removed

from the stocker

domain (removed from

the output LP).

None S6F11

CarrierRemoved

8 TRANSFERRING The destination of the

move command is

occupied.

ALTERNATE S6F11

CarrierStoredAlt

SC is waiting for the

Destination to become

available.

9 ALTERNATE The port becomes

available and transfer

command is first in

queue.

TRANSFERRING S6F11

CarrierResumed

Carrier continues with

move to the

Destination.

10 None Carrier entry is created

or modified in the SC

database.

COMPLETED S6F11

CarrierInstall-

Completed

Could be due to an

INSTALL remote

command or initiated

by the Stocker

Controller.

11 INSTALLED Carrier entry is

removed from the SC

database.

None S6F11

CarrierRemove-

Completed

Could be due to a

REMOVE remote

command.

12 ALTERNATE Transfer command is

Aborted.

COMPLETED S6F11

CarrierStored

13 WAIT OUT Carrier on a bi-

directional port is

ready to be moved to a

storage or output

location.

WAIT IN S6F11

CarrierWaitIn

Examples of a trigger

could be the operator

pressing a button or

the host issuing a

transfer command for

the carrier.

14 None The result of ID read at

an output port that did

not match the expected

ID.

WAITOUT S6F11

CarrierWaitOut

SEMI E88-1104

Transition

Previous State Trigger New State Action Comments

15 None 1. Carrier created

directly on the crane

(as the result of

duplicate ID

recovery).

2. Transfer

Command received

from host with the

source being a port

with no SC

controlled sensors

(e.g.directly

connected process

equipment).

TRANSFERRING S6F11 Carrier-

Transferring

It is also

permissible to use

state transitions #1

and #2 for the

scenario in trigger

#2 especially when

the transfer

command is

queued. This

transition may not

be required in all

configurations.

16 TRANSFERRING Carrier has arrived at

an Output port and is

removed from the

stocker domain.

None S6F11

CarrierRemoved

This generally

occurs when

delivering directly

to process

equipment at a port

with no sensors

controlled by the

SC.

8.5 Stocker Crane State Model

8.5.1 Stocker Crane State Model Requirements

8.5.1.1 The purpose of the stocker crane state model is to provide information to the host for use of stocker crane

information and metric tracking (i.e., the Host will not control the stocker crane). If it is possible for the stocker to

continue operation while the stocker crane is not operational then the Stocker Crane State Model will retain its

current state and the SC State Model will be ALARM. When the stocker crane becomes operational again, the state

of the Stocker Crane State Model will transition to the new state. Whether it is possible to continue operation while

the stocker crane is not operational is specific to the stocker SEM equipment supplier. If a single stocker contains

multiple stocker cranes, each stocker crane must comply with the stocker crane state model. Compliance with the

stocker crane state model is only required for devices that contain a crane. The Host should not be dependent on any

events from the stocker crane state model.

8.5.2 Stocker Crane State Model

ACTIVEIDLE

Figure 6

Generic Stocker SEM Stocker Crane State Model Diagram

8.5.3 Stocker Crane State Definitions

8.5.3.1 IDLE — The stocker crane is not performing Host or SC initiated work.

8.5.3.2 ACTIVE — The stocker crane is busy performing Host or SC initiated work.

SEMI E88-1104

8.5.4 Stocker Crane State Transition Table

Table 4 Stocker Crane State Transition Table

Transition # Previous State Trigger New State Actions Comments

1 IDLE Crane is requested to perform

host or SC initiated work.

ACTIVE

S6F11

CraneActive

2 ACTIVE

Crane completes host or SC

initiated work.

IDLE S6F11

CraneIdle

8.6 Port Transfer State Model

8.6.1 Port Transfer State Model Requirements

8.6.1.1 The purpose of the port state model is to provided information to the host for the use in accessing ports.

This may permit the host and stocker to utilize ports that are in service while avoiding the use of ports that are not in

service.

8.6.2 Port Transfer State Model

IN SERVICE

READY TO

LOAD

READY TO

UNLOAD

TRANSFER

BLOCKED

OUT OF

SERVICE

2 3

Figure 7

Port State Model Diagram

A-1.1.1.1