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SEMI S2-0703a E © SEMI 1991, 2004 98 C. Other types of PPE (e.g., skin protection) if needed _______, _____ __, _______ Note 2: Suppliers may altern atel y provide a r eference to P PE information located in a docu ment …

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C. Pulse Repetition Frequency in Hertz (Hz) _______, _______, _______
D. Average Power in Watts (W) _______, _______, _______
E. Radiant Exposure Joules/square centimeter (J/cm
2
) _______, _______, _______
F. Q-Switch controlled pulses (Yes/No) _______, _______, _______
A7-2.6 Beam Parameters at maintenance or service access points
Exception: In the case of proprietary information, an acceptable alternative to providing the Beam
Parameters is to provide NOHD results for each access point according to IEC 60825 or equivalent.
A. Beam shape Circular (C), Rectangular (R), Elliptical (E) _______, _______, _______
B. Beam size (mm) Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
Laser Parameters Laser ___1___, ___2___, __etc.__
C. Beam divergence in milliradians (mr)
Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
D. Focal length in millimeters (mm) (of the emitting lens)
Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
E. Is there a collecting optics hazard? (Yes/No) _______, _______, _______
A7-3 Laser Control Measures
A7-3.1 Specify maintenance/service tasks requiring access to laser radiation in excess of the MPE and
recommended laser control measures.
A. Task 1 ________________________________________________________________
B. Task 2 ________________________________________________________________
C. Etc. ________________________________________________________________
Note 1: Suppliers may alternately provide a reference to laser control measures information that is located in a document
available to users.
A7-3.2 Of the tasks in A7-3.1, which tasks need a Laser Controlled Area (for Class 3b or 4 lasers)?
_______________________________________________________________________________
A7-3.3 If a nominal ocular hazard distance (NOHD) is used as a control measure, then provide the NOHD
calculations and assumptions. See IEC 60825-1 for NOHD calculations.
Exception: If specific information required by A7-2.6 is proprietary, suppliers may provide the NOHD results and
an explanation of the assumptions made.
A7-3.4 Include a beam path diagram identifying the accessible points.
NOTE 1: A description of the access points from the exterior of the tool can be considered equivalent to a diagram.
A7-4 Personnel Protective Equipment (PPE)
Provide information for accessible laser radiation hazards in excess of the Maximum Permissible Exposure (MPE)
Laser Parameters Laser ___1___, ___2___, __etc.__
A. Optical Density (OD) of PPE required during maintenance _______, _______, _______
B. OD of PPE required during service activities _______, _______, _______
SEMI S2-0703a
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© SEMI 1991, 2004 98
C. Other types of PPE (e.g., skin protection) if needed _______, _______, _______
Note 2: Suppliers may alternately provide a reference to PPE information located in a document available to users.
D1-5 Revisions to Related Information 9 (Laser Checklist) — OPTIONAL Before Effective Date
D1-5.1 Revision of the existing Related Information 9 (Laser Checklist) as shown below:
RELATED INFORMATION 9
LASER CHECKLIST
LASER EQUIPMENT SAFETY FEATURES
NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by
task force members. This related information was approved for publication by vote of the responsible committee on
Oct
ober 21, 1999 April 22, 2004 with an effective date of July 1, 2006.
Laser Manufacturer:
__________________________________
Model #:
__________________________________
Serial #:
__________________________________
Laser Hazard Classification: (During Op
eration)
1. Classification Number (e.g. 1, 2, 3a, 3b, 4):
________
2. Classification Standard(s) (e.g. FDA/CDRH, IEC, JIS, etc.):
________
NOTE R9
-1: If any laser contained in the equipment is Class 2, 3a, 3b or 4 laser system or product, the vendor should
make available upon request a hazard evaluation to include the following information for each laser in the equipment
(where applicable):
Laser Parameters
1. Laser medium type (HeNe, Nd:YAG, CO
2
, Argon, Excimer, GaAs, etc.): __________
Note: For Excimer lasers, specify gases: _______________
2. Wavelength(s) in nanometers (nm):
_______________
3. Continuous Wave
A. Peak Power in Watts (W): ________
B. Available Power in Watts (W): ________
C. Irradiance in Watts/square centimeter (W/cm
2
): _ ________
4.
