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SEMI S24-0705 © SEMI 2005 3 5.2.11 multi-employer work area — a work area in which em ployees of mo re than one company work. The workers may or m ay not be prese n t at the sam e time fo r an area to be considered “m ul…
SEMI S24-0705 © SEMI 2005 2
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This safety guideline is not intended to supersede the applicable codes and regulations of the region where the
equipment is used.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S19 Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance
and Service Personnel
SEMI S21 Safety Guideline for Worker Protection
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 FPD — Flat Panel Display
5.1.2 PPE — Personal Protective Equipment
5.1.3 SSCC — Safety Supervisors’ Communication Council
5.2 Definitions
5.2.1 Definitions in SEMI S2, SEMI S19 and SEMI S21 are incorporated herein by reference, unless the term is
defined within this section.
5.2.2 abnormality — a condition or behavior different from normal or predetermined state that can result in an
incident or accident.
5.2.3 adjacent work area — a work area that shares a common boundary with the work area being considered. The
common boundary may separate the areas horizontally (e.g., the areas are on opposite sides of a wall) or vertically
(e.g., one work area is in a cleanroom and the other in the subfab directly underneath it).
5.2.4 contractor — a company hired to accomplish a contractually specified scope of work, such as constructing a
facility or providing service.
5.2.5 de-installation — the process of disconnecting, disassembling, and moving semiconductor or FPD
manufacturing equipment from its point of installation, including movement of assemblies and further preparation
(e.g., isolating, decontaminating, component disposal) of chemically contaminated semiconductor or FPD
manufacturing equipment for a safe move.
5.2.6 equipment supplier — party who provides equipment to and communicates directly with the user. A supplier
may be a manufacturer, an equipment distributor, or an equipment representative.
5.2.7 fab — a facility in which semiconductor devices or flat panel displays are manufactured.
5.2.8 facility supplier — party who provides a facility or facility service (e.g., nitrogen) to, and directly
communicates with, the user. A facility supplier may be a construction company, a manufacturer or distributor of
facility equipment (e.g., deionization systems), or a facility service provider.
5.2.9
installation — the activities performed after the equipment is received at a user site through preparation for
initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up. [SEMI S8]
5.2.10 multi-employer fab — a fab in which employees of more than one company work. The workers may or may
not be present at the same time for a fab to be considered “multi-employer”.
SEMI S24-0705 © SEMI 2005 3
5.2.11 multi-employer work area — a work area in which employees of more than one company work. The workers
may or may not be present at the same time for an area to be considered “multi-employer”.
5.2.12 overhaul — major disassembly, replacement of components as necessary, and reassembly.
5.2.13 start-up — the initial energization of semiconductor or FPD manufacturing equipment from each source of
energy that may introduce a hazard to the semiconductor or FPD manufacturing equipment itself, the persons
performing the installation, or the facility.
5.2.14 supplier — an equipment supplier or facility supplier.
5.2.15 unit of work — the extent of work which is directly controllable by a supervisor.
5.2.16 user — party who acquires equipment for the purpose of using it to manufacture semiconductors or FPDs.
5.2.17 work area — room or defined space where semiconductor or FPD manufacturing equipment is located and
where workers are present. This can include service chases and sub-fab areas.
5.2.18 work supervisor — person who manages workers directly as a team leader to conduct a unit of work.
6 General Concepts
6.1 The users, suppliers and contractors should reduce risks in their own tasks and have their people work safely.
6.2 The user should coordinate the work schedules of the suppliers and the contractors who work simultaneously in
the multi-employer and adjacent work areas.
6.2.1 The user should explain to each supplier or contractor how to communicate unexpected schedule changes to
the affected parties.
6.2.2 Each supplier or contractor should submit a work schedule through whole tasks before starting an initial task.
The supplier or contractor should submit a revised schedule to the user at every update.
6.2.3 Based on the work schedule, the user should provide the necessary safety information such as PPE, safety
alarms, evacuation route, and safety devices (safety net, eye shower, fall protection, etc.) to its employees and to the
affected suppliers and contractors.
7 User Actions
7.1 The user should provide the safe working environment for all people who work in its fab. In order to do so, the
user should also encourage mutual communication among the suppliers and contractors.
7.1.1 Safety Management Plan Notification — Based on the work process, work schedule, and facility layout plan,
the user should disclose the safety management plan during the installation/overhaul and startup period including
such items as fundamental policy of safety management, target, and important points of hazard prevention.
7.1.2 Provision of safety net and anchorage (hookup facility) point for personal fall protection equipment (safety
harnesses) should be included in the safety management plan.
7.2 The user should establish a
Safety Supervisors’ Communication Council (SSCC).
7.3 The user should conduct a SSCC meeting in which representatives of the user and all the suppliers and the
contractors should participate. The suppliers and the contractors should attend the SSCC meeting each workday.
7.4 The user should coordinate the suppliers’ and the contractors’ workers to work together safely.
7.5 When the workers of different companies conduct work separately in the upper and lower rooms of the same
area, they should communicate each other and coordinate their work before and during the work, under the
leadership of the user.
7.6 At work locations where the workers may face hazards, relevant work supervisors should communicate well
and coordinate with each other for the work under the leadership of the user.
7.7 The user should instruct the suppliers’ and the contractors’ workers so that their tasks should be carried out after
setting up incident/accident preventive facilities and preparing PPE.
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8 Work Supervisor
8.1 Each supplier should designate a responsible person, called “work supervisor”, as a representative of the
supplier for each unit of work.
8.2 The work supervisor should also communicate with the user and other work supervisors and make efforts to
reduce the risk to the employees of all of the employers.
8.3 The work supervisor should make himself/herself identifiable by others by wearing an identifying item, such as
colored cap, colored band, or badge.
NOTE 2: We recommend identification method is consistent for all supervisors at the given site.
8.4 When the work supervisor leaves the workplace, he/she should transfer his/her responsibility to his/her
substitute.
8.5 Tasks of the Work Supervisor — The work supervisor should:
8.5.1 Attend the SSCC meeting.
8.5.2 Present the instructions from the SSCC meeting and safety patrol results to the workers.
8.5.3 Adjust each work schedule with the user and other suppliers or contractors and identify hazardous areas and
restricted areas in multi-employer work areas.
8.5.4 Identify the hazardous and restricted areas to the workers.
8.5.5 Conduct a job hazard analysis before work and share the results with all the workers in order to awaken their
awareness to hazards and to encourage them to take proper measures.
8.5.6 Put up warning indications identified by SSCC.
8.5.7 Conduct safety patrol on the workplace and observe the adjacent workareas. For avoiding Intellectual
Property problems, the SSCC meeting should deal with Intellectual Property issues.
8.5.8 In case of equipment trouble affecting an adjacent work area, notify the user and people working there of the
abnormality
.
NOTE 3: The following 14 additional tasks are recommended for consideration.
Prepare a work instruction on the basis of work schedule and notify the workers of it.
Visually inspect the user cleanroom and its associated facilities as well as all of the plant before starting to
work.
Check facilities for eyewash, shower, anchorage, fire fighting and emergency evacuation.
Give work instruction to workers after confirming that no unsafe condition exists around the workplace.
Allocate workers properly in terms of manpower, skill level, prioritization of units of work, schedule, etc., so
that the risks should be appropriately managed.
Carry out arrangement and inspection of tools and jigs and PPE to be used.
Check if workers are physically able to do a task.
Give instruction to the relevant worker and have him/her correct it on the spot, whenever unsafe behavior or
situation is witnessed.
Conduct housekeeping and make due preparation for the next day.
Report work progress status to the user as well as to the superior of the work supervisor.
Consult with his/her superior and the user in case an incident or accident happens.