Pulse Characteristics
A. Duration of Pulse in Seconds (s): ________
B. Energy per Pulse in Joules (J): ________
C. Frequency of Pulses (Pulse Repetition Frequency) in Hertz (Hz): ________
D. Average Power in Watts (W): ________
E. Radiant Exposure in Joules/square centimeter (J/cm
2
): ________
F. Q-Switch controlled pulses ( ) Yes ( ) No
5.
Beam Parameters
A. Emerging beam diameter in millimeters (mm): ________
B. Expanded beam diameter in millimeters (mm): ________
C. Beam divergence in milliradians (mr): ________
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D. Collecting optics type: ________
E. Focal length in millimeters (mm): ________
Laser Control Measures
1.
Identify protective measures required during maintenance. __________________
____________________________________________________________________
2.
Laser Controlled Area required for Maintenance procedures? ( ) Yes ( ) No
3.
Laser Controlled Area required for Service procedures. ( ) Yes ( ) No
4.
If a Nominal Ocular Hazard Distance (NOHD) is used as a control measure, then provide the NOHD
calculations. See IEC 60825-1 for NOHD calculations.
NOTE R9-2: Attach a diagram of the laser beam path and the irradiance/radiant exposure at each significant point.
Personnel Protective Equipment (PPE) (for laser radiation hazards in excess of the MPE)
1.
Optical Density (OD) of PPE required during maintenance activities: ___________
2.
OD of PPE required during service activities: ___________
3.
Recommended PPE manufacturer and model #: ______________________________
Table R9-1 Equipment Safety Features Reference Table
Reference
Number
Equipment
Safety Features
(not an inclusive
list)
D
USA
21 CFR
1040.10
A
Europe
ENIEC
60825-1
B
Japan
JIS
C 6802
C
Examples
Paragrap
h
P
aragrap
h
Paragrap
h
Examples
1. Protective
Housing
( ) Yes (
) No
(f)(1) 4.2 4.2.1 Aluminum or steel enclosures,
windows that provide adequate
attenuation, optical fibers or
beam tubes.
2. Safety
Interlocks
( ) Yes
( ) No
(f)(2) 4.3 4.2.2 See Interlock
Section 11 of
SEMI S2.
3. Remote
Interlock
Connector
( ) Yes
( ) No
(f)(3) 4.4 4.2.3 Usually a 12 to 24 volt set of
contacts available to the user to
integrate additional room control
measures.
4. Key Control ( ) Yes
( ) No
(f)(4) 4.5 4.2.4 A key that is not removable in
the operations mode.
5. Laser Radiation
Emission
Warning
( ) Yes
( ) No
(f)(5) 4.6 4.2.5 A light or indicator that warns
the user of the emission through
the aperture.
6. Beam
Attenuator
( ) Yes
( ) No
(f)(6) 4.7 4.2.6 Shutters, beam blocks or water-
cooled beam dumps
7. Location of
Controls
( ) Yes
( ) No
(f)(7) 4.8 4.2.7
8. Viewing Optics ( ) Yes
( ) No
(f)(8) 4.9 4.2.8 Must block all hazardous
wavelengths to acceptable
levels.
9. Scanning
Safeguard
( ) Yes
( ) No
(f)(9) 4.10 4.2.9 Shuts down if the scanning
mechanism (such as a rotating
mirror or galvanometer) fails.
10. Manual Reset
Mechanism
( ) Yes
( ) No
(f)(10) 4.3.1 4.2.2(c) A button or circuit that must be
energized before the equipment
resumes its functions.